Matches 1 - 50 out of 185 1 2 3 4 >


Match Document Document Title
US20130146503 FRONT OPENING UNIFIED POD WITH LATCH STRUCTURE  
A Front Opening Unified Pod (FOUP) has a pair of latch structures, and the latch structures install in a door of the FOUP. The latch structures use a circular rotary turntable to drive a pair of...
US20140116920 Reticle Pod  
A reticle pod includes an outer pod shell and an outer pod door disposed under the outer pod shell. The outer pod door has at least one gas control hole. A seal ring is disposed between the outer...
US20130174640 POD HAVING TOP COVER APERTURE FOR DETECTING SURROUNDING GAS WITHIN THE POD  
A storage Pod for semiconductor substrates includes a top cover formed from a non-air permeable (NAP) material having faces including a top and a plurality of sides. A bottom base plate has a...
US20130068656 Large-sized Front Opening Unified wafer POD  
A FOUP (front opening unified pod) is disposed with a plurality of supporting pieces, the positions of which are calibrated to be symmetrical for the supporting pieces to horizontally support...
US20140166533 PACKAGING FOR SUBSTRATES AND PACKAGING UNIT HAVING SUCH PACKAGING  
Packaging for substrates, particularly for metal/ceramic substrates, having a tray-like packaging portion, produced from a flat material, for example from a plastic flat material, by deep-drawing,...
US20120018347 Reticle POD with Sensor  
An EUV pod with pressure sensors disposed between its inner container and outer container, wherein pressure sensors disposed on the inner side of the outer container are used to detect the...
US20090127160 STORAGE APPARATUS FOR STORING SEMICONDUCTOR ELEMENT OR RETICLE  
The present invention provides a storage apparatus for storing a semiconductor element or a reticle. The storage apparatus comprises a first cover, a second cover and a flange. The first cover has...
US20110253591 Reticle Pod Having Function of Gas Exchange  
A reticle pod for storing reticles, into the gas channel of partition of which gas is filled through a gas inlet, wherein strong gas flow is formed around the pellicle film and the pellicle film...
US20090038988 CONTAINER AND LINER THEREOF  
A container having a top cover and a bottom cover is provided, which includes a canopy disposed on the bottom cover to form therewith a space to accommodate an article. A plurality of locators is...
US20110024325 WAFER BOX FOR THE TRANSPORT OF SOLAR CELL WAFERS  
A wafer box for transporting solar cell wafers includes a bottom and guide elements for positioning the solar cell wafers. Four guide angles having centering ridges are provided coaxially with a...
US20130269615 VERTICAL WAFER BOAT  
A wafer boat for holding a plurality of semiconductor wafers in a spaced apart relationship during processing, comprising at least one support member defining a plurality of sets of at least two...
US20150170948 COUPLING TRANSFER SYSTEM  
A transfer box has a sealing structure hermetically sealable by means of tight coupling of a transfer box body and a transfer box door. The transfer box is structured in such a way that magnets on...
US20110215028 SUBSTRATE STORAGE POD AND LID OPENING/CLOSING SYSTEM FOR THE SAME  
The substrate storage pod includes an engagement portion in an outer side surface of a lid of the pod, and an insertion slot through which the engagement portion can be accessed from an external...
US20070284217 Transportation system and transportation method  
A conveyor 4 for transporting a reticle cassette 18 is provided. A lifter 16 of a rail vehicle 14 lifts the reticle cassette 18 for transferring the reticle cassette 18 between the inside of a...
US20150101959 ULTRA-LOW OXYGEN AND HUMILITY LOADPORT AND STOCKER SYSTEM  
One or more pods for adjusting at least one of an oxygen content or a water content therein and methods of their use are provided, where one or more semiconductor wafer are selectively stored...
US20110210041 SUBSTRATE STORAGE POD WITH REPLACEMENT FUNCTION OF CLEAN GAS  
The substrate storage pod includes a pod case which includes a hollow inner space for storing a substrate, and an opening; a lid member which is capable of sealing the opening; an exhaust port for...
