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US20090279057 Independent upper side and lower side drive type double-sided simultaneous exposure system  
A maskless type exposure system using an exposure engine on which a digital micromirror device (DMD) is mounted includes an independent upper and lower side drive type double-sided simultaneous...
US20120183889 MULTIPLE LITHOGRAPHIC SYSTEM MASK SHAPE SLEEVING  
A mask fabrication method can include receiving a mask design, sending first exposure parameters to a first exposure machine, sending second exposure parameters to a second exposure machine,...
US20120099092 DETECTION OF CONTAMINATION IN EUV SYSTEMS  
A sensor for sensing contamination in an application system is disclosed. In one aspect, the sensor comprises a capping layer. The sensor is adapted to cause a first reflectivity change upon...
US20110188023 LITHOGRAPHIC IMAGING AND PRINTING WITHOUT DEFECTS OF ELECTROSTATIC ORIGIN  
Embodiments of the present invention involve three-layer printing members having a central layer that is non-conductive yet abalatable at commercially realistic fluence levels. In various...
US20080285002 PROJECTION OBJECTIVE FOR SEMICONDUCTOR LITHOGRAPHY  
Objectives, such as projection objectives for semiconductor lithography, are disclosed. An objective generally has an optical axis and optical elements mounted in an objective housing. Projection...
US20130107239 OPTICAL ARRANGEMENT FOR EUV LITHOGRAPHY AND METHOD FOR CONFIGURING SUCH AN OPTICAL ARRANGEMENT  
An optical arrangement, e.g. projection lens, for EUV lithography, provided with: a first optical element (22) having a reflective surface (31a) and a first substrate (32) composed of TiO2-doped...
US20120120379 SYSTEM AND METHOD FOR CONTROLLING THE DISTORTION OF A RETICLE  
An apparatus for controlling the distortion of a reticle (28) includes a temperature adjuster (258) and a control system (226). The temperature adjuster (258) includes a plurality of adjuster...
US20110081617 INTEGRATED LITHOGRAPHY EQUIPMENT AND LITHOGRAPHY PROCESS THEREOF  
An integrated lithography equipment is disclosed. The equipment includes an input/output area for loading at least one wafer, a coating a developing area for performing coating and developing...
US20120127444 Reflection Mask For EUV Lithography, System For EUV Lithography, And Method Of Fixing The Reflection Mask For EUV Lithography  
Example embodiments of the inventive concepts relate to a reflection mask including an upper surface configured to reflect extreme ultraviolet EUV light, a lower surface opposite the upper surface,...
US20080212044 Debris Mitigation System with Improved Gas Distribution  
The present invention relates to a debris mitigation system, in particular for use in a radiation unit for EUV radiation and/or X-rays. The debris mitigation system comprises a foil trap (11)...
US20140268087 Lithography and Mask for Resolution Enhancement  
A lithography process in a lithography system includes loading a mask having multiple mask states and having a mask pattern consisting of a plurality of polygons and a field. Different mask states...
US20140232997 INDEX MATCHED GRATING INSCRIPTION  
The disclosed embodiments provide systems and methods for mitigating lensing and scattering as an optical fiber is being inscribed with a grating. The disclosed systems and methods mitigate the...
US20100066990 IMAGING DEVICE WITH EXCHANGEABLE DIAPHRAGMS AND METHOD THEREFOR  
The disclosure concerns a method for exchangeable introduction and/or exchange of diaphragms in an imaging device, such as an EUV projection exposure system for microlithography or a corresponding...
US20090244512 LITHOGRAPHY PROCESS WINDOW ANALYZING METHOD AND ANALYZING PROGRAM  
A lithography process window analyzing method for setting a process window based on ranges of exposure amounts and focus positions, and giving evaluation of reliability of the set process window,...
US20090147333 HOLOGRAM MEDIUM MANUFACTURING METHOD, MASTER HOLOGRAM MEDIUM MANUFACTURING METHOD, RECORDING MEDIUM, AND HOLOGRAM MEDIUM MANUFACTURING APPARATUS  
A hologram medium manufacturing method is disclosed. The hologram medium manufacturing method includes: disposing a first pair of master hologram media with a predetermined interval so that the...
