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US20090323052 Dynamic Illumination in Optical Inspection Systems  
An optical inspection system or tool can be configured to inspect objects using dynamic illumination where one or more characteristics of the illumination is/are adjusted to meet the inspection...
US20090323054 METHOD FOR INSPECTING DEFECT AND APPARATUS FOR INSPECTING DEFECT  
The present invention is an apparatus for inspecting foreign particles/defects, comprises an illumination optical system, a detection optical system, a shielding unit which is provided in said...
US20090323053 Optical Inspection Tools Featuring Light Shaping Diffusers  
An optical inspection system or tool can be configured to adjust the distribution of light by using one or more diffusers. The diffusers can be variable in some embodiments. For example, the...
US20090316143 VISUAL INSPECTION APPARATUS, VISUAL INSPECTION METHOD, AND PERIPHERAL EDGE INSPECTION UNIT THAT CAN BE MOUNTED ON VISUAL INSPECTION APPARATUS.  
This visual inspection apparatus has a macro-inspection section and a micro-inspection section. In the micro-inspection section, a inspection stage and a microscope are loaded into a loading plate....
US20090299681 METHODS AND SYSTEMS FOR GENERATING INFORMATION TO BE USED FOR SELECTING VALUES FOR ONE OR MORE PARAMETERS OF A DETECTION ALGORITHM  
Methods and systems for generating information to be used for selecting values for parameter(s) of a detection algorithm are provided. One method includes without user intervention performing a...
US20090296082 Circuit board detecting device and method thereof  
A circuit board detecting device and a detecting method are provided. The circuit board detecting device includes an image capture apparatus and a main unit. The image capture apparatus is coupled...
US20090298208 METHOD OF FORMING SEMICONDUCTOR THIN FILM AND INSPECTION DEVICE OF SEMICONDUCTOR THIN FILM  
A method of forming a semiconductor thin film includes: a step of forming an amorphous semiconductor thin film over a transparent substrate; a step of forming a crystalline semiconductor thin film...
US20090299655 SYSTEMS AND METHODS FOR DETERMINING TWO OR MORE CHARACTERISTICS OF A WAFER  
Systems and methods for determining two or more characteristics of a wafer are provided. The two or more characteristics include a characteristic of the wafer that is spatially localized in at...
US20090296096 Interferometric Defect Detection  
Methods and systems for using common-path interferometry are described. In some embodiments, a common-path interferometry system for the detection of defects in a sample is described. An...
US20090290783 Defect Inspection Method and Apparatus Therefor  
The invention relates to a defect inspection apparatus in which images of mutually corresponding areas in identically formed patterns on a sample are compared to detect mismatched portions of the...
US20090279081 DEFECT INSPECTION APPARATUS  
A defect inspection apparatus for inspecting a surface of a sample includes a stage for holding the sample, an illumination optical system that irradiates a laser beam to form a linear illuminated...
US20090251691 Liquid Immersion Microscope  
To provide a liquid immersion microscope device enabling nondestructive liquid immersion observation of a substrate without deteriorating quality of the substrate. To attain this, a liquid...
US20090244531 OPTICAL APPARATUS, PHOTOMASK INSPECTING APPARATUS, AND EXPOSURE APPARATUS  
An optical apparatus includes a laser light source for emitting a beam of light, an integrator for dividing the beam of light into plural beams of light, and a light focusing optical system for...
US20090244530 MASK INSPECTION APPARATUS  
A lightweight and inexpensive mask inspection apparatus having highly efficient environmental radiation resistance is provided. The mask inspection apparatus is a mask inspection apparatus for...
US20090219520 APPARATUS AND METHOD FOR INSPECTING A SURFACE OF A WAFER  
A surface inspection apparatus and method increase wafer productivity, wherein to increase an efficiency of the surface inspection apparatus to detect defects during a scanning of the wafer...
US20090219519 APPARATUS AND METHOD FOR INSPECTING CIRCUIT STRUCTURES  
An apparatus is described for scanning a circuit structure. The apparatus has a linear sensor ( 16 ), for detecting light intensity as a function of position along the sensor. A transport mechanism...
