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US20090291528 |
Semiconductor Package Having Through-Hole Vias on Saw Streets Formed with Partial Saw
A method of forming through-hole vias in a semiconductor wafer involves forming a semiconductor wafer having a plurality of die. A trench is formed between the semiconductor die. The trench...
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US20090291527 |
Semiconductor Package Having Through-Hole Vias on Saw Streets Formed with Partial Saw
A method of forming through-hole vias in a semiconductor wafer involves forming a semiconductor wafer having a plurality of die with contact pads disposed on a surface of each die. The...
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US20090286396 |
METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE HAVING A STEPPED THROUGH-HOLE
A DRAM device includes a contact plug in contact with a diffused region of a semiconductor substrate, and a via-plug in contact with top of the contact plug. The through-hole receiving the via-plug...
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US20090286395 |
Butted Source Contact and Well Strap
A butted contact structure forming a source contact electrically connecting a voltage node and a well region and method for forming the same, the butted contact structure including an active region...
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US20090283909 |
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
There is provided a semiconductor device having a metal silicide layer which can suppress the malfunction and the increase in power consumption of the device. The semiconductor device has a...
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US20090283143 |
POINT CONTACT SOLAR CELL
A semiconductor component comprises a semiconductor substrate comprising a front surface, a back surface which is opposite thereto, and a surface normal which is perpendicular to the front and back...
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US20090278261 |
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
An interlayer insulating film is formed on the upper surface of a semiconductor substrate, and lower-level interconnects are formed in the interlayer insulating film. A liner insulating film is...
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US20090278178 |
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
Disclosed is a semiconductor device which includes a MIS FET on a surface of a substrate, an insulating film on the substrate to cover the MIS FET, an opening that gets to an impurity diffusing...
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US20090275195 |
Interconnect Structure Having a Silicide/Germanide Cap Layer
An interconnect structure of an integrated circuit and a method for forming the same are provided. The interconnect structure includes a semiconductor substrate, a low-k dielectric layer over the...
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US20090275180 |
METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
A conventional power MOSFET structure is difficult to improve a breakdown voltage of an element even using a super-junction structure. A power MOSFET according to an embodiment of the invention is...
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US20090275176 |
SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
A semiconductor device and method of fabricating the same, which forms a contact hole, a via hole or a via contact hole with multiple profiles with various taper angles. The semiconductor device...
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US20090267181 |
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
A semiconductor device with a fuse 3 a to be cut for a circuit modification, of which passivation film coating the uppermost wiring layer is formed in a two-layer structure including a first...
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US20090263964 |
INTERCONNECTIONS FOR INTEGRATED CIRCUITS
An interconnect connection structure having first and second interconnects and multiple connection elements that electrically connect the first interconnect to the second interconnect is described....
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US20090263951 |
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
A method for fabricating a semiconductor device includes the steps of forming an insulating film on a semiconductor substrate, forming a plurality of wiring trenches in the insulating film, forming...
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US20090250819 |
METAL LINE OF SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME
The invention relates to a metal line of a semiconductor device and a method of forming the same. According to a method of forming a metal line of a semiconductor device in accordance with an...
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US20090246951 |
METHOD FOR PATTERNING A METALLIZATION LAYER BY REDUCING RESIST STRIP INDUCED DAMAGE OF THE DIELECTRIC MATERIAL
By forming a hardmask layer in combination with one or more cap layers, undue exposure of a sensitive dielectric material to resist stripping etch ambients may be reduced and integrity of the...
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US20090233438 |
SELF-IONIZED AND INDUCTIVELY-COUPLED PLASMA FOR SPUTTERING AND RESPUTTERING
A magnetron sputter reactor for sputtering deposition materials such as tantalum, tantalum nitride and copper, for example, and its method of use, in which self-ionized plasma (SIP) sputtering and...
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US20090231899 |
PHASE CHANGE RANDOM ACCESS MEMORY AND LAYOUT METHOD OF THE SAME
A phase change random access memory (PRAM) includes a cell array divided into an active region and a dummy active region. A bitline is formed across the active region and the dummy active region...