US20120196230 LAYOUT DECOMPOSITION METHOD AND APPARATUS FOR MULTIPLE PATTERNING LITHOGRAPHY  
An initial layout of at least a portion of a given layer of an integrated circuit design is decomposed into multiple sub-layouts by splitting each of a plurality of shapes of the initial layout...
US20090180088 Illumination Sources for Lithography Systems  
Illumination sources, lithography systems, and methods of processing and fabricating semiconductor devices are disclosed. In a preferred embodiment, an illumination source includes a first aperture...
US20130293862 POLARIZATION-MODULATING OPTICAL ELEMENT  
A microlithography optical system includes a projection objective and an illumination system that includes a temperature compensated polarization-modulating optical element. The temperature...
US20060104413 Mask repeater and mask manufacturing method  
A mask repeater for transferring the pattern of a master mask onto a real mask by exposure and transferring the pattern on the real mask onto a substrate such as a semiconductor wafer. The size of...
US20150009483 MASK CLAMPING APPARATUS AND METHOD OF MANUFACTURING MASK  
A manufacturing method of a mask includes aligning a mask sheet including an effective area and a non-effective area, on a mask frame; applying a pressure to the non-effective area of the mask...
US20070248898 TARGETS FOR ALIGNMENT OF SEMICONDUCTOR MASKS  
Alignment of mask layers in semiconductor manufacturing is carried out by using alignment lines having at least one row of diffractively reflecting or scattering features on the lines. The features...
US20140176922 Debris Removal in High Aspect Structures  
A system for removing debris from a surface of a photolithographic mask is provided. The system includes an atomic force microscope with a tip supported by a cantilever. The tip includes a surface...
US20110228242 Method and apparatus for performing alignment using reference board  
An alignment method for the of patterning a work piece in a direct write machine, wherein a reference board provided with board reference features is used to coordinate calibration of a measurement...
US20110122392 MICROLITHOGRAPHY ILLUMINATION SYSTEM AND MICROLITHOGRAPHY ILLUMINATION OPTICAL UNIT  
An illumination optical unit for microlithography illuminates an object field with illumination light. The unit includes a first facet mirror that has a plurality of first facets, and a second...
US20120019796 ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY  
An illumination system for microlithography serves to illuminate an illumination field with illumination light of a primary light source. A first raster arrangement has bundle-forming first raster...
US20110116067 Illumination Optimization  
A method of optimizing an illumination pupil shape for a lithographic process 1 comprises identifying a target pattern (206) to be imaged by said lithographic process. It further comprises...
US20140168626 LITHOGRAPHY SYSTEM AND LITHOGRAPHY METHOD  
A lithography system may include a wafer stage. The wafer stage may include a wafer mounting part configured to carry a wafer and configured to oscillate along a plane that is parallel to a top...
US20080151207 Magneto-optical photoresist  
A method for a magneto-optical photoresist. The method includes applying a magneto-optical photoresist to a surface, and patterning the magneto-optical photoresist by using a magnetic alignment....
US20090059195 EXPOSURE DEVICE WITH MECHANISM FOR FORMING ALIGNMENT MARKS AND EXPOSURE PROCESS CONDUCTED BY THE SAME  
The present invention relates to an exposure device for transferring circuit patterns of a mask to a roll-film-shaped object. The exposure device includes a supply reel rotation section that is...
US20090303454 EXPOSURE APPARATUS WITH A SCANNING ILLUMINATION BEAM  
An exposure apparatus (10) for transferring a mask pattern (358) from a mask (12) to a substrate (14) includes a mask retainer (44), a substrate stage assembly (24), and an illumination system...
US20080106719 Compensating Masks, Multi-Optical Systems Using the Masks, and Methods of Compensating for 3-D Mask Effect Using the Same  
Provided are a compensating mask, a multi-optical system using the compensating mask, and a method of compensating for a 3-dimensional (3-D) mask effect using the compensating mask. Methods of...
US20100315617 WAFER STAGE  
A wafer stage and a method of supporting a wafer for inspection. the wafer stage comprises a platform for supporting a wafer such that a backside of the wafer is suspended above a cavity of the...