US20090213365 Device and method for checking and rotating electronic components  
The invention relates to a device for inspecting and rotating electronic components, particularly flip chips, comprising a component which is rotatably mounted at a position of rotation and which...
US20090201494 Inspection Tools Supporting Multiple Operating States for Multiple Detector Arrangements  
An inspection system can support operation in multiple states. For instance, when inspecting an article, such as a semiconductor wafer, the tool can switch between imaging multiple locations using...
US20090186427 CHARACTERIZING FILMS USING OPTICAL FILTER PSEUDO SUBSTRATE  
A system and method of characterizing a parameter of an ultra thin film, such as a gate oxide layer. A system is disclosed that includes a structure having a pseudo substrate positioned below an...
US20090185178 SURFACE INSPECTION TOOL AND SURFACE INSPECTION METHOD  
An object of the present invention is to provide a surface inspection tool in which a flat inspection range capable of measuring surface roughness of a wafer with patterns with high accuracy and in...
US20090166517 IMAGE FORMING METHOD AND IMAGE FORMING APPARATUS  
A method for forming an image of an object includes: illuminating sequentially a surface of the object arranged in the same shooting area using each of N (N is natural number equal to or more than...
US20090161098 PHOTOMASK MOUNTING/HOUSING DEVICE AND RESIST INSPECTION METHOD AND RESIST INSPECTION APPARATUS USING SAME  
A resist inspection apparatus is provided which has a configuration in which a reticle is separated from a pellicle. A reticle cassette is made up of two pieces of plate members. A hollowed portion...
US20090161097 Method for optical inspection, detection and visualization of defects on disk-shaped Objects  
A method for optical inspection, detection and visualization of defects ( 9 ) on wafers ( 2 ) is disclosed, wherein at least one camera ( 5 ) acquires images of at least one portion ( 11 ) of the...
US20090152476 Optical fiber amplifier, light source device, exposure device, object inspection device, and treatment device  
A polarization state adjusting optical element is formed by a ½ wavelength plate and a ¼ wavelength plate and its polarization direction and elliptic degree are adjusted. By adjusting the...
US20090147250 SEMICONDUCTOR WAFER SURFACE INSPECTION APPARATUS  
The present invention provides an apparatus for inspecting the surface of a semiconductor wafer having a mirror surface and a chamfered outer circumferential portion by holding the outer...
US20090135414 APPARATUS AND METHOD FOR TESTING IMAGE SENSOR WAFERS TO IDENTIFY PIXEL DEFECTS  
An image sensor testing apparatus is disclosed. The image sensor testing apparatus includes an electronic test system having a light source for illuminating an image sensor wafer to generate pixel...
US20090122306 Solder Material Inspecting Device  
Before an electronic component is mounted on a board 2 , only a cream solder 3 printed on the board 2 is irradiated with a light beam which the board 2 is scanned based on printing position...
US20090123058 MASK PATTERN DIMENSIONAL INSPECTION APPARATUS AND METHOD  
A sidewall shape correction function is determined in advance which represents the relationship of the difference between contour positions of two or more items of pattern contour position data of...
US20090103080 Surface inspecting apparatus  
A surface inspecting apparatus is provided with an illuminating means for illuminating a repeated pattern formed on the surface of an object to be inspected by linear polarization; a setting means...
US20090091752 APPARATUS AND A METHOD FOR INSPECTION OF A MASK BLANK, A METHOD FOR MANUFACTURING A REFLECTIVE EXPOSURE MASK, A METHOD FOR REFLECTIVE EXPOSURE, AND A METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUITS  
The mask blank inspection apparatus is constituted of a stage for mounting a reflective mask blank thereon, a light source for generating inspection light, a mirror serving as an illuminating...
US20090079974 METHODS AND SYSTEMS FOR LITHOGRAPHY PROCESS CONTROL  
Methods and systems for evaluating and controlling a lithography process are provided. For example, a method for reducing within wafer variation of a critical metric of a lithography process may...
US20090073430 INSPECTION APPARATUS AND INSPECTION METHOD  
An inspection apparatus includes: a first light source having a first plurality of surface emitting laser elements which emit fundamental waves, respectively; a first illumination optical system...