US20110284423 METHOD AND STORAGE SYSTEM FOR REDUCING CONTAMINATION OF A PHOTOMASK  
A method for reducing contamination of a photomask that has a pellicle frame holding a pellicle film to cover the photomask, and a sealed space defined by the pellicle frame, the pellicle film and...
US20090114563 RETICLE STORAGE APPARATUS AND SEMICONDUCTOR ELEMENT STORAGE APPARATUS  
The present invention provides a reticle storage apparatus and a semiconductor element storage apparatus each equipped with a filtering device. The reticle storage apparatus or the semiconductor...
US20090289050 PROBE CARD THERMAL CONDITIONING SYSTEM  
Embodiments of apparatus for thermally conditioning probe cards prior to use in a testing system are provided herein. In some embodiments, a probe card thermal conditioning system may include an...
US20090260329 PACKING INSERT FOR DISC-SHAPED OBJECTS  
A packing insert for disc-shaped objects comprising a ring and a deformable contacting portion supported by the ring and extending from a circumference of the ring. The contacting portion can...
US20070181453 Cartridge accommodating case  
A cartridge accommodating case including: a cartridge accommodating upper case as defined herein; and a cartridge accommodating lower case as defined herein, a partitioned chamber of an expanse...
US20140319020 WAFER CONTAINER WITH LATCHING MECHANISM FOR LARGE DIAMETER WAFERS  
A wafer container with a latch mechanism that provides sealing for large wafer containers, such as for 450 mm wafers, accomplishes secure door closing and latching with reduced torque requirements...
US20110042266 WAFER CONTAINER WITH CUSHION SHEETS  
An elastic wafer-retaining cushion sheet is disposed at a wafer retaining position on the top of a wafer tray. The wafer-retaining cushion sheet has a releasably suction-adhering surface that...
US20140076774 Automated Wafer Container with Equipment Interface  
An improved wafer container is provided for use with automated equipment. The container includes a top lid that engages with a bottom base to form a housing having an inner cavity for storing...
US20130277268 FRONT OPENING WAFER CONTAINER WITH DOOR DEFLECTION MINIMIZATION  
A front opening wafer container suitable for 450 mm diameter wafers. The front door has a pair of latch mechanism externally operable on the sides of the door, each latching mechanism having a...
US20050103669 Hermetically sealed container for large-sized precision sheet (semi-) product  
A relatively light and generally resinous hermetically sealed container is provided for accommodating, supporting and transporting a precision sheet (semi-)product, such as a photomask, safely and...
US20120109364 Mask Conveying System And Mask Conveying Adapter  
According to one embodiment, a mask conveying system includes a stocker, a conveyance path, a storage container, a conveying apparatus, and a control device. The storage container for wafer...
US20090038985 PHOTOMASK POD, PHOTOMASK TRANSPORT POD AND SUPPORTER THEREOF  
A photomask pod and a photomask transport pod are provided for preventing particles in the environment from defiling a photomask as well as charge accumulation on the photomask from causing ESD...
US20070227940 Pod with guiding-locking piece therein  
The present invention discloses a guiding locking piece deployed on one side of the body of pod, the overall structure of which is formed by a flat base linking to a first slope that links to a...
US20090272461 Transfer container  
A transfer container for transferring an object between environments is described. The transfer container comprises an enclosure; a purifier comprising a purification material, the purifier...
US20070161494 Non-oxide ceramic having oxide layer on the surface thereof, method for production thereof and use thereof  
A non-oxide ceramics having improved performances and functions by forming a high-quality oxide film on the surface of a non-oxide ceramics such as aluminum nitride. The method for the formation...
US20060283770 Transportation fixture and package for substrate rack  
A transportation fixture for holding a substrate rack comprises top and bottom endplates that are attached by a plurality of posts. The posts are spaced apart a sufficient distance to confine a...
US20090272743 SUBSTRATE CONTAINER SEALING VIA MOVABLE MAGNETS  
A system of moving magnets for sealing a container may include a plurality of moveable magnets disposed near a perimeter of a container door and a rotatable linkage hub positioned within the...
