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Match Document Document Title
US20140346620 MEMS MICROPHONE WITH REDUCED PARASITIC CAPACITANCE  
A MEMS microphone has reduced parasitic capacitance. The microphone includes a trench electrically separating an acoustically active section of the backplate from an acoustically inactive section...
US20140291784 MEMS APPARATUS WITH INCREASED BACK VOLUME  
A microelectromechanical system (MEMS) microphone assembly includes a base and a cover. The cover is coupled to the base and together with the base defines a cavity. The base forms a recess and...
US20100308425 MEMS DEVICE AND PROCESS  
A MEMS device comprises a back-plate (7) having an inner portion (7a) and an outer portion (7b), the inner portion (7a) connected to the outer portion (7b) by a sidewall (7c). A raised section or...
US20120205755 MEMS MICROPHONE  
A MEMS microphone has a cover, a base and a MEMS chip. The cover has a contact voice receiving unit which is disposed on the base, and a space is formed between the cover and the base. The MEMS...
US20150129992 MEMS MICROPHONE HAVING DUAL BACK PLATE AND METHOD FOR MANUFACTURING SAME  
Disclosed herein are a microelectromechanical systems (MEMS) microphone with a dual-back plate, and a method of manufacturing the same. The MEMS microphone according to an exemplary embodiment of...
US20140001581 MEMS MICROPHONE AND FORMING METHOD THEREFOR  
A micro-electro-mechanical system (MEMS) microphone may include a sensitive diaphragm and a fixed electrode corresponding to the sensitive diaphragm; at least one sensitive diaphragm support...
US20110138902 MEMS MICROPHONE ARRAY ON A CHIP  
The present invention relates to microelectromechanical systems (MEMS). In particular, the present invention relates to MEMS arrays for use in acoustics and other applications.
US20150102435 MEMS MICROPHONE WITH MEMBRANE ANTENNAS  
A MEMS microphone. The microphone includes a backplate, a membrane, and a plurality of antennas. The backplate has a plurality of acoustic apertures. The membrane is parallel to the backplate and...
US20130193533 EMBEDDED CIRCUIT IN A MEMS DEVICE  
A Microelectromechanical System (MEMS) microphone includes a printed circuit board, a MEMS die, and an integrated circuit. The MEMS die is disposed on a top surface of the printed circuit board....
US20140291783 COVER FOR A MEMS MICROPHONE  
A microphone assembly includes a base, a cover, and a microelectromechanical system (MEMS) die. The cover extends at least partially over and is coupled to the base. The cover and the base form a...
US20150021722 MEMS Device  
A MEMS device includes a membrane comprising a first plurality of fingers. A counter electrode arrangement includes a second plurality of fingers disposed in a interdigitated relationship with the...
US20140191344 MEMS PROCESS AND DEVICE  
A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane on a substrate, and forming a back-volume in the substrate. The step of...
US20130256816 MEMS PROCESS AND DEVICE  
A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane on a substrate, and forming a back-volume in the substrate. The step of...
US20110089504 MEMS PROCESS AND DEVICE  
A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane (5) on a substrate (3), and forming a back-volume in the substrate. The...
US20140270271 MEMS Acoustic Transducer, MEMS Microphone, MEMS Microspeaker, Array of Speakers and Method for Manufacturing an Acoustic Transducer  
A MEMS acoustic transducer includes a substrate having a cavity therethrough, and a conductive back plate unit including a plurality of conductive perforated back plate portions which extend over...
US20150054098 MEMS MICROPHONE ASSEMBLY AND METHOD OF MANUFACTURING THE MEMS MICROPHONE ASSEMBLY  
The present invention concerns a MEMS microphone assembly (1) comprising a MEMS transducer element (2) comprising a MEMS die (3), a back plate (4) and a diaphragm (5) displaceable in relation to...
US20140346621 MEMS BACKPLATE, MEMS MICROPHONE COMPRISING A MEMS BACKPLATE AND METHOD FOR MANUFACTURING A MEMS MICROPHONE  
A MEMS backplate enables MEMS microphones with reduced parasitic capacitance. A MEMS backplate includes a central area and a perforation in the central area. A suspension area surrounds the...
