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US20080295308 |
Method of forming an array of piezoelectric actuators on a membrane
A method of forming an array of piezoelectric actuators on a membrane (18) which includes the steps of preparing a piezoelectric comb-like structure having an array of islands that are integrally...
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US20100115671 |
INERTIAL POSITIONER AND AN OPTICAL INSTRUMENT FOR PRECISE POSITIONING
We disclose a precision positioner based on an inertial actuator, an optical instrument for accurate positional readout and control, and an electrostatically clamped assembly for holding any...
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US20100301700 |
ACOUSTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME
Provided are an acoustic wave device and a method for manufacturing the same, the acoustic wave device being effectively prevented from expanding and contracting due to temperature change and...
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US20100084948 |
CRYSTAL OSCILLATOR PIECE AND METHOD FOR MANUFACTURING THE SAME
An object of the present invention is to provide a crystal oscillator piece in which the generation of leakage vibration is suppressed, and a method for manufacturing such a crystal oscillator...
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US20120126664 |
VIBRATOR ELEMENT, SENSOR UNIT, ELECTRONIC APPARATUS, MANUFACTURING METHOD OF VIBRATOR ELEMENT, AND MANUFACTURING METHOD OF SENSOR UNIT
A vibration gyro device has a base part and a pair of drive vibrating arms and a pair of detection vibrating arms respectively extended from both ends in a Y-axis direction of the base part....
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US20120079692 |
ARRAY OF BAW RESONATORS WITH MASK CONTROLLED RESONANT FREQUENCIES
Methods that create an array of BAW resonators by patterning a mass load layer to control the resonant frequency of the resonators and resonators formed thereby, are disclosed. Patterning the...
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US20120066876 |
CREATING AN IMPROVED PIEZOELECTRIC LAYER FOR TRANSDUCERS
A method for forming a transducer, the method includes the steps of providing a substrate; providing a dielectric on the substrate; providing a first piezoelectric layer of the dielectric;...
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US20080246367 |
TUNED LAMINATED PIEZOELECTRIC ELEMENTS AND METHODS OF TUNING SAME
A piezoelectric element comprises a piezoelectric ceramic wafer bonded to a substrate, with a surface profile of the substrate being non-uniformly configured to affect the spring rate of the...
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US20110215580 |
SYSTEM FOR CONVERTING OCEAN WAVE ENERGY TO ELECTRIC POWER
One embodiment of the present invention consists of a system of small, interconnected cubes, each containing interior walls made from a highly sensitive multi-layer piezoelectric material and each...
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US20110062825 |
PIEZOELECTRIC VIBRATING DEVICES AND METHODS FOR MANUFACTURING SAME
An exemplary piezoelectric device includes a piezoelectric vibrating piece, on which excitation electrodes are formed, and a piezoelectric frame having a frame portion surrounding the piezoelectric...
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US20110002057 |
VIBRATION ACTUATOR, LENS BARREL, CAMERA, MANUFACTURING METHOD FOR VIBRATION BODY AND MANUFACTURING METHOD FOR VIBRATION ACTUATOR
To provide a vibration actuator, a lens barrel, a camera, a manufacturing method for a vibration body and a manufacturing method for a vibration actuator, which have a high driving efficiency and...
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US20100271735 |
Wireless Microactuator Motor Assembly for Use in a Hard Disk Drive Suspension, and Mechanical and Electrical Connections Thereto
A microactuator assembly for a hard disk drive head suspension has an expandable base of stainless steel sheet material defining a negative lead affixed to the negative electrode on the bottom...
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US20100237751 |
PIEZOELECTRIC ACTUATOR
A piezoelectric actuator comprises a co-fired stack of piezoelectric elements formed from a piezoelectric material and a plurality of positive internal electrodes interdigitated with a plurality of...
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US20120091858 |
PARYLENE-C AS A PIEZOELECTRIC MATERIAL AND METHOD TO MAKE IT
A parylene C polymer that is electrically poled such that it is piezoelectric is presented. Methods for manufacturing the piezoelectric parylene C polymer with an optimal piezoelectric coefficient...
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US20100107387 |
Bulk acoustic wave resonator, filter and duplexer and methods of making same
A resonator having a membrane formed of a piezoelectric layer sandwiched between first and second electrode is suspended above a cavity formed from the back surface of the support structure. In one...
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US20100293770 |
METHOD FOR MANUFACTURING ACOUSTIC WAVE DEVICE
Provided is a method for manufacturing an acoustic wave device that has an excellent temperature coefficient of frequency (TCF) and high accuracy of IDT pattern forming and is capable of resisting...
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US20110278993 |
METHOD FOR MANUFACTURING COMPOSITE PIEZOELECTRIC SUBSTRATE AND PIEZOELECTRIC DEVICE
A piezoelectric device is manufactured in which the material of a supporting substrate can be selected from various alternative materials. Ions are implanted into a piezoelectric substrate to form...
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US20110102516 |
Printhead unit
Piezoelectric unit, comprising a fluid chamber, a fluid outlet, an actuator, comprising a thin film piezoceramic element and a membrane, acting as a wall of the fluid chamber, and a support element...