US20120307224 SPECTRAL PURITY FILTER  
A spectral purity filter includes a body of material, through which a plurality of apertures extend. The apertures are arranged to suppress radiation having a first wavelength and to allow at least...
US20140322648 COMPOSITIONS AND PROCESSES FOR IMMERSION LITHOGRAPHY  
New photoresist compositions are provided that are useful for immersion lithography. Preferred photoresist compositions of the invention comprise one or more materials that can be substantially...
US20110255069 COMPOSITIONS AND PROCESSES FOR IMMERSION LITHOGRAPHY  
New photoresist compositions are provided that are useful for immersion lithography. Preferred photoresist compositions of the invention comprise one or more materials that can be substantially...
US20130065160 REMOVABLE TRANSPARENT MEMBRANE FOR A PELLICLE  
According to one embodiment, a pellicle includes first and second frame members that are selectively removable from one another. The second frame member has an annular shape similar to and is...
US20100039634 EXPOSURE APPARATUS FOR DISPLAY AND EXPOSING METHOD USING THE SAME  
Provided is an exposure apparatus, including a plurality of exposure lamps and a luminance changing mechanism disposed between the exposure lamps and an exposure target. The luminance changing...
US20140176923 Wynn-Dyson imaging system with reduced thermal distortion  
A Wynn-Dyson imaging system with reduced thermal distortion is disclosed, wherein the reticle and wafer prisms are made of glass material having a coefficient of thermal expansion of no greater...
US20140268074 Lithography System with an Embedded Cleaning Module  
The present disclosure provides a lithography system. The lithography system includes an exposing module configured to perform a lithography exposing process using a mask secured on a mask stage;...
US20090128789 Projection exposure device, and exposure process performed by the device  
The present invention relates to provide a projection exposure device having a small volume, thereby not occupying a large installation space. The projection exposure device is configured to...
US20080137044 Systems and methods for thermally-induced aberration correction in immersion lithography  
Immersion lithography aberration control systems and methods that compensate for a heating effect of exposure energy in an immersion fluid across an exposure zone are provided. An aberration...
US20080204688 Methodology For Implementing Enhanced Optical Lithography For Hole Patterning In Semiconductor Fabrication  
System and method for enhancing optical lithography methodology for hole patterning in semiconductor fabrication are described. In one embodiment, a photolithography system comprises an...
US20130162963 Lithographic Apparatus With a Deformation Sensor  
Disclosed is a lithographic apparatus comprising a member susceptible to deformation and a deformation sensor for measuring a deformation of said member. The deformation sensor comprises a first...
US20150055114 LAYERED RADIATION-SENSITIVE MATERIALS WITH VARYING SENSITIVITY  
A method for fabricating a radiation-cured structure is provided. The method includes the steps of providing a first radiation-sensitive material and applying a second radiation-sensitive material...
US20090284721 RETICLE SYSTEM FOR MANUFACTURING INTEGRATED CIRCUIT SYSTEMS  
A reticle system that includes: providing a reticle system; and assigning two or more of an image pattern onto the reticle system to form one or more layers of an integrated circuit system by...
US20050195376 System for purifying purge gases  
A system for purifying purge gases for an optical system, in particular for a projection objective for microlithography for the fabrication of semiconductor components, wherein the optical system...
US20090091729 Lithography Systems and Methods of Manufacturing Using Thereof  
Lithography systems and methods of manufacturing semiconductor devices are disclosed. For example, a lithography system includes at least two reticle stages and a common projection lens system...
US20110255063 Seamless Stitching of Patterns Formed by Interference Lithography  
This invention addresses the scalability problem of periodic “nanostructured” surface treatments such as those formed by interference lithography. A novel but simple method is described that ach...
US20060055911 High resolution printer and a method for high resolution printing  
The invention provides a method and printer for printing an image that comprises at least one group of highly dense shapes, the method includes: (i) determining multiple intermediate schemes such...
US20070035715 Exposure apparatus for manufacturing semiconductors and method for inspecting pellicles  
Example embodiments of the present invention relate to an apparatus for manufacturing semiconductors and a method of inspecting a pellicle. Other example embodiments of the present invention relate...