US20140197502 Comb MEMS Device and Method of Making a Comb MEMS Device  
A MEMS device and a method to manufacture a MEMS device are disclosed. An embodiment includes forming trenches in a first main surface of a substrate, forming conductive fingers by forming a...
US20140264656 MEMS ACOUSTIC SENSOR WITH INTEGRATED BACK CAVITY  
A MEMS device is disclosed. The MEMS device comprises a first plate with a first surface and a second surface; and an anchor attached to a first substrate. The MEMS device further includes a...
US20140084394 MICRO ELECTRO MECHANICAL SYSTEM (MEMS) MICROPHONE AND FABRICATION METHOD THEREOF  
Provided is a structure for improving performance of a micro electro mechanical system (MEMS) microphone by preventing deformation from occurring due to a residual stress and a package stress of a...
US20140291787 STRUCTURE OF MEMS ELECTROACOUSTIC TRANSDUCER  
A structure of micro-electro-mechanical systems (MEMS) electroacoustic transducer is disclosed. The MEMS electroacoustic transducer includes a substrate having a MEMS device region, a diaphragm...
US20130285173 ACOUSTIC TRANSDUCERS WITH PERFORATED MEMBRANES  
A MEMS device, such as a microphone, uses a perforated plate. The plate comprises an array of holes across the plate area. The plate has an area formed as a grid of polygonal cells, wherein each...
US20150256924 MEMS DEVICE AND PROCESS  
This application relates to MEMS devices, especially MEMS capacitive transducers and to processes for forming such MEMS transducer that provide increased robustness and resilience to acoustic...
US20140091406 MEMS Microphone System for Harsh Environments  
A MEMS microphone system suited for harsh environments. The system uses an integrated circuit package. A first, solid metal lid covers one face of a ceramic package base that includes a cavity,...
US20110127623 MEMS Microphone Packaging and MEMS Microphone Module  
A method for producing a microphone module includes arranging a MEMS microphone structure on a first surface of a first substrate, the first substrate further including a second surface, which is...
US20150158722 SYSTEMS AND APPARATUS HAVING MEMS ACOUSTIC SENSORS AND OTHER MEMS SENSORS AND METHODS OF FABRICATION OF THE SAME  
A micro electro-mechanical system (MEMS) device is provided. The MEMS device includes: a substrate having a first surface and a second surface and wherein the first surface is exposed to an...
US20140210020 MEMS Device and Method of Manufacturing a MEMS Device  
MEMS devices with a rigid backplate and a method of making a MEMS device with a rigid backplate are disclosed. In one embodiment, a device includes a substrate and a backplate supported by the...
US20150076627 MEMS-MICROPHONE WITH REDUCED PARASITIC CAPACITANCE  
A MEMS microphone with reduced parasitic capacitance is provided. A microphone includes a protection film covering a rim-sided area of the backplate.
US20150001646 Pre-mold for a microphone assembly and method of producing the same  
A microphone assembly is provided, wherein the pre-mold comprises a bent leadframe and a mold body, wherein the mold body is mold to at least partially encapsulate the bent leadframe to build the...
US20140361388 CAPACITIVE SENSING STRUCTURE WITH EMBEDDED ACOUSTIC CHANNELS  
A MEMS device includes a dual membrane, an electrode, and an interconnecting structure. The dual membrane has a top membrane and a bottom membrane. The bottom membrane is positioned between the...
US20120087521 Microphone Package with Embedded ASIC  
A packaged microphone has a base, a lid coupled to the base forming an interior, a MEMS microphone secured to the base within the interior, and an integrated circuit embedded in the base....
US20140084395 MEMS MICROPHONE  
Mechanical resonating structures, as well as related devices and methods of manufacture. The mechanical resonating structures can be microphones, each including a diaphragm and a piezoelectric...
US20150237448 Integrated CMOS/MEMS Microphone Die  
The claim invention is directed at a MEMS microphone die fabricated using CMOS-based technologies. In particular, the claims are directed at various aspects of a MEMS microphone die having...
