Matches 1 - 50 out of 119 1 2 3 >


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US20100303335 Methods for Determining Inconsistency Characteristics of a Composite Structure  
Methods for determining an inconsistency characteristic of a composite structure, such as inconsistency density-per-unit area. In one implementation, a method is disclosed for determining an...
US20060147105 Alignment template goodness qualification method  
An alignment template goodness qualification method receives a pattern image and a pattern based alignment template and performs template goodness measurement using the pattern image and the...
US20050259862 Device and method for recognizing recognition marks for component placement  
In a component placement recognition mark recognizing device for recognizing recognition marks for component placement that are provided corresponding to component placement positions where...
US20070258637 Overlay Mark Arrangement for Reducing Overlay Shift  
An overlay mark arrangement for reducing the asymmetric profile and an overlay shift during an integrated circuit manufacturing process is disclosed. In one embodiment, the overlay mark...
US20100092070 HIGH ACCURACY BEAM PLACEMENT FOR LOCAL AREA NAVIGATION  
An improved method of high accuracy beam placement for local area navigation in the field of semiconductor chip manufacturing. This invention demonstrates a method where high accuracy navigation...
US20090103800 COORDINATE SYSTEM CONVERTER  
A coordinate system converter efficiently converts coordinates of one coordinate system to a different coordinate system. A base system library module provides a common platform where different...
US20060285740 Evaluation system and evaluation method  
First, an operator inputs various parameters required for a mark recognition operation including a designated position coordinate designated via a mouse and a keyboard (step 201). Then, an edge...
US20110262868 METHOD OF DETECTING ALIGNMENT MARK AND METHOD OF MANUFACTURING PRINTED CIRCUIT BOARD  
When an alignment mark does not exist within an area of an image obtained by a camera, the coordinate of the alignment mark is calculated based on an identification mark existing in the area of...
US20060045327 Optical turret and method of use  
A method and device for positioning a viewing objective and an alternate objective in relationship to a viewpoint and/or a light energy source are provided. A plurality of objective lenses are...
US20060078192 Partition pattern match and integration method for alignment  
A partition pattern template generation method for alignment receives a learning image and performs partition template generation using the learning image to generate a plurality of partition...
US20140301631 PLATELIKE WORKPIECE WITH ALIGNMENT MARK  
A platelike workpiece having an alignment mark formed on the front side thereof and adapted to be recognized by an imaging unit included in an alignment apparatus for performing alignment. The...
US20150194329 OVERLAPPING DEVICE, AND OVERLAPPING METHOD  
An overlapping device which is configured to detect the center positions of a substrate and a support which are held in a center position detecting portion, carry the substrate and the support...
US20060110042 Pattern matching method, program and semiconductor device manufacturing method  
A pattern matching method includes: detecting an edge of a pattern in a pattern image obtained by imaging the pattern; segmenting the detected pattern edge to generate a first segment set...
US20090176167 Alignment System and Alignment Marks for Use Therewith  
A lithographic apparatus according to one embodiment of the invention includes an alignment system for aligning a substrate or a reticle. The alignment system includes a radiation source...
US20100002933 OVERLAY MARK, METHOD OF CHECKING LOCAL ALIGMNENT USING THE SAME AND METHOD OF CONTROLLING OVERLAY BASED ON THE SAME  
An overlay mark is described, including N sets of parallel x-directional linear patterns respectively defined by N (≧2) exposure steps and N sets of parallel y-directional linear patterns...
US20090263006 BIOCHIP INSPECTING DEVICE AND BIOCHIP INSPECTING METHOD  
There is provided a biochip inspecting device capable of showing a manifestation state as a graphical display that can be intuitively grasped. Reading means optically reads respective sites over a...
US20080298671 Method For Increasing The Accuracy Of The Positioning Of A First Object Relative To A Second Object  
A method is provided for increasing the accuracy of the positioning of a first object relative to a second object. The method overcomes the disadvantageous influence of thermal drift between a...
