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US20090290146 |
PROBING DEVICE AND A SYSTEM FOR OBTAINING GEOMETRICAL DATA RELATED TO A CAVITY
Disclosed is a probing device for obtaining geometrical data related to a cavity, the probing device comprising at least one light source for generating electromagnetic radiation; a handheld probe...
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US20090284756 |
ACQUISITION OF TOPOGRAPHIES OF OBJECTS HAVING ARBITRARY GEOMETRIES
There is described a method for positioning an object on an optical sensor system for acquiring a surface thereof, the sensor system having a set of motors for rotating the object around a motor...
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US20090284755 |
Device for Flexible Detection of the Geometric Shape of Objects by Means of Optical 3D Measuring Technology
The invention relates to a device for detecting the geometrical shape of measurement objects ( 16 ) with a computer, a 3D sensor ( 7 ) and an object carrier ( 17 ) for fixing the measurement object...
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US20090284754 |
METHOD FOR OPTICALLY COLLECTING NUMISMATIC DATA AND ASSOCIATED ALGORITHMS FOR UNIQUE IDENTIFICATION OF COINS
A method to generate an optical signature of a coin is disclosed. A plurality of parameters are generated and recorded related to rotational positions around the circumference of a coin. The data...
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US20090273792 |
Robust three-dimensional shape acquisition method and system
A system ( 100 ) for scanning a three-dimensional object ( 150 ) comprises a device for illuminating a plane ( 110 ); an imaging sensor ( 120 ); and a transparent container ( 130 ) for immersing...
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US20090268199 |
LENS SHAPE MEASURING APPARATUS AND THE METHOD THEREOF, MANUFACTURING METHOD OF SPECTACLE LENS, AND MANUFACTURING METHOD OF SPECTACLES
A lens shape measuring apparatus measures a peripheral shape of a lens in order to measure the peripheral shape of the lens accurately according to a non-contact technique. The lens shape measuring...
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US20090262366 |
Angularly Resolved Scatterometer
An angularly resolved scatterometer uses a broadband radiation source and an acousto-optical tunable filter to select one or more narrowband components from the broadband beam emitted by the source...
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US20090262365 |
OPTICAL DEVICE FOR ANALYZING A SCATTERING MEDIUM HELD BY A SUPPORT
An optical device intended for the analysis of a scattering medium, including at least one light source distant from the scattering medium and capable of providing an incident light beam intended...
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US20090262183 |
Three-dimensional image obtaining device and processing apparatus using the same
An optical flux is radiated, which is focused at a measurement point in a specimen space, and a transmitted light amount is measured. A minute light absorption amount is measured from a transmitted...
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US20090237676 |
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method
A method is provided for determining an actual profile of an object printed on a substrate. The method can include receiving an actual spectrum signal associated with the object, selecting a first...
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US20090237646 |
Lyman-alpha Scatterometry
New and useful optical structure and method are provided, for analyzing the surface topography of a sample. Specifically, an optical system and method are provided in which radiation reflected from...
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US20090216486 |
Method for measuring three-dimension shape
A method of measuring a 3D shape, which can measure a 3D shape of target objects on a board by searching a database for bare board information when a measuring object is not set to a normal...
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US20090161118 |
Dynamic image recording system with imaging sensors and method
In a measuring system comprising an optical image recording system and a relative movement between the measured object and the image recording system, it is provided that the focal point (F) of the...
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US20090161117 |
INCLINED EXPOSURE LITHOGRAPHY SYSTEM
A method and an apparatus are disclosed for scatterfield microscopical measurement. The method integrates a scatterometer and a bright-field microscope for enabling the measurement precision to be...
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US20090161116 |
Laser measurement device and laser measurement method
To provide measurement data on a real time basis from a laser measurement device mounted on an air vehicle to a ground station. The laser measurement unit sequentially outputs laser measurement...
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US20090153878 |
LASER SCANNING MICROSCOPE APPARATUS, AND SURFACE SHAPE MEASURING METHOD THEREOF
A laser scanning microscope apparatus comprising, a controlling unit for obtaining height information at each scanning point of a sample to be examined by obtaining a relative distance that...
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US20090153877 |
Optical Measurement of Metallic Surfaces
A method for optically measuring a surface is described, in particular, for a surface having a spherical form and a high reflection of radiation. The surface is illuminated by at least one...
