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US20100297550 Compositions comprising sulfonamide material and processes for photolithography  
New photoresist compositions are provided that are useful for immersion lithography. Preferred photoresist compositions of the invention comprise one or more materials that have sulfonamide...
US20130182231 SUBSTRATE PLACEMENT IN IMMERSION LITHOGRAPHY  
A method for determining an offset between a center of a substrate and a center of a depression in a chuck includes providing a test substrate to the depression, the test substrate having a...
US20080225257 Optical integrator system, illumination optical apparatus, exposure apparatus, and device manufacturing method  
An optical integrator system comprises a first optical integrator including a plurality of first wavefront dividing elements arranged in juxtaposition along a predetermined direction, and a second...
US20120170014 Photolithography system using a solid state light source  
A photolithography system based on a solid-state light source having LEDs is provided. Solid-state photolithography using the solid state light source can achieve high quality patterns over a wide...
US20140175171 SYSTEM AND A METHOD FOR NANO IMPRINTING  
A method for creating a highly accurate nanostructure is provided, the method includes: (i) creating a highly accurate nanostructure prototype, wherein the highly accurate nanostructure prototype,...
US20050088633 Composite optical lithography method for patterning lines of unequal width  
A composite patterning technique may include two lithography processes. A first lithography process may use interference lithography to form an interference pattern of lines of substantially equal...
US20110276125 Medical Devices, Methods of Producing Medical Devices, and Projection Photolithography Apparatus for Producing Medical Devices  
Stents and other medical devices that can have specific geometric configurations (curves, contours, tapers) and/or patterns (e.g., grooves) thereon, methods of making such medical devices, and...
US20110157576 FLUID GAUGE WITH MULTIPLE REFERENCE GAPS  
A fluid gauge (222) for measuring the position of a work piece (200) includes a gauge body (236), a fluid source assembly (238), and a gauge control system (240). The gauge body (236) includes a...
US20060290911 Scanning photolithography apparatus and method  
A reticle having a reticle pattern is mounted with a scanning photolithography apparatus. The reticle pattern adapted to form a circuit pattern on a photoresist layer formed on a substrate. An...
US20090201479 LASER LIGHT SOURCE CONTROL METHOD, LASER LIGHT SOURCE DEVICE, AND EXPOSURE APPARATUS  
An exposure apparatus includes a laser light source that emits a laser beam as an exposure beam by pulse oscillation; a detection system that detects a rotation angle of an external shape of the...
US20090213350 COHERENCE-REDUCTION DEVICES AND METHODS FOR PULSED LASERS  
Devices and methods are disclosed for reducing coherence, and thus speckle, of a coherent beam of light. An exemplary illumination device includes a source emitting a pulsed coherent light beam...
US20090176167 Alignment System and Alignment Marks for Use Therewith  
A lithographic apparatus according to one embodiment of the invention includes an alignment system for aligning a substrate or a reticle. The alignment system includes a radiation source configured...
US20130016328 DISPERSING IMMERSION LIQUID FOR HIGH RESOLUTION IMAGING AND LITHOGRAPHY  
Methods and apparatus are described for delivering index-matching immersion liquid in high numerical-aperture optical microscopy and lithography. An array of immersion liquid droplets is delivered...
US20070279609 Device for Changing Pitch Between Light Beam Axes, and Substrate Exposure Apparatus  
A parallel glass which is a prism having a parallelogram-shaped cross section in an x-y direction, and parallel glasses which are prisms having a parallelogram-shaped cross section in the x-y...
US20060215138 Laser beam pattern generator with a two-axis scan mirror  
An optical pattern generator for use in grayscale photolithography is provided with an optical source to generate a light beam, an optical modulator optically coupled to the optical source to...
US20070031743 Alignment and alignment marks  
A lithographic substrate provided with an alignment mark, the alignment mark having a plurality of features spaced apart from one another, each feature being spaced apart from adjacent features by...
US20080204695 EUV Lithography System and Chuck for Releasing Reticle in a Vacuum Isolated Environment  
A method for providing a vacuum isolated environment in a lithography system is disclosed. The method for dechucking a reticle includes providing a mask chamber having one or more vacuum valves for...
