Matches 1 - 50 out of 66 1 2 >


Match Document Document Title
US20140283606 ACCELERATION SENSOR  
An acceleration sensor includes a weight, a supporting portion arranged so as to face the weight, beams configured to be flexible and connect the weight and the supporting portion, and...
US20120255358 ACCELERATION SENSOR  
An acceleration sensor includes a frame, a weight portion, an arm portion for connecting the frame and the weight portion, and a sensing portion for detecting a bend of the arm portion. The...
US20150253349 ACCELERATION SENSOR  
An acceleration sensor element includes a weight portion, a base portion that has a frame shape surrounding the weight portion, a beam portion that supports the weight portion on the base portion,...
US20110119942 SENSOR AND METHOD FOR MOTION MEASUREMENT OF CO-EXISTING TILT AND HORIZONTAL ACCELERATION  
A motion-sensing device for sensing tilt and acceleration when either tilt, horizontal acceleration, or tilt and horizontal acceleration acting concurrently, influence the device, including: a...
US20150247879 ACCELERATION SENSOR  
Various acceleration sensors are disclosed. In some cases, an inertial mass may be formed during back-end-of-line (BEOL). In other cases, a membrane may have a bent, undulated or winded shape. In...
US20110219875 FORCE SENSOR WITH REDUCED NOISE  
A MEMS or NEMS device for detecting a force following a given direction, comprising a support (4) and at least one seismic mass (2) capable of moving under the effect of the force to be measured...
US20150249434 AMPLIFIER CIRCUIT AND AMPLIFIER CIRCUIT IC CHIP  
An amplifier circuit includes a converter configured to convert a predefined physical quantity to a resistance value, and the resistance value converted by the converter is converted to a voltage...
US20140000368 DYNAMIC SENSOR  
A dynamic sensor includes a weight having an H shape in a plan view. The weight includes a first weight portion and a second weight portion which have substantially rectangular parallelepiped...
US20120085170 Shock Resistant Mounting for High G Shock Accelerometer  
A high-g shock accelerometer is provided with an LCC case. A MEMs acceleration sensor is positioned in an interior of the LCC case. The MEMs acceleration sensor has exterior surfaces including top...
US20150198626 ACCELERATION SENSOR  
Embodiments of the invention provide an acceleration sensor, including a sensor part comprising a mass body part including a first mass body, a second mass body, and a connecting layer connecting...
US20090071249 ACCELERATION SENSOR-ATTACHED TIRE  
An acceleration sensor-attached tire is provided which can detect acceleration in one arbitrary direction, in two or more directions where vectors are linearly independent of each other, or in two...
US20130133426 INERTIAL SENSOR  
Disclosed herein is an inertial sensor including: a membrane; a mass body provided under the membrane; a plurality of patterned magnets provided under the mass body; and a magnetoresistive element...
US20100300205 ACCELERATION SENSOR ELEMENT AND ACCELERATION SENSOR HAVING SAME  
A covered acceleration sensor element includes a weight portion, a support frame portion surrounding the weight portion, a plurality of flexible beam portions for connecting the weight portion to...
US20140060187 ACCELERATION SENSOR  
An acceleration sensor includes an outer frame body, a heating element, a first temperature sensing element for temperature measurement and a second temperature sensing element for temperature...
US20120152020 INERTIAL SENSOR  
Disclosed herein is an inertial sensor. There is provided an inertial sensor 100, including: a plate-like substrate layer 110, a mass body 130, a post 140, a support part 150 extending in the...
US20130042687 PIEZORESISTIVE TRANSDUCER  
A piezoresistive transducer is disclosed having a framework including a support element attached to a bending element that undergoes a deformation relative to the support element when a force acts...
US20080034867 MULTI-RANGE THREE-AXIS ACCELERATION SENSOR DEVICE  
Disclosed is a multi-range three-axis acceleration sensor device in which a plurality of three-axis acceleration sensor elements are formed without axial deviation among them in a single silicon...
US20150260751 DETECTOR MODULE FOR MEMS SENSOR AND MEMS SENSOR HAVING THE SAME  
Embodiments of the invention provide a detector module for a MEMS sensor. The detector module includes a mass body, a fixed part disposed to be spaced apart from the mass body, and a flexible part...
US20070193354 Capacitive micro-machined ultrasonic transducer for element transducer apertures  
A capacitive micro-machined ultrasonic transducer (CMUT) array includes an improved elementary aperture for imaging operations. The transducer can be of a linear, curved linear, annular, matrix or...
US20150059477 ACCELERATION SENSOR  
Disclosed herein is an acceleration sensor including: a mass; a flexible beam on which an electrode or a piezoresistive element is disposed and the mass is coupled; and a support part connecting...
US20130205901 SUSPENDED MASSES IN MICRO-MECHANICAL DEVICES  
The micro-mechanical device includes a substrate with an internal cavity, a first surface, and an opposing second surface. A first trench is formed from the first surface of the substrate into the...
US20110239784 FORCE SENSOR CHIP AND ACCELERATION SENSOR CHIP  
A force sensor chip of the present invention is for detecting an external force, and comprises a base member including an action portion where the external force is applied, a support portion that...
US20090241669 Coupled pivoted acceleration sensors  
A pivoted acceleration sensor has a substrate that is substantially parallel to first and second surfaces. A reference frame is provided. A first unbalanced seismic mass is suspended within the...
US20140165725 Analysis Circuit for Field Effect Transistors Having a Displaceable Gate Structure  
An analysis circuit for a field effect transistor having a displaceable gate structure, includes a measurement circuit coupled between a supply voltage connection of the analysis circuit and a...
US20140305212 CIRCUIT FOR MEASURING ACCELERATION OF THREE-AXIS ACCELERATION SENSOR  
Disclosed herein is a circuit for measuring acceleration of a three-axis acceleration sensor. The circuit for measuring acceleration of a three-axis acceleration sensor includes: three-axis...