US20060000747 Shipping container for integrated circuit wafers  
A shipping container for integrated circuit wafers has a lower section and an upper section releasably connected to the lower section, and a seal is received on a shoulder of the lower section....
US20140291198 RETICLE POD HAVING GAS GUIDING APPARATUS  
The present invention relates to a reticle pod having gas guiding apparatus. The gas guiding apparatus communicates with at least an inlet of the reticle pod and comprises a first outlet...
US20070151896 Packing member for packing wafer container  
A packing member for packing a wafer container in a carton for transportation includes a rectangular frame which has a receiving space, at least one recess disposed at an outer side thereof...
US20060201848 Method for reducing mask precipitation defects  
In a container for transporting a reticle during a semiconductor manufacturing process, the reticle including a base made of isolating material and a metallic layer deposited onto a surface of the...
US20050077205 Tray with flat bottom reference surface  
A molded component tray includes a component housing portion having a plurality of component pockets. The tray has a flange around the component housing portion defining a perimeter of the tray. A...
US20100038282 Front Opening Unified Pod with latch structure  
A wafer container includes a container body, which is disposed with a plurality of slots for supporting a plurality of wafers and an opening is formed on one sidewall of which for importing and...
US20050150813 Foldover packages and manufacturing and test methods therefor  
A microelectronic fold package is formed from an in-process unit including an internal unit such as a chip and a tape defining a bottom run extending beneath the internal unit, a top run extending...
US20090277816 Top Flange Protective Cover for Thin Plate Container and Thin Plate Container Provided Therewith  
A package of a thin plate container 1 is prevented from being broken when vacuum packed. A top flange protective cover for a thin plate container detachable to the top flange which is provided on...
US20140034548 WAFER CONTAINER  
Improvements in a semiconductor wafer container for reducing movement of semiconductor wafers within a wafer carrier using flexible wall segments, panels or flexible inserts in the base member's...
US20050236298 Ready-for-dispatch package for semiconductor wafers, and method for the ready-for-dispatch packaging of semiconductor wafers  
The invention relates to a ready-for-dispatch package for semiconductor wafers, comprising a) a closeable plastic container which is loaded with the semiconductor wafers and has a lid and a body,...
US20050269240 SEMICONDUCTOR INSPECTION APPARATUS AND TRAY FOR INSPECTION PARTS USED THEREOF  
A tray of parts for inspection has a simple structure having only a tray holder that has a plurality of groove sections that store a plurality of parts for inspection on the surface, and contact...
US20070006803 Detachable edge ring for thermal processing support towers  
An edge ring for use in batch thermal processing of wafers supported on a vertical tower within a furnace. The edge rings are have a width approximately overlapping the periphery of the wafers and...
US20100059408 CLOSED CONTAINER AND LID OPENING/CLOSING SYSTEM THEREFOR  
In a pod used in an FIMS system, diffusion of dust particles or the like adhering on the lid of the pod to the interior of the system is reduced. An engaged portion is provided inside the outer...
US20070023321 Container, a packaging body, manufacturing method of a container, manufacturing method of a packaging body, and a compound semiconductor substrate  
The invention relates to a container used to store a compound semiconductor substrate where the content of tin in the container is 1 ppm or less. Further, it relates to a container used to store a...
US20060032784 Foam laminate system for semiconductor wafers  
A cushion-like device is provided for the transportation of semiconductor wafers. The device includes an interior formed from polyethylene closed cell foam that utilizes a foaming agent that...
US20100065467 ANTIVIBRATION MECHANISM FOR ARTICLE RECEIVING CONTAINER  
An object is to restrict vibration from being transmitted to a shelf member and thus to prevent a substrate supported on the shelf member from being damaged. An FOUP main body 3a is formed into a...
US20080217268 Frame system for an article storage apparatus  
A frame system for an article storage apparatus which defines an article storage space therein, includes a first upper frame extending horizontally, a first lower frame extending horizontally, and...

Matches 1 - 50 out of 185 1 2 3 4 >