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US20110239423 |
MANUFACTURING METHOD OF PIEZOELECTRIC ACTUATOR
After the piezoelectric element forming process, in the etching process, etching is performed on a portion of at least the vibrating plate between the lead-out electrodes formed afterwards in the...
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US20110064341 |
DISK DRIVE DEVICE CAPABLE OF BEING IMPROVED IN ANTI-VIBRATION CHARACTERISTIC
A disk drive device includes: a hub on which a recording disk is to be mounted; a shaft; a sleeve configured to house the shaft and to be rotatable relatively with respect to the shaft; a radial...
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US20100213794 |
Piezoelectric Resonator Device and Method for Manufacturing the Same
With a crystal vibrator, a package (housing) is produced by joining a base to a lid, and an internal space is formed within this package. A crystal resonator plate is held on the base in this...
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US20090039736 |
ULTRASONIC ACTUATOR AND METHOD FOR MANUFACTURING PIEZOELECTRIC DEFORMATION PORTION USED IN THE SAME
Provided are an ultrasonic actuator and a method for manufacturing an piezoelectric deformation portion in which wiring a drive circuit can be easily processed, and in which productivity can be...
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US20080150397 |
Structures and methods for crystal packaging
A crystal oscillator is mounted in a flexible harness rather than at discrete points. The crystal oscillator and associated control circuitry may be formed on a common substrate, decreasing...
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US20110041304 |
PIEZOELECTRIC DEVICE, LIQUID DROPLET EJECTING HEAD USING THE SAME, AND PROCESS FOR PRODUCING THE SAME
The piezoelectric device includes a piezoelectric film that expands or contracts according to variations in voltage applied, a first electrode provided on a first side of the film, and a second...
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US20100207489 |
MEMS Ultrasonic Device Having a PZT and CMUT
A MEMS ultrasonic device has an array of PZT transducer elements and a cMUT structure bonded to the array of PZT transducer elements. The MEMS ultrasonic device can be adapted for ultrasonic...
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US20110121916 |
HYBRID BULK ACOUSTIC WAVE RESONATOR
A hybrid bulk acoustic wave (BAW) resonator comprises a first electrode, a second electrode, a piezoelectric layer disposed between the first and second electrodes, and a single mirror pair...
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US20110006644 |
Piezoelectric Multilayer Component
A piezoelectric multilayer component includes a stack of piezoceramic layers, which are arranged one on top of the other, and electrode layers. The stack has a first area and a second area. The...
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US20100192340 |
Method of manufacturing quartz-crystal resonator
To provide a method of manufacturing a quartz-crystal resonator, in which without adding new processes, a desired quartz-crystal piece can be obtained from a quartz-crystal wafer by etching and...
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US20110308324 |
A SENSOR AND METHOD FOR FABRICATING THE SAME
A sensor and method for fabricating a sensor is disclosed that in one embodiment bonds an etched semiconductor substrate wafer to an etched device wafer comprising a silicon on insulator wafer to...
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US20100045145 |
Piezoelectric component and manufacturing method thereof
An object of the present invention is to; miniaturize, increase the capacity, and reduce the price of piezoelectric components. The present invention relates to a piezoelectric component and a...
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US20110227671 |
TEMPERATURE COMPENSATED THIN FILM ACOUSTIC WAVE RESONATOR
The present invention in one aspect relates to an acoustic wave resonator having an acoustic reflector, a piezoelectric layer, a composite structure having a first electrode, a temperature...
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US20100072861 |
VIBRATING ELEMENT, FABRICATION METHOD THEREOF, AND ULTRASONIC MOTOR HAVING THE SAME
A vibrating element of an ultrasonic motor includes a vibrating member, and a piezoelectric body to produce a traveling wave thus to vibrate the vibrating member when electric power is applied to...
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US20080225089 |
PIEZOELECTRIC ACTUATOR, LIQUID EJECTION HEAD, IMAGE FORMING APPARATUS, AND METHOD OF MANUFACTURING PIEZOELECTRIC ACTUATOR
The piezoelectric actuator has: a diaphragm made of silicon; an insulating layer formed on a front surface of the diaphragm; a plurality of individual electrodes formed on a surface of the...
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US20090146527 |
PIEZOELECTRIC MICROSPEAKER USING MICROELECTROMECHANICAL SYSTEMS AND METHOD OF MANUFACTURING THE SAME
A piezoelectric microspeaker using microelectromechanical systems (MEMS) and a method of manufacturing the same are provided. The piezoelectric microspeaker includes a piezoelectric layer disposed...
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US20100208008 |
DROPLET DISCHARGING HEAD, MANUFACTURING METHOD THEREOF, AND DROPLET DISCHARGING DEVICE
A droplet discharging head, includes: a discharging chamber; a plurality of nozzle orifices discharging droplets and each of the plurality of nozzle orifices is communicated with the discharging...
