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US20120235959 SEAL ANCHOR STRUCTURES  
This disclosure provides systems, methods and apparatus for forming raised anchor structures in a seal area. In one aspect, the anchor structures include a receiving space. Sealant can flow into...
US20120120508 ROTATIONAL COMB DRIVE Z-STAGE  
A device may have an outer frame, a platform, and a plurality of actuators configured to move the platform with respect to the outer frame. Each of the actuators may have a movable frame and a...
US20140300249 MEMS DEVICE ANCHORING  
Embodiments of the present invention generally relate to a MEMS device that is anchored using the layer that is deposited to form the cavity sealing layer and/or with the layer that is deposited...
US20150070793 MINIATURE MEMS ACTUATOR ASSEMBLIES  
In one embodiment, an electrostatic actuator includes a generally planar fixed frame, a generally planar moving frame coupled to the fixed frame by a flexure for substantially coplanar,...
US20130279030 MINIATURE MEMS ACTUATOR ASSEMBLIES  
In one embodiment, an electrostatic actuator includes a generally planar fixed frame, a generally planar moving frame coupled to the fixed frame by a flexure for substantially coplanar,...
US20120206248 FLEXURE ASSEMBLIES AND FIXTURES FOR HAPTIC FEEDBACK  
The present invention provides methods and devices directed to the use of flexure assemblies to assist components driven by actuators, including but not limited to electroactive polymer...
US20110227545 VIBRATION POWER GENERATOR, VIBRATION POWER GENERATING DEVICE AND COMMUNICATION DEVICE HAVING VIBRATION POWER GENERATING DEVICE MOUNTED THEREON  
Electricity generated by a vibration power generator 200 can be extracted efficiently by providing the vibration power generator 200, a rectifier circuit bridge 205, an output controlling circuit...
US20120119612 MOTION CONTROLLED ACTUATOR  
A device can have an outer frame and an actuator. The actuator can have a movable frame and a fixed frame. At least one torsional flexure and at least one hinge flexure can cooperate to provide...
US20120256517 Method for Microfabrication of a Capacitive Micromachined Ultrasonic Transducer Comprising a Diamond Membrane and a Transducer Thereof  
This invention relates generally to capacitive micromachined ultrasonic transducers (CMUTs), particularly to those comprising diamond or diamond like carbon membranes and a method of...
US20110050033 Micromachined ultrasonic transducer having compliant post structure  
A compression post capacitive micromachined ultrasonic transducer (CMUT) is provided. The compression post CMUT includes a first electrode, a top conductive layer having a pattern of post holes, a...
US20120262026 MEMS DEVICE WITH CENTRAL ANCHOR FOR STRESS ISOLATION  
A MEMS device (20) includes a proof mass (32) coupled to and surrounding an immovable structure (30). The immovable structure (30) includes fixed fingers (36, 38) extending outwardly from a body...
US20110193447 Stable Electro-Mechanical Actuators  
An electro-mechanical actuator includes a comb drive and a deformable connector. The comb drive has a first capacitor plate and a second capacitor plate. The capacitor plates have teeth capable of...
US20130278108 MEMS SHOCK CUSHION SPRING SYSTEMS AND METHODS  
Techniques are disclosed for systems and methods to provide shock impact mitigation for MEMS structures. A MEMS structure may include one or more actuators. An actuator may include a first frame...
US20130016859 MEMS MICROPHONE OVERTRAVEL STOP STRUCTURE  
A MEMS microphone. The MEMS microphone includes a membrane, a spring, and a first layer having a backplate, and a first OTS structure. The spring has a first end coupled to the membrane, and a...
US20090290865 ZINC OXIDE NANO-WIRE BASED ACTUATOR, LENS MODULE USING SAME AND CAMERA MODULE USING SAME  
An exemplary zinc oxide nano-wire based actuator includes a first electrode, a second electrode opposite to the first electrode, and a zinc oxide nano-wire layer sandwiched between the first...
US20140091674 STRESS RELIEVED MICROFABRICATED CANTILEVER  
A micromechanical device has a functional layer. One or more layers are provided between the functional layer and the micromechanical device to provide stress relief.
US20130140943 LINEAR DUAL EAP GENERATOR  
Systems are described for obtaining energy from water movements in shallow waters. Some systems use panels (4) that are pivotally mounted (13) near the sea floor in shallow water and that extend...