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US20090135433 |
OPTICAL THREE-DIMENSIONAL MEASUREMENT DEVICE AND FILTER PROCESS METHOD
This is an optical three-dimensional measurement device provided with observation illumination light for illuminating an observation specimen, an object lens for collecting the observation light on...
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US20090128811 |
FULL HEMISPHERE BI-DIRECTIONAL REFLECTANCE DISTRIBUTION FUNCTION INSTRUMENT
According to an embodiment there is provided a bi-directional reflectance distribution function (BRDF) instrument, including an enclosure having a plurality of sides. A first side has a relatively...
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US20090116037 |
METHOD AND APPARATUS FOR A SINGLE POINT SCANNER
The present subject matter include methods and apparatus for creating three dimensional digitized models of at least one ear impression, the apparatus comprising a frame, a linear axis mounted to...
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US20090116023 |
Optical Inspection Of Test Surfaces
In one aspect, the amount of data needed to store image intensity data obtained from a scatterometer ( 100 ) such as a Parousiameter is reduced by varying a resolution with which the intensity data...
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US20090109447 |
Microscope and Microscope Microexamination Procedure Method for the Measurement of the Surface Profile of an Object
The invention provides a microscope for measuring the surface profile of an object, including (1) an illumination module which directs illumination radiation with different wavelengths to different...
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US20090097037 |
Method for Measuring Volume by an Optical Surface Profilometer in a Micromechanical Device and a System for Carrying Out Said Measurement
The invention relates to a method of measuring a volume in a fluid flow micromechanical device ( 100 ) by optically measuring the profile of a surface therein, the method comprising the following...
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US20090079995 |
TILTING ADJUSTABLE SURFACE PROFILOMETER
The invention relates to a tilting adjustable surface profilometer, comprising an apparatus capable of adjusting an image acquiring angle. The apparatus includes two types of frameworks. One is a...
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US20090059240 |
INCORPORATING FILM OPTICAL PROPERTY MEASUREMENTS INTO SCATTEROMETRY METROLOGY
A method includes collecting optical data from an unpatterned region including a first process layer. At least one optical parameter of the first process layer is determined based on the optical...
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US20090057837 |
WAFER WITH EDGE NOTCHES ENCODING WAFER IDENTIFICATION DESCRIPTOR
An apparatus includes a semiconductor wafer having a surface terminating in an edge. A plurality of notches is defined along the edge. The plurality of notches encodes a wafer identification...
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US20090021751 |
Device and Method for Optical Measurement of Grains From Cereals and Like Crops
A device ( 200 ) for optical measuring of grains for analysis of the quality of said grains, comprises a feeder ( 102 ) which is arranged to feed at least one grain ( 101 b ) in a direction of...
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US20090021750 |
Method and Arrangement for a Rapid and Robust Chromatic Confocal 3D Measurement Technique
The invention relates to a chromatic confocal technique method and arrangement for the rapid three-dimensional measurement, in particular, of object shape, more particularly of a tooth in the jaw...
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US20090021749 |
HIGH THROUGHPUT ACROSS-WAFER-VARIATION MAPPING
A method for characterizing a surface of a sample object, the method including dividing the surface into pixels which are characterized by a parameter variation, and defining blocks of the surface...
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US20080316501 |
SHAPE INSPECTION METHOD AND APPARATUS
Shape inspection is carried out without preparing an inspection apparatus for each model of product. There is provided a shape inspection method comprising a first step of placing an object to be...
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US20080309948 |
PROCESS AND DEVICE FOR CONTROLLING A FILLING LEVEL OF SILOS CONTAINING LOOSE MATERIALS
The process comprises a stage of highlighting a plurality of light points of a free surface of the material contained in the silo, of detecting a position of each of the light points and obtaining...
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US20080289558 |
Lasar Scanning for Mooring Robot
A profile scanner for locating a target zone on a profile of a vessel comprising an emitter adapted to progressively or instantaneously radiate towards the vessel; a receiver providing a signal...
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US20080273211 |
Apparatus and Method for Measuring the Surface of a Body
In a light-slit method, a first and a second measurement light projection on a surface of an object to be measured may be unambiguously identified as a first or a second measurement light...
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US20080273210 |
THREE DIMENSIONAL SHAPE CORRELATOR
A three dimensional shape correlation computer software program which uses laser radar data for target identification. The correlation program obtains a scan of laser radar data of a target from a...
