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8152921 |
Crystal manufacturing
An implementation of a Czochralski-type crystal growth has been shown and embodied. More particularly, a furnace with suitable insulation and flow arrangement is shown to improve the...
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8147613 |
Crystal puller and method for growing a monocrystalline ingot
A crystal puller for growing monocrystalline ingots includes a side heater adjacent a crucible for heating the crucible and a melt heat exchanger sized and shaped for surrounding the ingot and...
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8114218 |
Crucible for a crystal pulling apparatus
A single crystal pull apparatus has a multilayer crucible wherein the crucible has an outer crucible, an insertable layer intimately fitted thereon, and a wire frame positioned between the...
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8101022 |
Crystal-growing furnace system with emergent pressure-release arrangement
A crystal-growing furnace system with an emergent pressure-release arrangement includes an isolated chamber and a furnace upper body. The top board is provided with an opening and three first...
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8083852 |
Single crystal growth method and single crystal pulling apparatus
A silicon single crystal growth method of pulling up and growing a single crystal from a melt of a silicon raw material melted in a quartz crucible based on a Czochralski method, the method...
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8057598 |
Manufacturing equipment for polysilicon ingot
Disclosed therein is an apparatus for producing a polycrystalline silicon ingot for a solar cell, which has uniform crystal grains formed by solidifying silicon melted in a crucible using a cooling...
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7971836 |
Supporting table having heaters inside crystal-growing furnace
A supporting table having heaters inside a crystal-growing furnace includes a table plate and a plurality of supporting posts, wherein the supporting posts support the table plate and are,...
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7828897 |
Crystal pulling apparatus and method for the production of heavy crystals
A pulling apparatus and a method with which especially heavy crystals (5) can be pulled using the Czochralski method utilizing the pulling apparatus. For this purpose the neck (4) of the crystal...
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7828893 |
Silicon wafer and process for the heat treatment of a silicon wafer
A silicon wafer having no epitaxially deposited layer or layer produced by joining to the silicon wafer, with a nitrogen concentration of 1·1013-8·1014 atoms/cm3, an oxygen concentration of 5...
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7780782 |
Method and apparatus for growing a ribbon crystal with localized cooling
A method of growing ribbon crystal provides a crucible containing molten material, and passes at least two strings through the molten material to produce a partially formed ribbon crystal. The...
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7767020 |
Method for manufacturing single crystal semiconductor
A method for manufacturing a single crystal semiconductor, in which, in a process of pulling up the single crystal semiconductor from melt for growing it, an impurity is incorporated more uniformly...
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7727334 |
Apparatus for pulling single crystal by CZ method
In a Czochralski (CZ) single crystal puller equipped with a cooler and a thermal insulation member, which are to be disposed in a CZ furnace, smooth recharge and additional charge of material are...
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7708830 |
Method and device for the production of a silicon single crystal, silicon single crystal, and silicon semiconductor wafers with determined defect distributions
A method for the production of a silicon single crystal by pulling the single crystal, according to the Czochralski method, from a melt which is held in a rotating crucible, the single crystal...
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7662231 |
Cord rotating head for a crystal drawing system
The invention relates to the production of a cable rotating head, which is devoid of an abrasion ring, for a Czochralski-crystal drawing system which is used to drive a drawing cord in an azimuthal...
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7635414 |
System for continuous growing of monocrystalline silicon
An improved system based on the Czochralski process for continuous growth of a single crystal ingot comprises a low aspect ratio, large diameter, and substantially flat crucible, including an...
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7632350 |
Crystal grower with integrated Litz coil
An apparatus and method of manufacturing a crystal grower is disclosed. The crystal grower includes a reservoir constructed to receive a crystal growing material therein. An induction heater having...
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7588638 |
Single crystal pulling apparatus
A single crystal pulling apparatus having a heater 4 melting material silicon by thermal radiation from a cylindrical exothermic part 4a which surrounds a crucible 3 inside a furnace body 2 and an...
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7572334 |
Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application
A method and apparatus for forming a semiconductor sheet suitable for use as a solar cell by depositing an array of solidified drops of a feed material on a sheet support. The desired properties of...
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7491270 |
Heat shield member and single crystal pulling device
A heat shielding member 20 that thermally shields the periphery of a single crystal 16 used in a Czochralski single crystal pulling device that pulls the single crystal 16 from a melt 15 that is...
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7427327 |
Silica glass crucible with barium-doped inner wall
A silica glass crucible includes a thin barium-doped inner layer, a stable, bubble-free intermediate layer, and a stable opaque outer layer. The fusion process of the present invention controls the...
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7427325 |
Method for producing high quality silicon single crystal ingot and silicon single crystal wafer made thereby
In a method for producing a high quality silicon single crystal by the Czochralski method, a lower portion of a solid-liquid interface of a single crystal growth is divided into a central part and...
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7423242 |
Oven for non-metal melting
Oven for non-metal melting, in particular silicon melting, with a housing enclosing an interior, at least one mould arranged in the interior for receiving a non-metal melt, at least one electrical...
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7419545 |
Method for producing silicon carbide (SiC) single crystal and silicon carbide (SiC) single crystal obtained by such method
The present invention provides a producing method with which large silicon carbide (SiC) single crystal can be produced at low cost. Silicon carbide single crystal is produced or grown by...
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7416603 |
High quality single crystal and method of growing the same
Disclosed is a method of growing a single crystal from a melt contained in a crucible. The method includes the step of making the temperature of a melt increase gradually to a maximum point and...
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7413609 |
Semiconductor single crystal manufacturing apparatus
A semiconductor single crystal manufacturing apparatus capable of lowering the local deterioration of a wire under high temperature atmosphere in the furnace of a chamber, wherein a crucible (24)...