US20150251898 Embedded Circuit In A MEMS Device  
A Microelectromechanical System (MEMS) microphone includes a base printed circuit board (PCB), the base PCB having customer pads; at least one wall coupled to the base; a lid PCB coupled to the at...
US20150014796 Device with MEMS Structure and Ventilation Path in Support Structure  
A device includes a support structure, a sound port disposed in the support structure, and a MEMS structure including a membrane acoustically coupled to the sound port. The membrane separates a...
US20140197501 MEMS Device with Polymer Layer, System of a MEMS Device with a Polymer Layer, Method of Making a MEMS Device with a Polymer Layer  
A MEMS device, a method of making a MEMS device and a system of a MEMS device are shown. In one embodiment, a MEMS device includes a first polymer layer, a MEMS substrate disposed on the first...
US20120025334 MEMS CAPACITIVE MICROPHONE  
The present invention discloses an MEMS capacitive microphone including a rigid diaphragm arranged on an elastic element. When a sound wave acts on the rigid diaphragm, the rigid diaphragm is...
US20150054097 Method for Manufacturing a MEMS Device and MEMS Device  
A method for manufacturing a MEMS device includes providing a cavity within a layer adjacent to a sacrificial layer. The cavity extends to the sacrificial layer and includes a capillary slot...
US20150256915 MEMS DEVICE AND PROCESS  
This application relates to MEMS devices, especially MEMS capacitive transducers and to processes for forming such MEMS transducer that provide increased robustness and resilience to acoustic...
US20140264655 SURFACE ROUGHENING TO REDUCE ADHESION IN AN INTEGRATED MEMS DEVICE  
In an integrated MEMS device, moving silicon parts with smooth surfaces can stick together if they come into contact. By roughening at least one smooth surface, the effective area of contact, and...
US20110272769 MEMS MICROPHONE PACKAGE AND PACKAGING METHOD  
A MEMS microphone package having improved acoustic properties, and to a packaging method, which involve adding a vent path in the packaging process to improve equilibrium between internal and...
US20110227177 MEMS sensor  
The MEMS sensor according to the present invention includes a diaphragm. In the diaphragm, an angle formed by two straight lines connecting supporting portions and the center of a main portion...
US20110068421 Integrated MEMS and ESD protection devices  
An electronic apparatus is provided that has a core, an electronic circuit in the core and a lid. An ESD protection device is in the lid. The ESD protection device is coupled to the electronic...
US20120091546 Microphone  
A microphone comprises a substrate (20), a microphone membrane (10) defining an acoustic input surface and a backplate (11) supported with respect to the membrane with a fixed spacing between the...
US20150035094 MICROPHONE ASSEMBLY HAVING AT LEAST TWO MEMS MICROPHONE COMPONENTS  
A microphone assembly includes two MEMS components each having a micromechanical microphone structure, each microphone structure having: a diaphragm configured to be deflected by sound pressure...
US20140264653 MEMS Pressure Sensor and Microphone Devices Having Through-Vias and Methods of Forming Same  
A method embodiment includes providing a MEMS wafer. A portion of the MEMS wafer is patterned to provide a first membrane for a microphone device and a second membrane for a pressure sensor...
US20130320465 THIN MEMS MICROPHONE MODULE  
A MEMS microphone module includes a first circuit board and a second circuit board attached to the first circuit board. A MEMS chip and an ASIC chip are respectively received in one of two...
US20130140656 MEMS Microphone And Method For Producing The MEMS Microphone  
The invention relates to a method for producing a microphone, in which a transducer element (WE) is mounted on a carrier (TR); a cover is arranged over the transducer element (WE) and the carrier...
US20110140213 CAPACITIVE VIBRATION SENSOR  
A hollow part is formed in a silicon substrate through the front and the back. A vibration electrode plate is arranged on an upper surface of the silicon substrate to cover the opening on the...
US20120187507 MEMS RESONATOR  
A bulk-acoustic-mode MEMS resonator has a first portion with a first physical layout, and a layout modification feature. The resonant frequency is a function of the physical layout, which is...

Matches 1 - 50 out of 406 1 2 3 4 5 6 7 8 9 >