US20090147237 Spatial Phase Feature Location  
Methods for locating an alignment mark on a substrate are described. Generally, the substrate includes one or more locator marks adjacent to a substrate alignment mark. Locator marks provide the...
US20080218715 IMMERSION EXPOSURE METHOD OF AND IMMERSION EXPOSURE APPARATUS FOR MAKING EXPOSURE IN A STATE WHERE THE SPACE BETWEEN THE PROJECTION LENS AND SUBSTRATE TO BE PROCESSED IS FILLED WITH A LIQUID  
An immersion exposure method is disclosed which, while causing a relative movement of an immersion area formed so as to intervene between a substrate to be exposed on an exposure stage and a...
US20120092632 DIFFRACTION UNLIMITED PHOTOLITHOGRAPHY  
Methods, devices, systems, and materials are disclosed for diffraction unlimited photofabrication. A method is provided where a photoresponsive material is illuminated with a first optical pattern...
US20090201478 TRANSMITTING OPTICAL ELEMENT AND OBJECTIVE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS  
A transmitting optical element (33, 37) adapted for use in an objective for a microlithographic projection exposure apparatus is composed of a polycrystalline material (100), with the...
US20070231730 Radiation Curable Toner Composition  
The invention relates to dry toner particles comprising at least a radiation curable resin and a colouring agent, the radiation curable resin comprises a blend of a) an (meth)acrylated...
US20090117489 Compositons and processes for immersion lithography  
New photoresist compositions are provided that are useful for immersion lithography. Preferred photoresist compositions of the invention comprises two or more distinct materials that can be...
US20090040484 EXPOSURE EQUIPMENT, EXPOSURE METHOD, AND MANUFACTURING METHOD FOR A SEMICONDUCTOR DEVICE  
Provided is an exposure equipment having high resolution even when a reticle is inclined. The exposure equipment includes: an optical system for projecting on a wafer (130), a pattern formed on a...
US20090225287 RETICLE POD AND METHOD FOR KEEPING RETICLE CLEAN AND DRY  
A reticle pod and a method for keeping a reticle clean and dry are provided, wherein the reticle pod holds a reticle and has a pellicle side provided with a pellicle. The reticle pod includes: a...
US20100315614 SOURCE-MASK OPTIMIZATION IN LITHOGRAPHIC APPARATUS  
A method for configuring an illumination source of a lithographic apparatus, the method including dividing the illumination source into pixel groups, each pixel group including one or more...
US20050275814 Maskless vortex phase shift optical direct write lithography  
The present invention provides methods and apparatus for accomplishing a optical direct write phase shift lithography. A lithography system and method are provided wherein a mirror array is...
US20120099088 HIGH HEAT LOAD OPTICS WITH A LIQUID METAL INTERFACE FOR USE IN AN EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM  
Methods and apparatus for cooling mirrors in an extreme ultraviolet (EUV) lithography system using a liquid metal interface are described. According to one aspect of the present invention, an...
US20110099526 Pattern Selection for Full-Chip Source and Mask Optimization  
The present invention relates to lithographic apparatuses and processes, and more particularly to tools for optimizing illumination sources and masks for use in lithographic apparatuses and...
US20140176921 OPTICAL ASSEMBLY WITH SUPPRESSION OF DEGRADATION  
An optical assembly including: a beam generating system generating radiation (6) at an operating wavelength, an optical element (13, 14) arranged in a residual gas atmosphere (16) and subjected to...
US20060046211 Effectively water-free immersion lithography  
A method and system is disclosed for conducting immersion photolithography. The system includes at least one lens for transmitting a predetermined radiation on a predetermined substrate with a...
US20080137049 Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle  
A thick pellicle is allowed to have a non-flat shape and its shape is characterized to calculate corrections to be applied in exposures to compensate for the optical effects of the pellicle. The...