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US20090230557 |
Semiconductor Device and Method for Making Same
One or more embodiments are related to a semiconductor device, comprising: a metallic layer having a top surface and a sidewall surface; an intermediate layer disposed on a sidewall surface of the...
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US20090186431 |
LIGHT-EMITTING DEVICE AND ITS MANUFACTURING METHOD
In a light-emitting device and its manufacturing method, mounting by batch process with surface-mount technology, high light extraction efficiency, and low manufacturing cost are realized. The...
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US20090184400 |
VIA GOUGING METHODS AND RELATED SEMICONDUCTOR STRUCTURE
Methods for via gouging and a related semiconductor structure are disclosed. In one embodiment, the method includes forming a via opening in a dielectric material, the via opening aligned with a...
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US20090176348 |
REMOVABLE LAYER MANUFACTURING METHOD
A method ( 200 ) is described for an electronic assembly ( 30 ). An electronic die ( 24 ) with a sacrificial layer ( 28 ) on its back ( 27 ) and electrical contacts ( 26 ) on its front ( 25 ) is...
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US20090170314 |
METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
A method for manufacturing a semiconductor device includes the steps of: (a) forming a low dielectric constant film over a semiconductor substrate; (b) forming a recess in the low dielectric...
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US20090163029 |
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
A method of manufacturing a semiconductor device has forming a first nitride layer over a substrate, forming a first oxide layer on the first nitride layer, forming a second nitride layer on the...
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US20090160064 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE DEVICE
A semiconductor device and a method for manufacturing the device that minimizes a line width while maximizing integration density of the semiconductor device. The method includes forming an...
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US20090159883 |
TEST PATTERN FOR SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE TEST PATTERN
A test pattern for a semiconductor device and a method for forming the test pattern that can determine the degree of over etching of contact holes and obviate the need to perform a physical...
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US20090146309 |
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
A semiconductor device has a first insulating film formed over a semiconductor substrate, a first opening formed in the first insulating film, a first manganese oxide film formed along an inner...
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US20090141533 |
METAL GATE COMPATIBLE ELECTRICAL ANTIFUSE
A metal layer and a semiconductor layer are sequentially deposited on a substrate. The semiconductor layer and the metal layer are lithographically patterned to form a stack of a semiconductor...
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US20090140437 |
SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF
A semiconductor device including an intermediate insulating film formed over a plurality of first conductors over a semiconductor substrate. Contact holes are formed in the intermediate insulating...
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US20090093120 |
HOLE PATTERN FORMING METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
A hole pattern forming method that forms a fine hole pattern in a work target layer that is formed on a semiconductor substrate, includes: forming a three-layer structure by laminating a carbon...
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US20090075474 |
METHODS FOR FORMING DUAL DAMASCENE WIRING USING POROGEN CONTAINING SACRIFICIAL VIA FILLER MATERIAL
Methods for fabricating dual damascene interconnect structures are provided in which a sacrificial material containing porogen (a pore forming agent) is used for filling via holes in an interlayer...
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US20090068833 |
METHOD OF FORMING CONTACT HOLE OF SEMICONDUCTOR DEVICE
The present invention relates to a method of forming a contact hole of a semiconductor device. According to the method of forming a contact hole of a semiconductor device, a semiconductor substrate...
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US20090035940 |
COPPER METALLIZATION OF THROUGH SILICON VIA
A method for metallizing a through silicon via feature in a semiconductor integrated circuit device substrate comprising immersing the semiconductor integrated circuit device substrate into an...
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US20090032964 |
System and method for providing semiconductor device features using a protective layer
Present embodiments relate to systems and methods for providing semiconductor device features using a protective layer during coating operations. One embodiment includes a method comprising...
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US20090032963 |
SEMICONDUCTOR STRUCTURES INCLUDING TIGHT PITCH CONTACTS AND METHODS TO FORM SAME
Methods of fabricating semiconductor structures incorporating tight pitch contacts aligned with active area features and of simultaneously fabricating self-aligned tight pitch contacts and...