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US20080259354 |
Single-lens, single-aperture, single-sensor 3-D imaging device
A device and method for three-dimensional (3-D) imaging using a defocusing technique is disclosed. The device comprises a lens having a substantially oblong aperture, a sensor operable for...
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US20080259353 |
Measurement method, exposure method and device manufacturing method
An image (a latent image) of an aperture pattern that includes an L/S pattern having a linewidth (a space width A) that exceeds the measurement resolution of a measurement device is generated in...
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US20080259352 |
Apparatus for detecting press-bonded ball at bonding portion in bonding apparatus and method for detecting press-bonded ball at bonding portion
A detecting apparatus used in a bonding apparatus including a capillary and a detection camera disposed with a certain amount of offset from the capillary and capable of detecting a press-bonded...
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US20080231865 |
DETERMINATION OF SURFACE PROPERTIES
The invention relates to a method for the quantitative determination of surface properties, wherein a spatially resolved image of a surface to be analysed, which contains a large number of measured...
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US20080231864 |
Method for Measuring Center of Rotation of a Nozzle of a Pick and Place Machine Using a Collimated Laser Beam
A method of measuring and storing a center of rotation of a nozzle in a pick and place machine is provided. The method includes coupling an artifact to the nozzle. A substantially collimated laser...
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US20080231863 |
Automated process control using optical metrology with a photonic nanojet
A fabrication cluster can be controlled using optical metrology. A fabrication process is performed on a wafer using a fabrication cluster. A photonic nanojet, an optical intensity pattern induced...
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US20080231835 |
DIVERGENCE RATIO DISTANCE MAPPING CAMERA
The present invention relates to a method and system for detecting and mapping three-dimensional information pertaining to one or more target objects. More particularly, the invention consists of...
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US20080225302 |
METHOD OF INSPECTING A BODY HAVING FINE-GAP GROOVES AND METHOD OF REPAIRING THE BODY
A molding die has through holes composed of feed holes and slit grooves for producing honeycomb structure bodies. The slit groove is formed in at least a part of each through hole. In a method of...
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US20080218767 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method, substrate for use in the methods
An overlay marker for use with a scatterometer includes two overlying two-dimensional gratings. The two gratings have the same pitch but the upper grating has a lower duty ratio. Cross-talk between...
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US20080204764 |
LEAD TERMINAL INSPECTION METHOD AND LEAD TERMINAL INSPECTION APPARATUS
In one embodiment, the present invention provides a lead terminal inspection method for inspecting the shape condition of lead terminals of an electronic apparatus by irradiating irradiation light...
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US20080204763 |
Measuring Apparatus and Method For Range Inspection
The present invention relates to an imaging apparatus and method for measuring the three-dimensional characteristics of an object ( 1 ) using range data acquisition and analysis. The imaging...
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US20080195352 |
Apparatus and Method For Checking Position and/or Shape of Mechanical Pieces
An apparatus for checking mechanical pieces comprises a base ( 1 ), a locking and reference system ( 31 ), an optoelectronic measuring system ( 53 ), displacement systems ( 3, 9, 26 ) and a...
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US20080192261 |
Apparatus and Method for Examining a Curved Suface
An apparatus and a method for examining a curved surface ( 5 ), having a camera ( 2 ) and an objective ( 3 ) and a lamp ( 4 ), is described. The camera ( 2 ) can be aimed at the inside of the...
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US20080186511 |
Polishing pad surface shape measuring instrument, method of using polishing pad surface shape measuring instrument, method of measuring apex angle of cone of polishing pad, method of measuring depth of groove of polishing pad, CMP polisher, and method of manufacturing semiconductor device
The main sensor 15 measures the distance Lm to the surface of the pad 2 a , and the sub-sensor 16 measures the distance Ls to the surface of the reference block 12 . What is actually taken as...
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US20080184785 |
APPARATUS FOR AUTOMATICALLY INSPECTING ROAD SURFACE PAVEMENT CONDITION
Provided is an apparatus for automatically inspecting a road surface pavement condition, includes: a road surface photographing unit; a road surface rutting measuring unit; a flatness measuring...
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US20080170242 |
Determining one or more profile parameters of a structure using optical metrology and a correlation between profile models and key profile shape variables
One or more profile parameters of a structure fabricated on a wafer in a wafer application are determined by developing a correlation between a set of profile models and one or more key profile...
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