US20080085033 Determining orientation through the use of retroreflective substrates  
In accordance with the invention, an orientation system includes a target object that includes a retroreflective substrate. Furthermore, the orientation system also includes an illumination source...
US20110085726 Tunable Wavelength Illumination System  
A lithographic apparatus has an alignment system including a radiation source configured to convert narrow-band radiation into continuous, flat and broad-band radiation. An acoustically tunable...
US20060133662 Method for determining pick-up positions of electronic components  
A device and appertaining method for picking up devices in a component placement device permits even very small components and even a first component of a new belt to be picked up by scanning the...
US20070116350 Method for detecting the alignment of films for automated defect detection  
Disclosed herein is a method comprising acquiring an image of a display film or a mold with a camera; transferring the image to a computer; detecting an angle of alignment and/or a position of the...
US20050259847 System and method for tracking parcels on a planar surface  
A system and method for tracking parcels on a planar surface is provided. The method comprising: acquiring an image of the parcel located on the planar surface; determining edges of the parcel;...
US20110268346 BACK-UP PIN DEVICE AND BACK-UP PIN PLACING METHOD AND DEVICE  
A plurality of indicated back-up pin devices are detachably placed on a back-up plate provided on a component mounting apparatus, to a plurality of indicated positions of the back-up plate to...
US20140210993 AUTOMATIC PROGRAMMING OF SOLDER PASTE INSPECTION SYSTEM  
A system for measuring solder paste stencil aperture positions and sizes is provided. The system includes at least one camera configured to acquire images of the stencil and an alignment target. A...
US20070248258 Pattern misalignment measurement method, program, and semiconductor device manufacturing method  
A pattern misalignment measurement method includes acquiring an inspection image of a composite pattern formed by superposing a plurality of kinds of element patterns on each other, acquiring...
US20110096981 Focus Finding And Alignment Using A Split Linear Mask  
Disclosed is a method for determining a focus parameter for aligning a wafer (W) in an exposure tool (1000) within a measurement tolerance required for the exposure tool, the exposure tool using a...
US20130148878 ALIGNMENT METHOD FOR ASSEMBLING SUBSTRATES WITHOUT FIDUCIAL MARK  
An alignment method for assembling substrates without fiducial mark is provided and has steps of: pre-defining at least two partially standard character regions; capturing at least two partially...
US20140177941 Optimal Patch Ranking for Coordinate Transform Estimation of Microscope Images from Sparse Patch Shift Estimates  
A method of determining a coordinate transform between a first image and a second image, said method comprising the steps of: determining a rate of change of pixel values for locations on the...
US20090195869 Optical microscope system for detecting nanowires using polarizer and fast fourier transform  
Provided is an optical microscope system for detecting nanowires that is designed with a rotational polarizer and Fast Fourier Transform (FFT) to allow for use of an existing optical microscope in...
US20070019859 Method for measuring registration  
A method and apparatus for measuring registration between two or more integrated circuit layers is disclosed. Images of actual operative circuitry of different layers of a semiconductor wafer,...
US20050089773 System and method for measuring overlay errors  
A system and method for detecting overlay errors, the method includes (i) directing a primary electron beam to interact with an inspected object; whereas the inspected object comprises a first...
US20100086198 PRINTED CIRCUIT BOARD, LOCATING SYSTEM AND METHOD THEREOF  
A printed circuit board includes a substantially rectangular circuit portion including operation points for connecting with electronic components, and a first margin portion adjacent to the...
US20070031027 Method and system for vertically aligning tile images of an area of interest of an integrated circuit  
A system and method for aligning tile images of an area of interest of an integrated circuit having N metal layers M, where N>1, includes a parametric representation algorithm for extracting...
US20070230771 Method of correcting bonding coordinates using reference bond pads  
A method of correcting bonding coordinates according to locations of a die and leads loaded for bonding is provided. The method includes searching for locations of die recognition areas and lead...
US20130273463 MITIGATION OF MASK DEFECTS BY PATTERN SHIFTING  
An image of a mask pattern is overlaid on an image of a mask blank annotated with the center location and dimensions of each measured mask defect. Design clips centered at the measured defects are...