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US20080143450 |
PIEZOELECTRIC OSCILLATOR AND METHOD FOR MANUFACTURING THE SAME, AND MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME
A piezoelectric oscillator includes: a base substrate; a frame-like supporting section formed from a portion of the base substrate; and a plurality of oscillator sections, wherein each of the...
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US20100072306 |
Multilayer Piezoelectric Element, Injection Device and Fuel Injection System Using The Same, and Method of Manufacturing Multilayer Piezoelectric Element
A multilayer piezoelectric element is provided which has excellent durability even if it is continuously driven for a long period of time under high temperature and high humidity. The multilayer...
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US20100109475 |
SURFACE ACOUSTIC WAVE ELEMENT, SURFACE ACOUSTIC WAVE DEVICE AND METHODS FOR MANUFACTURING THE SAME
A surface acoustic wave (“SAW”) element includes a substrate which is formed of a piezoelectric material, a plurality of first electrodes which are disposed on the substrate and separated from eac...
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US20110223652 |
PIEZOELECTRIC-BASED NANOPORE DEVICE FOR THE ACTIVE CONTROL OF THE MOTION OF POLYMERS THROUGH THE SAME
Apparatus, system, and methods are provided for utilizing piezoelectric material for controlling a polymer through a nanopore. A reservoir is formed filled with conductive fluid. A membrane is...
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US20110050045 |
PACKAGE, METHOD FOR MANUFACTURING THE SAME, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND RADIO-CONTROLLED TIMEPIECE
Providing a package and a method for manufacturing the package capable of achieving improvement in the degree of vacuum in the cavity, and to provide a piezoelectric vibrator, an oscillator, an...
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US20090289529 |
PIEZOELECTRIC SENSOR AND METHOD FOR MANUFACTURING THE SAME
An inexpensive piezoelectric sensor where noise unlikely occurs and a method for manufacturing the same are provided. A piezoelectric body (2) made of polymeric material, a first...
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US20080230859 |
SAW DEVICES, PROCESSES FOR MAKING THEM, AND METHODS OF USE
The design, fabrication, post-processing and characterization of a novel SAW (Surface Acoustic Wave) based bio/chemical sensor in CMOS technology is introduced. The sensors are designed in AMI 1.5...
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US20100194245 |
PIEZOELECTRIC THIN FILM AND METHOD OF MANUFACTURING THE SAME, ANGULAR VELOCITY SENSOR, METHOD OF MEASURING ANGULAR VELOCITY BY THE ANGULAR VELOCITY SENSOR, PIEZOELECTRIC GENERATING ELEMENT, AND METHOD OF GENERATING ELECTRIC POWER USING THE PIEZOELECTRIC GENERATING ELEMENT
Provided are a piezoelectric thin film including a lead-free ferroelectric material and exhibiting high piezoelectric performance comparable to that of PZT, and a method of manufacturing the...
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US20100117493 |
PIEZOELECTRIC DEVICE AND ITS MANUFACTURING METHOD
Upper adhesion layer 35 formed between piezoelectricity layer 32 and upper electrode layer 34 so as to abut on piezoelectricity layer 32 and upper electrode layer 34 is included. Upper adhesion...
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US20090026892 |
MICRO-CANTILEVER
A micro-cantilever of a simple structure and capable of obtaining a larger displacement at a low voltage including a plate-like piezoelectric substrate having electrode films as an upper electrode...
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US20120079691 |
METHOD OF MANUFACTURING PACKAGES, PIEZOELECTRIC VIBRATORS OSCILLATOR, ELECTRONIC APPARATUS, AND RADIO CLOCK
The present invention provides a novel method of producing piezoelectric vibrators in which a plurality of substrates are formed at once from a wafer, and the wafer is formed with a plurality of...
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US20100097723 |
THIN-FILM PIEZOELECTRIC DEVICE, PRODUCTION METHOD THEREOF, HEAD GIMBALS ASSEMBLY USING THE THIN-FILM PIEZOELECTRIC DEVICE, AND HARD DISK DRIVE USING THE HEAD GIMBALS ASSEMBLY
A method includes a step of stacking a first electrode layer, a piezoelectric layer, and a second electrode layer on a first substrate to form a first laminate; a step of stacking a support layer...
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US20120079690 |
METHOD OF PIEZOELECTRIC VIBRATING PIECE, WAFER, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND RADIO-CONTROLLED TIMEPIECE
The present invention provides a novel method of producing piezoelectric vibration pieces in which a plurality of piezoelectric vibration pieces are formed at once from a wafer, using a plurality...
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US20110140793 |
PIEZOELECTRIC VIBRATOR MANUFACTURING METHOD, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND RADIO-CONTROLLED TIMEPIECE
Provided is a method for manufacturing a high-quality piezoelectric vibrator in which reliable air-tightness of the inside of the cavity is maintained, and stable conduction between the...
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US20100162545 |
METHODS FOR MANUFACTURING CRYSTAL OSCILLATOR DEVICES
Crystal devices are disclosed, of which an exemplary device includes a crystal frame comprising a crystal vibrating piece having an electrode pattern and an outer frame supporting the crystal...
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