US20070285632 EUVL reticle stage and reticle protection system and method  
Apparatuses for and methods of maximizing particle protection while enabling temporary concurrent illumination of a reticle with exposure radiation through an aperture and auto focus beams or while...
US20120162622 FIELD EXTENSION TO REDUCE NON-YIELDING EXPOSURES OF WAFER  
Techniques are provided for efficient lithography processing and wafer layout. In particular, the techniques can be used to reduce the number of sacrificial exposures along the wafer perimeter...
US20100091261 OPERATING VALVE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD  
An operating valve of the present invention is a differential pressure operating valve 100 for performing a vacuum suction of a substrate, the operating valve comprises a body 4 having an opening...
US20120307215 Flow Through MEMS Package  
A flow through Micro-Electromechanical Systems (MEMS) package and methods of operating a MEMS packaged using the same are provided. Generally, the package includes a cavity in which the MEMS is...
US20070267804 SHEET FEEDING DEVICE AND IMAGE FORMING APPARATUS  
A sheet feeding device includes: an arm member that is provided with a drive shaft at a base end thereof, the arm member being configured to swingably rotate around the drive shaft; a feed roller...
US20110261336 SYSTEM FOR PATTERNING FLEXIBLE FOILS  
According to one aspect, the invention provides a table for compensating deformation in flexible foils (1) The table comprises a supportive base (2) and a deformation compensation system (3). This...
US20090268186 PATTERN EXPOSURE METHOD AND PATTERN EXPOSURE APPARATUS  
A belt-like work (11) provided with a photosensitive layer is conveyed in a work conveying direction F at a work conveying speed V. An illuminating section (30) illuminates a photomask (29) in an...
US20080241760 PEB EMBEDDED EXPOSURE APPARATUS  
The present disclosure provides a lithography apparatus. The apparatus includes an exposure module designed for exposure processing; a baking module embedded in the exposure module and designed for...
US20080111981 Radiation Beam Pulse Trimming  
A system is used to perform fast and slow applications, for example fast application can be pulse trimming. The system includes a radiation source, an electro-optical modulator, and a beam...
US20110235009 SUB-RESOLUTION ASSIST DEVICES AND METHODS  
Photolithographic apparatus, systems, and methods that make use of sub-resolution assist devices are disclosed. In the various embodiments, an imaging mask includes an optically transmissive...
US20110242514 1.5D SLM FOR LITHOGRAPHY  
This invention relates to an improved micro lithographic writer that sweeps a modulated pattern across the surface of a workpiece. The SLM disclosed works in a diffractive mode with a continuous or...
US20090079952 SIX-MIRROR EUV PROJECTION SYSTEM WITH LOW INCIDENCE ANGLES  
The invention relates to a projection system for guiding light with wavelengths ≦193 nm from an object plane to an image plane, comprising at least a first mirror (M1), a second mirror (M2), a t...
US20060216615 Wavefront engineering with off-focus mask features  
An imaging part such as a mask or reticle includes a patterned layer in an on-axis plane of the imaging part. The imaging part further includes another layer including sub-resolution features,...
US20070091292 System, medium, and method controlling operation according to instructional movement  
A system, medium, and method for controlling an operation according to movement. A movement model can be generated based on at least one movement and stored corresponding to a predetermined...
US20120008121 ACTUATOR INCLUDING MAGNET FOR A PROJECTION EXPOSURE SYSTEM AND PROJECTION EXPOSURE SYSTEM INCLUDING A MAGNET  
The present disclosure relates to an actuator for projection exposure systems that include a magnet. The magnet is encapsulated and/or supported in a magnet holding plate that is produced by...
US20080304033 PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS  
Another approach to decrease the resolution is to introduce an immersion liquid having high refractive index into the gap that remains between a final lens element on the image side of the...
US20140176930 MICROLITHOGRAPHIC ILLUMINATION SYSTEM  
A microlithographic illumination system can include a light distribution device that can generate a two-dimensional intensity distribution in a first illumination plane. A first raster array of...
US20120194795 OPTICAL ELEMENT  
An optical element has at least one additional element fitted thereon which dissipates the vibrational energy of the optical element by friction.