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US20080318413 |
METHOD FOR MAKING AN INTERCONNECT STRUCTURE AND INTERCONNECT COMPONENT RECOVERY PROCESS
A method is provided for making an interconnect structure. The method includes applying a removable layer to an electronic device or to a base insulative layer; applying an adhesive layer to the...
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US20080315353 |
EMPTY VIAS FOR ELECTROMIGRATION DURING ELECTRONIC-FUSE RE-PROGRAMMING
The disclosure relates generally to integrated circuit (IC) chip fabrication, and more particularly, to an e-fuse device including an opening, a first via and a second via in an interlayer...
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US20080305627 |
METHOD OF FORMING A CONTACT PLUG AND METHOD OF FORMING A SEMICONDUCTOR DEVICE
A method of forming a contact plug includes the following processes. A dummy film is formed over a substrate. The dummy film may include amorphous carbon as a main material. At least one contact...
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US20080303097 |
Power FET With Low On-Resistance Using Merged Metal Layers
In one embodiment, relatively thin but wide metal bus strips overlying a high power FET are formed to conduct current to the source and drain narrow metal strips. A passivation layer is formed over...
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US20080299718 |
DAMASCENE PROCESS HAVING RETAINED CAPPING LAYER THROUGH METALLIZATION FOR PROTECTING LOW-K DIELECTRICS
A method of forming single or dual damascene interconnect structures using either a via-first or trench first approach includes the steps of providing a substrate surface having an etch-stop layer...
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US20080284027 |
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
A method of manufacturing a semiconductor device has forming, in a dielectric film, a first opening and a second opening located in the first opening, forming a first metal film containing a first...
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US20080272476 |
Through-Hole Via On Saw Streets
A semiconductor device is manufactured by, first, providing a wafer designated with a saw street guide. The wafer is taped with a dicing tape. The wafer is singulated along the saw street guide...
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US20080237858 |
ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE SAME
An electronic device includes a conductive pattern formed on a first insulating film, a second insulating film formed on the conductive pattern and the first insulating film, a hole formed in the...
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US20080233743 |
Method and Structure for Self-Aligned Device Contacts
Disclosed are embodiments of a semiconductor structure with a partially selfaligned contact in lower portion of the contact is enlarged to reduce resistance without impacting device yield....
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US20080233737 |
METHOD OF FABRICATING INTERGRATED CIRCUIT CHIP
A method of manufacturing an integrated circuit (IC) chip is provided. The method includes the following steps. First, a substrate is provided. The substrate is divided into an internal region and...
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US20080206984 |
CONDUCTIVE VIA FORMATION UTILIZING ELECTROPLATING
A method for forming a conductive via is discussed and includes forming a seed layer over a first side of a semiconductor substrate, wherein the semiconductor substrate includes a first side...
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US20080206929 |
PRINTING DEVICE, PRODUCTION UNIT, AND PRODUCTION METHOD OF ELECTRONIC PARTS
A printing device, a production unit and a production method of electronic parts suitable for production of precise electronic parts are provided. A squeegee is attached to a rotating machine, and...
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US20080185730 |
MEMORY CELL DEVICE WITH COPLANAR ELECTRODE SURFACE AND METHOD
A memory device described herein includes a bit line having a top surface and a plurality of vias. The device includes a plurality of first electrodes each having top surfaces coplanar with the top...
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US20080179755 |
STRUCTURE AND METHOD FOR CREATING RELIABLE DEEP VIA CONNECTIONS IN A SILICON CARRIER
A process and structure for enabling the creation of reliable electrical through-via connections in a semiconductor substrate and a process for filling vias. Problems associated with under etch,...
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US20080176404 |
Method for fabricating semiconductor device
The method for fabricating the semiconductor device comprises the step of forming an insulating film 14 having an opening 18; the step of forming an organic resist film 20 a; the step of...
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