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7390361 |
Semiconductor single crystal manufacturing apparatus and graphite crucible
A semiconductor single crystal manufacturing apparatus which can manufacture a single crystal of high oxygen concentration to that of low oxygen concentration within a prescribed standard range of...
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7387680 |
Method and apparatus for the production of silicon carbide crystals
A method and apparatus for growing silicon carbide crystals is provided. The apparatus includes a sublimation chamber with a plurality of spaced apart dividers that can direct the direction of...
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7384480 |
Apparatus for manufacturing semiconductor single crystal
This apparatus for manufacturing a semiconductor single crystal includes: a crucible; a heater; a crucible driving unit; a chamber for housing the crucible and the heater; and a hydrogen mixed gas...
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7374614 |
Method for manufacturing single crystal semiconductor
The method for manufacturing a single crystal semiconductor achieves an object to reduce the impurity concentration nonuniformity within a semiconductor wafer plane and thus to improve the wafer...
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7335256 |
Silicon single crystal, and process for producing it
A silicon single crystal which, over an ingot length of over 10 percent of the total ingot length, has a uniform defect picture and narrow radial dopant and oxygen variations. The process in...
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7326395 |
Method for producing a single crystal and silicon single crystal wafer
The present invention is a method for producing a single crystal in accordance with Czochralski method by flowing an inert gas downward in a chamber 1 of a single crystal-pulling apparatus 11 and...
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7314522 |
Apparatus and method for producing single crystal
An apparatus having a crucible (1) for holding a raw material, a heating means (11) for heating the raw material in the crucible (1) and a crystal transporting means (17) for transporting a seed...
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7314523 |
Manufacturing equipment of SiC single crystal and method for manufacturing SiC single crystal
A method for manufacturing a SiC single crystal from a SiC seed crystal is provided. The method includes the steps of: measuring a diameter of the SiC single crystal during a crystal growth of the...
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7294203 |
Heat shielding member of silicon single crystal pulling system
A heat shielding member is provided in a device pulling up a silicon single crystal rod from a silicon melt stored in a quartz crucible, and equipped with a tube portion which shields radiant heat...
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7291225 |
Heat shield and crystal growth equipment
A heat shield and a crystal growth equipment are provided, in which the length-adjustable and hybrid-angle heat shield is provided for the crystal growth equipments. The heat shield is adapted for...
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7291222 |
Systems and methods for measuring and reducing dust in granular material
The invention is directed to apparatus and methods for measuring and for reducing dust in granular polysilicon. In one aspect, a system includes a process vessel having a vacuum port for pulling...
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7282095 |
Silicon single crystal pulling method
[Problem] A silicon single crystal ingot in which point defect agglomerates do not exist over a substantially entire length thereof is manufactured without reducing a pure margin. [Solving Means] A...
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7244309 |
Apparatus for pulling single crystal by CZ method
In a Czochralski (CZ) single crystal puller equipped with a cooler and a thermal insulation member, which are to be disposed in a CZ furnace, smooth recharge and additional charge of material are...
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7232489 |
Crucible or related object holder and method of manufacture
An apparatus for holding a crucible or other item is provided. The apparatus includes a first support member having a straight portion with two ends. A second support member having a shaped portion...
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7211501 |
Method and apparatus for laser annealing
Numerous embodiments of a method and apparatus for laser annealing are disclosed. In one embodiment, a method of laser annealing includes performing one or more annealing processes on one or more...
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7201801 |
Heater for manufacturing a crystal
The present invention provides a heater for manufacturing a crystal by the Czochralski method comprising at least terminal portions supplied with current and a heat generating portion by resistance...
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7195671 |
Thermal shield
An apparatus for growing crystals includes a sealed chamber having a crucible assembly and a seed holder disposed therein. The crucible assembly is adapted to contain a melt therein and the seed...
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7077905 |
Apparatus for pulling a single crystal
An apparatus for pulling the single crystal has a radiation shield. The apparatus can improve the ratio of single crystallization, even if the radiation shield is made of graphite base material and...
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7067007 |
Process and device for growing single crystals
The process for growing single crystals, wherein crystal material is melted in a crucible and a crystal nucleus is immersed in the molten crystal material and slowly pulled out, wherein the crystal...
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7063743 |
Apparatus and method for pulling single crystal
The present invention teaches an apparatus for pulling a single crystal, whereby a radial temperature gradient of a seed crystal and/or a neck is reduced to a minimum so as to inhibit occurrence of...
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7060133 |
Single crystal pulling apparatus for a metal fluoride
A single crystal pulling apparatus for a metal fluoride comprising a crucible provided in a chamber for filling with a molten solution of a single crystal material, a melting heater provided to...
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6989059 |
Process for producing single crystal of compound semiconductor and crystal growing apparatus
In a production method for producing a compound semiconductor single crystal by LEC method using a crystal growth apparatus with a double crucible structure, it was made to grow up a crystal by...
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6942733 |
Fluid sealing system for a crystal puller
A fluid sealing system is provided for use in a crystal puller for growing a monocrystalline ingot. The crystal puller has a housing, a fluid flow path contained in the housing, and a fluid passage...
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6899760 |
Silicon single crystal growing furnace supplemented with low melting point dopant feeding instrument and the low melting point dopant feeding method thereof
A silicon single crystal growing apparatus supplemented with a low melting point dopant feeding instrument and a low melting point dopant feeding method thereof for producing a heavily doped...
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6899758 |
Method and apparatus for growing single crystal
The present invention provides a method and apparatus for growing a single crystal by the Czochralski method, wherein a single crystal is grown with forced cooling of neighborhood of a crystal...
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