US20100139402 Highly sensitive piezoresistive element  
A mechanical-to-electrical sensing structure is provided with first and second movable blocks. A first hinge is coupled to the first and second movable blocks and configured to resist loads other...
US20100116057 MEMS SENSOR AND METHOD OF MANUFACTURING THE SAME  
An MEMS (Micro Electro Mechanical Systems) sensor includes a base layer and a deformation portion provided on the base layer at an interval from the base layer and deformed by external force. The...
US20110107841 PIEZORESISTIVE STRAIN SENSOR BASED NANOWIRE MECHANICAL OSCILLATOR  
An apparatus is provided and includes compressed conductive elements that each have independently adjustable dimensions sufficient to provide substantially enhanced piezoresistance to a current...
US20090282918 ACCELERATION SENSOR  
An acceleration sensor having a high impact resistance to prevent breakage under excessive acceleration, but can stably exert a sensing performance. The acceleration sensor is formed of an SOI...
US20120024065 ACCELERATION SENSOR  
An acceleration sensor having a high impact resistance to prevent breakage under excessive acceleration, but can stably exert a sensing performance. The acceleration sensor is formed of an SOI...
US20140224018 MEMS Force Sensors Fabricated Using Paper Substrates  
MEMS devices fabricated using inexpensive substrate materials such as paper or fabric, are provided. Using paper as a substrate, low cost, simple to prepare, lightweight, disposable piezoresistive...
US20140144236 ACCELERATION SENSOR  
Disclosed herein is an accelerator sensor, including: a mass body; a flexible beam that is provided with a piezoresistive element configured of an X-axis resistive element, a Y-axis resistive...
US20120073371 MICROELECTROMECHANICAL SENSOR  
In various embodiments, a microelectromechanical system may include a mass element; a substrate; a signal generator; and a fixing structure configured to fix the mass element to the substrate;...
US20150007657 INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME  
Disclosed herein is an inertial sensor including: a flexible part; a mass body connected to the flexible part; and a support part connected to the flexible part and supporting the mass body in a...
US20150241465 PIEZORESISTIVE MEMS SENSOR  
A pressure sensor includes a SOI substrate that includes a Si substrate, a SiO2 layer, and a surface Si film. An opening portion is formed in the Si substrate through etching, and a displacement...
US20090025478 Acceleration sensor  
The present invention provides an acceleration sensor that improves endurance by avoiding damage to stopper portions. When a downward vibration is applied to a weight member and the weight member...
US20150059476 ACCELERATION SENSOR  
Disclosed herein is an acceleration sensor including: a mass body part; a flexible beam having an electrode or a piezoresistor disposed thereon and having the mass body part coupled thereto; and a...
US20130061675 ACCELERATION MEASURING APPARATUS AND ACCELERATION MEASURING METHOD  
Disclosed herein are an acceleration measuring apparatus and an acceleration measuring method. The acceleration measuring apparatus includes: an acceleration sensor including a first output...
US20090071248 ACCELERATION SENSOR DEVICE  
An acceleration sensor device comprising: an acceleration sensor chip comprising a mass portion, a support frame and flexible arms having piezo-resistors on their top surfaces; and an upper...
US20090293618 Acceleration Sensor Device  
An acceleration sensor device includes an acceleration sensor chip fixed onto a substrate at its bottom, sealed with a molding resin. The acceleration sensor chip has an airtight sealed space for...
US20080271535 Semiconductor Acceleration Sensor  
An object of the present invention is to provide a semiconductor acceleration sensor capable of sensing accelerations in two directions parallel to the surface of a diaphragm and orthogonal to...
US20100101324 MEMS SENSOR  
The MEMS sensor according to the present invention includes: a substrate; a supporting portion provided on one surface of the substrate; a beam, supported by the supporting portion, having a...
US20100199783 MULTI-AXIS FORCE SENSOR AND ACCELERATION SENSOR  
There is provided a multi-axis force sensor including first and second bridge circuit groups detecting resistances of respective first and second groups of strain resistance elements provided at...
US20090241670 SEMICONDUCTOR ACCELERATION SENSOR  
A semiconductor acceleration sensor includes an acceleration sensor chip that includes a weight portion, a base portion provided around the weight portion with a gap therebetween, and beam...
US20130340527 ACCELERATION SENSOR  
An acceleration sensor with improved impact resistance includes a beam portion connected to a supporting portion at a base side and connected to a weight portion at a top side. The beam portion...
US20080216573 Semiconductor acceleration sensor  
According to the present invention, a semiconductor acceleration sensor fabricated using a semiconductor substrate comprises: an outer frame formed by the semiconductor substrate; a plurality of...
US20150107359 PIEZORESISTANCE SENSOR MODULE AND MEMS SENSOR HAVING THE SAME  
Disclosed herein is a piezoresistance sensor module including: a piezoresistor, a depletion layer formed in a region of a portion of the piezoresistor, an insulator formed to cover the depletion...
US20070144259 Semiconductor acceleration sensor and fabrication method thereof  
A semiconductor acceleration sensor chip has a fixed portion having a first thickness, a weight portion surrounding the fixed portion from a periphery, a beam portion having the first thickness...
US20100218607 ACCELERATION SENSOR  
An acceleration sensor whose characteristics including sensitivity are less likely to change relative to disturbance force applied to a sensor chip. The acceleration sensor has a support frame, a...
US20070262306 Semiconductor device having microstructure and method of manufacturing microstructure  
A semiconductor device having a microstructure and a method of manufacturing a microstructure are provided, suppressing any change of characteristics in a wafer state caused in an assembly step....

Matches 1 - 50 out of 66 1 2 >