US20120139389 MICROELECTRONIC DEVICES FOR HARVESTING KINETIC ENERGY AND ASSOCIATED SYSTEMS AND METHODS  
Microelectronic devices for harvesting kinetic energy and associated systems and methods. Particular embodiments include an energy harvesting device for generating electrical energy for use by...
US20120206011 NOISE AND VIBRATION MITIGATION SYSTEM FOR NUCLEAR REACTORS EMPLOYING AN ACOUSTIC SIDE BRANCH RESONATOR  
A method of designing/making an acoustic side branch resonator structured to be coupled to a standpipe of, for example, a nuclear power plant, wherein the acoustic side branch resonator includes a...
US20120007469 METHOD AND DEVICE FOR VIBRATION HARVESTING VIA GASFLOW  
A method and device for gasflow, e.g. airflow, energy harvesting is disclosed. In one aspect, the device includes a cavity resonator such as a Helmholtz resonator which has a membrane for...
US20130214638 SYSTEM FOR GENERATING ELECTRICAL ENERGY THROUGH THE INPUT OF ENERGY TO ALIGNMENT BUCKYPAPER  
The electrical energy generating system of the present invention comprises a piece of alignment Buckypaper, an energy generator, a thin deposition and two contacts. The alignment Buckypaper is a...
US20110102871 Micro electro mechanical system using comb and parallel plate actuation  
The present invention combines electrostatic comb with parallel plate actuation in a novel design to create a robust low voltage MEMS Micromirror. Other unique advantages of the invention include...
US20130335011 MICROELECTRONIC DEVICES FOR HARVESTING KINETIC ENERGY AND/OR DETECTING MOTION, AND ASSOCIATED SYSTEMS AND METHODS  
Microelectronic devices for harvesting kinetic energy and/or detecting motion, and associated systems and methods. Particular embodiments include an energy harvesting device for generating...
US20140203682 ELECTROMECHANICAL TRANSDUCER AND PRODUCTION METHOD THEREFOR  
An electromechanical transducer includes a plurality cells that are electrically connected to form a unit. Each of the cells includes a first electrode and a second electrode provided with a gap...
US20110254405 ELECTROMECHANICAL TRANSDUCER AND PRODUCTION METHOD THEREFOR  
An electromechanical transducer includes a plurality cells that are electrically connected to form a unit. Each of the cells includes a first electrode and a second electrode provided with a gap...
US20110234041 OSCILLATORY WAVE MOTOR  
An oscillatory wave motor includes an oscillator having an oscillation body and an electro-mechanical energy-converting element, and a flexible heat-conducting member configured to dissipate heat...
US20080157626 Novel layout design for micro scratch drive actuator  
To improve the yield, lifetime and driving voltage of the micro scratch drive actuator (SDA), this invention proposes a novel layout design including the etch holes and flange structure designs....
US20110241477 Hall Effect Power Generator  
One or more superconductive cells are connected in series to provide voltage arising from the Hall effect when cooled to superconductor temperatures and immersed in a magnetic field. The magnetic...
US20130134828 ELECTROSTATIC INDUCTION POWER GENERATOR  
An electrostatic induction power generator includes a first base body and a second base body, which are configured to be able to reciprocate relative to each other and between which an annular...
US20140035434 MEMS Device Comprising An Under Bump Metallization  
The present invention concerns a MEMS device comprising an under bump metallization (4)—UBM—to contact the device via flip-chip bonding with a substrate. The UBM (4) is placed on the surface of...
US20110095648 NONLINEAR OSCILLATOR FOR VIBRATION ENERGY HARVESTING  
An oscillator apparatus and method for vibration energy harvesting includes a nonlinear oscillator (e.g. piezoelectric, magnetic or liquid oscillator) configured in association with a potential...
US20120119611 ELECTRICAL ROUTING  
An electronic device may have a MEMS device formed of a first conductive material. A trench may be formed in the MEMS device. A layer of non-conductive material may be formed in the trench. A...
US20150084480 DEVICE FOR CONVERTING HEAT ENERGY INTO MECHANICAL ENERGY WITH IMPROVED EFFICIENCY  
The invention relates to a device for converting heat energy into mechanical energy comprising a first (4) and a second (6) bistable area passing from a first stable state to a second stable state...