US20060126915 Method and system for determining dimensions of a structure having a re-entrant profile  
Methods and systems for determining dimensions of a structure that has a re-entrant profile are disclosed. A method includes imaging at least a portion of a top surface of the structure....
US20070104358 Object recognizing method, program and storage medium for recognizing object, and object recognizing apparatus  
A coordinate (X,Y) and a rotational angle Θ of a reference point O of a recognition object are computed in each edge point E, extracted on a process target image, using pieces of information on...
US20150104095 METHOD FOR EVALUATING BANDGAP DISTRIBUTIONS OF NANOWIRES  
A method for evaluating bandgap distributions of nanowires is provided. First, a plurality of nanowires located on a surface of a substrate is provided. Second, a metal electrode on the surface...
US20110268347 METHOD AND SYSTEM FOR ACCURATE ALIGNMENT AND REGISTRATION OF ARRAY FOR DNA SEQUENCING  
In a genome sequencing system and methodology, a protocol is provided to achieve precise alignment and accurate registration of an image of a planar array of nanoballs subject to optical analysis....
US20080292177 System and Method for Providing Backside Alignment in a Lithographic Projection System  
A system and method of providing alignment of the top surface of the substrate to alignment marks on the back side of the substrate on a lithographic projection system. A back-side optical...
US20140307949 METHOD FOR CORRECTING POSITION MEASUREMENTS FOR OPTICAL ERRORS AND METHOD FOR DETERMINING MASK WRITER ERRORS  
A method is disclosed for correcting errors introduced by optical distortions or aberrations in the measured values of coordinates of targets of an array of targets, like for example structures on...
US20060239507 Method for determining the lateral offset of an XYZ stage  
A method for determining the lateral offset of an XYZ stage includes, by shifting the XYZ stage in the Z direction, acquiring a series of images. In the last image acquired in the series of...
US20070003129 Semiconductor device-inspecting apparatus and semiconductor device-inspecting method  
An inspection apparatus for inspecting a pattern on a semiconductor substrate is provided and includes: an inspection unit having an objective lens for the inspecting; a table supporting a...
US20050276464 Image analysis for pick and place machines with in situ component placement inspection  
The present invention includes a method of determining a location of a component on a workpiece. A before-placement standard image is acquired of an intended placement location on a standard...
US20090010529 Method for Automatically De-Skewing of Multiple Layer Wafer for Improved Pattern Recognition  
A method for processing wafers includes learning a first pattern at a de-skew site on a first wafer layer, saving the first patterns in a recipe for de-skewing wafers, learning a second pattern at...
US20150178909 Method for Acquiring a Boundary Line of an Alignment Film and Method for Inspecting the Alignment Film  
The present invention provides a method for acquiring a boundary line of an alignment film, including the steps of: processing an edge of an image and determining the boundary line of the...
US20070253616 MARK IMAGE PROCESSING METHOD, PROGRAM, AND DEVICE  
A mark image processing device has an imaging control unit which captures images of an alignment mark on a work a plurality of times while changing an image capturing condition such as lighting...
US20110293168 METHOD FOR MOUNTING TRANSPARENT COMPONENT  
A transparent component locally includes one or both of a plurality of thick parts that have a large thickness in the vertical direction, and a plurality of thin parts that have a small thickness...
US20050254701 Method for time synchronization of information measured by means of imaging  
The invention relates to a method for synchronizing information produced by imaging optical measuring devices (1-N) which monitor the manufacturing and/or finishing process of a fibre web, in...
US20090258305 MEMORY MEDIUM STORING ORIGINAL DATA GENERATION PROGRAM, MEMORY MEDIUM STORING ILLUMINATION CONDITION DETERMINATION PROGRAM, ORIGINAL DATA GENERATION METHOD, ILLUMINATION CONDITION DETERMINATION METHOD, AND DEVICE MANUFACTURING METHOD  
A memory medium stores a program for generating data on an original pattern used in an exposure apparatus forming an image of a target pattern on a substrate, the program comprising a...

Matches 1 - 50 out of 119 1 2 3 >