Matches 1 - 6 out of 6
Match Document Document Title
US20090295400 Electrostatic partricle sensor  
An electrostatic particle sensor for sensing particles in exhaust gases includes: a lateral surface electrode having an effective flow volume, a gas flow to be tested flowing through it; an inner...
US20090230973 PLANAR TYPE FREQUENCY SHIFT PROBE FOR MEASURING PLASMA ELECTRON DENSITIES AND METHOD AND APPARATUS FOR MEASURING PLASMA ELECTRON DENSITIES  
A planar type frequency shift probe that utilizes resonance of electromagnetic waves and includes a main body with a conductor plate and a coaxial cable. The main body includes a long narrow space,...
US20090058424 Plasma monitoring method and plasma monitoring system  
A plasma monitoring method using a sensor, the sensor having a substrate; a first electrode, the first electrode being a conductive electrode and formed on the substrate while being isolated from...
US20080265903 Plasma Diagnostic Apparatus And Method  
Provided is a plasma diagnostic apparatus includes a probe unit, which is inserted into a plasma or disposed at boundary of a plasma, the apparatus includes: a signal supplying unit having a signal...
US20080061793 Detection and Suppression of Electrical Arcing  
Method and apparatus for detecting or suppressing electrical arcing or other abnormal change in the electrical impedance of a load connected to a power source. Preferably the load is a plasma...
US20080048663 Apparatus for and method of measuring composition and pressure of the discharged gas from ion gauge using residual gas analyzer  
Disclosed herein are an apparatus for and method of measuring the composition and the pressure of the discharged gas from an ion gauge by using a residual gas analyzer. In this regard, there are...
Matches 1 - 6 out of 6