US20130229087 Vibration Driven Power Generation Element and Method of Manufacture Thereof  
A vibration driven power generation element according to the present invention includes: a three dimensionally shaped movable comb tooth electrode comprising a plurality of comb teeth of which...
US20140292137 Actuation device with a drive element actuated by crawling  
The subject matter here is an actuation device (1) comprising an actuation element (3) including a fixed portion (31) and a driving portion (32); wherein the fixed portion (31) includes a crawling...
US20140312733 MEMS VIBRATOR, ELECTRONIC APPARATUS, AND MOVING OBJECT  
A MEMS vibrator includes: a vibrating portion; an electrode portion provided to face the vibrating portion with a gap therebetween; and a support portion extended in a first direction from the...
US20150137659 VIBRATION POWER GENERATOR  
Power generated by a vibration power generator utilizing an electret is efficiently supplied to a power supply load. A vibration power generator includes a first substrate and a second substrate...
US20100295414 COUPLED MEMS STRUCTURE FOR MOTION AMPLIFICATION  
A microelectromechanical structure (MEMS) device includes a secondary MEMS element displaceably coupled to a substrate. A primary MEMS element is displaceably coupled to the secondary MEMS element...
US20150061464 ENERGY HARVESTER USING MASS AND MOBILE DEVICE INCLUDING THE ENERGY HARVESTER  
Provided are an energy harvester using a mass, and a mobile device including the energy harvester. The energy harvester includes: a mass; first and second substrates spaced apart from each other,...
US20120313480 MEMS DEVICES MADE WITH ISOTOPIC MATERIALS  
A MEMS or NEMS device with at least one component made of a non-naturally occurring isotope material. The refined isotopic material provides advantages to device operation such as reduced...
US20150102866 VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOVING OBJECT  
A MEMS vibrator includes: a substrate; a base portion which is disposed on the substrate; and a plurality of vibration portions which extend in directions different from each other from the base...
US20110198966 CAPACITIVE ELECTROMECHANICAL TRANSDUCER  
A capacitive electromechanical transducer has at least one cell. The cell includes a first electrode, a movable vibrating portion including a second electrode disposed opposite the first electrode...
US20130233077 ELECTROSTATIC FORCE GENERATOR AND FORCE MEASUREMENT SYSTEM AND ACCELEROMETER HAVING THE SAME  
An electrostatic force generator is disclosed. The electrostatic force generator includes an RF AC voltage source, a capacitive module, a resonant capacitive-inductive bridge (CIB) module, a...
US20110248600 RESONATOR ELEMENT AND RESONATOR  
A resonator element includes: at least one resonating arm which performs flexural vibration; a base portion connected to an end of the resonating arm; and a tapered portion which is axisymmetrical...
US20110192233 VERSATILE HIGH ASPECT RATIO ACTUATABLE NANOSTRUCTURED MATERIALS THROUGH REPLICATION  
A method of forming a nanostructured surface, the method comprising including providing an original nanostructured surface having an array of high aspect ratio structures formed on a planar...
US20100264777 LONG RANGE TRAVEL MEMS ACTUATOR  
An electrostatic comb drive actuator for a MEMS device includes a flexure spring assembly and first and second comb drive assemblies, each coupled to the flexure spring assembly on opposing sides...
US20150222203 ELECTROSTATIC ENERGY-HARVESTING DEVICE HAVING 3-DIMENSIONAL CONE SHAPE  
An electrostatic energy-harvesting device is provided. The electrostatic energy-harvesting device with a 3-dimensional cone shape includes a first structure including a first substrate having a...
US20120279302 MEMS RESONATOR, SENSOR HAVING THE SAME AND MANUFACUTRING METHOD FOR MEMS RESONATOR  
A microelectromechanical system (MEMS) resonator, a sensor having the same and a method for manufacturing the MEMS resonator are provided. The MEMS resonator includes a base substrate of the MEMS...
US20070262675 Adjustable cooling machinery for optical disc manufacturing  
Adjustable cooling machinery for optical disc manufacturing is described. According to one exemplary embodiment, the adjustable cooling machine can be easily configured to allow two different...
US20110309717 TWO-DIMENSIONAL COMB-DRIVE ACTUATOR AND MANUFACTURING METHOD THEREOF  
A two-dimensional comb-drive actuator and manufacturing method thereof are described. The two-dimensional comb-drive actuator includes a supporting base, a frame and a movable body. The supporting...