US20090066942 METHOD AND SYSTEM FOR EVALUATING AN OBJECT THAT HAS A REPETITIVE PATTERN  
A method and system for evaluating an object that has a repetitive pattern. Illumination optics of an optical unit are adapted to scan a spot of radiation over a repetitive pattern that includes...
US20090059217 SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM, PROGRAM, AND RECORDING MEDIUM  
A wafer measurement/inspection instrument receives information on at least one of a processing result and an operating state of at least one of a coater/developer that performs film forming/resist...
US20090046281 Method and System for Automated Inspection System Characterization and Monitoring  
A method and system characterizing and monitoring an automated inspection system are provided. A method for automatically characterizing an automatic inspection system for photomasks may include...
US20090040512 Semiconductor wafer inspection device and method  
The surface of an epitaxial wafer is inspected using an optical scattering method. The intensities of light scattered with a narrow scattering angle and light scattered with, a wide scattering...
US20090040513 PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD  
A pattern inspection apparatus includes a light source configured to emit a pulsed light, a stage on which an inspection target workpiece is placed, a sensor, including a plurality of light...
US20090033925 VISUAL INSPECTION APPARATUS FOR FLEXIBLE PRINTED CIRCUIT BOARDS  
An exemplary visual inspection apparatus for a flexible printed circuit board includes a frame, an inspection station, a control system, a roller system and a power system. The inspection station...
US20090027664 Defect inspection apparatus and its method  
In a defect inspection apparatus for performing an inspection with an optical system, the dimension of a defect is measured substantially concurrently with detection of the defect. In order to...
US20090009755 METHOD FOR DETECTING POSITION OF DEFECT ON SEMICONDUCTOR WAFER  
A method of this invention involves: detecting a shape of an outer periphery of a semiconductor wafer with a first detecting device; determining a center position of the semiconductor wafer based...
US20080309892 IN-LINE PARTICLE DETECTION FOR IMMERSION LITHOGRAPHY  
An immersion lithography system, comprising a lens unit configured to project a pattern from an end thereof and onto a wafer, a hood unit configured to confine an immersion fluid to a region of the...
US20080304055 SURFACE DEFECT INSPECTION METHOD AND APPARATUS  
A surface defect inspection apparatus is structured to add detection signals of multi-directionally detected scattered lights to detect a tiny defect and to individually process the respective...
US20080304056 METHODS FOR DETECTING AND CLASSIFYING DEFECTS ON A RETICLE  
Methods for detecting and classifying defects on a reticle are provided. One method includes acquiring images of the reticle at first and second conditions during inspection of the reticle. The...
US20080304058 Coordinate measuring machine and method for structured illumination of substrates  
A coordinate measuring machine ( 1 ) for the structured illumination of substrates is disclosed. The incident light illumination means ( 14 ) and/or the transmitted light illumination means ( 6 )...
US20080297783 DEFECT INSPECTION SYSTEM AND METHOD OF THE SAME  
In an inspection subject substrate, there is a problem that a defect signal is overlooked due to scattered light from a pattern and sensitivity decreases in an irregular circuit pattern part. The...
US20080273196 Confocal wafer inspection system and method  
A semiconductor wafer inspection system and method is provided which uses a multiple element arrangement, such as an offset fly lens array. The preferred embodiment uses a laser to transmit light...
US20080259327 Device for Inspecting a Microscopic Component  
A device 1 is disclosed for inspecting, measuring defined structures, simulating structures and structural defects, repair of and to structures, and post-inspecting defined object sites on a...
US20080259326 Die Column Registration  
A method for inspecting a plurality of dies, that are typically disposed on a surface of a semiconducting wafer. Each of the dies includes respective functional features within the die. The method...
US20080239302 Inspecting apparatus for glass substrate  
An inspecting apparatus for a glass substrate detects blurs of a green color filter layer, a blue color filter layer, a column spacer layer, a pixel layer of a thin film transistor, or the like,...
US20080231845 HIGH RESOLUTION WAFER INSPECTION SYSTEM  
A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to...
Matches 1 - 50 out of 72 1 2 >