Matches 51 - 100 out of 185 < 1 2 3 4 >


Match Document Document Title
US20140202921 SUBSTRATE TRANSPORT  
A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an...
US20090038976 CONTAINER AND FOOLPROOF DEVICE THEREOF  
A container comprises a first cover and a second cover, in which the first cover comprises an internal space. The container further comprises a plate disposed on the second cover. The second cover...
US20080277313 WAFER SUPPORTER  
A wafer supporter includes a base and a plurality of rods vertically fixed on the base. Each rod includes holders to support a wafer. Each of the holders has a downwardly slanted top surface...
US20130186803 WAFER TRANSFER POD FOR REDUCING WAFER PARTICULATE CONTAMINATION  
A wafer transport pod for storing or transporting semiconductor wafers during semiconductor wafer processing includes a body having a top panel, a bottom panel, a back panel, two side panels and a...
US20110114534 WAFER CONTAINER WITH TUBULAR ENVIRONMENTAL CONTROL COMPONENTS  
A wafer container utilizes a rigid polymer tubular tower with slots and a “getter” therein for absorbing and filtering moisture and vapors within the wafer container. The tower preferably utilizes...
US20150014191 SUBSTRATE STORAGE CONTAINER  
To provide a substrate storage container capable of keeping low a relative humidity in an internal closed space for a long period of time even after purging, a substrate storage container...
US20140076773 FRONT OPENING UNIFIED POD HAVING INLET AND OUTLET  
The present invention relates to a front opening unified pod (FOUP) having three inlets and one outlet. Thereby, the mixing region for the moisture, oxygen, and the filled gas can be increased and...
US20080251414 Container and metal actuator of latching mechanism thereof  
A container having a box door and a box is disclosed in this invention, which has an internal area within the box for storage; when the box is joined with the box door, the internal area is sealed...
US20130270152 FRONT OPENING WAFER CONTAINER WITH ROBOTIC FLANGE  
A front opening wafer container suitable, for large diameter wafers, 300 mm and above, utilizes a removable robotic flange that attaches vertically, without separate fasteners, using detents...
US20070068846 WAFER PACKING  
The present invention provides a wafer packing. The wafer packing includes a box, at least two sponges, at least two hollow support pads, and a plurality of wafers. The sponges are put on a bottom...
US20090211940 CLOSED CONTAINER AND CONTROL SYSTEM FOR CLOSED CONTAINER  
A closed container in which a reticle etc. is stored and kept is provided with a pressure sensor, transmission means for transmitting data on the pressure, a controller that controls the operation...
US20060032785 Storage box for wafer shipping box  
A storage box for a wafer shipping box is provided. The storage box includes a first housing member, a first fastening element, a second housing member and a second fastening element. The first...
US20090272669 SUBSTRATE ACCOMMODATING APPARATUS  
A substrate accommodating apparatus 10 is constituted by stacking a plurality of accommodation bodies 20 on an upper surface of a rigid plate 15. Each accommodation body 20 is provided with a...
US20060065571 Wafer shipping box and wafer transportation method  
A wafer shipping box for carrying a number of wafers is provided. The wafer shipping box includes a main body, a cover and a sealing element. The cover can join up with the main body to seal off...
US20050077206 Bare die tray with flat datum surface  
In one embodiment of the present invention, a component tray includes a component housing portion having a plurality of component pockets, with each pocket opening to a component housing top...
US20140271053 PRESSURE-CONTROLLED WAFER CARRIER AND WAFER TRANSPORT SYSTEM  
Disclosed are a wafer carrier that keeps wafers under a constant pressure, at any preset value below or above the atmospheric pressure, to prevent wafer contaminations arising from atmospheric...
US20100006472 Drain device and method  
The present invention provides a drain device for a transporting box with an input/output opening which can be blocked by a box door and which contains substrate wafers stacked according to...
US20060091039 Wafer storage box  
A storage box for storing a wafer is provided. The wafer storage box includes a main body having a receiving portion having a bottom surface, a plurality of protruding portions formed on the...
US20070187286 Wafer storage container and apparatus  
An injection molded container for storing and transporting wafers includes a base having a wafer area upon which to place a stack of a plurality of wafer assemblies, wherein each wafer assembly...
US20150206779 SEMICONDUCTOR PROCESSING BOAT DESIGN WITH PRESSURE SENSOR  
Presented herein is a device comprising a device processing boat comprising a base at least one unit retainer disposed in the base. The device further comprises a cover having at least one recess...
US20080004746 Live tape position sensor  
A real-time tape position sensor to accurately determine the location of several consecutive carrier tape pockets in order to pick or place electronic semiconductor devices into or out of a tape...
US20100116709 VENTILATED FRONT-OPENING UNIFIED POD  
An improved substrate transport pod for storing or transporting semiconductor wafer substrates during semiconductor wafer processing has a main body defined by a plurality of side panels. A...
US20120187024 WAFER CONTAINER  
Improvements in a semiconductor wafer container including improvements in side protection to the wafers, improved cover design to minimize rotation, a simplified top cover orientation mechanism...
US20120132561 WAFER CONTAINER  
Improvements in a semiconductor wafer container including improvements in side protection to the wafers, improved cover design to minimize rotation, a simplified top cover orientation mechanism...
US20140360915 WAFER CONTAINER WITH RECESSED LATCH  
Improvements in a semiconductor wafer container including improvements in side protection to the wafers, improved cover design to minimize rotation, a simplified top cover orientation mechanism...
US20110049006 WAFER CONTAINER WITH RECESSED LATCH  
Improvements in a semiconductor wafer container including improvements in side protection to the wafers, improved cover design to minimize rotation, a simplified top cover orientation mechanism...
US20120325105 BIDIRECTIONAL WAFER CARRYING POD AND WAFER TRANSFER SYSTEM  
A wafer transfer system includes a bidirectional wafer carrying pod, an over-head transport (OHT) rail, an OHT, two platforms, and two loading ports respectively connected to the two platforms....
US20060231454 Carrier, holder, laser cutting device and method for separating semiconductor products using laser light  
The invention relates to a carrier and to a holder for supporting and engaging semiconductor products during separating of the products using laser light. The invention also relates to a method...
US20140223757 SUBSTRATE STORAGE CONTAINER AND EXPOSURE APPARATUS  
Provided is a reticle storage container including an inner container 10 which can store a plurality of reticles 16 and an outer container 1 which covers the inner container 10. The outer container...
US20090266740 WAFER CONTAINER WITH CUSHION SHEET  
A wafer container with wafer-mounting cushion sheets prevents breaking and damage of semiconductor wafers due to impacts or repetitive warping by maintaining the semiconductor wafer in a flat...
US20090206000 ELECTRONIC DEVICE CARRIER TAPE  
One aspect provides a carrier tape configured to transport semiconductor packages having a semiconductor package thickness. The carrier tape includes a film having a film thickness extending...
US20080273959 Sealed Enclosure for Transporting and Storing Semiconductor Substrates  
The present invention relates to a sealed enclosure for transporting and storing semiconductor substrates, the enclosure comprising a sealed container and support means placed inside the container...
US20110210042 SUBSTRATE STORAGE POD AND LID MEMBER THEREOF, AND PROCESSING APPARATUS FOR A SUBSTRATE  
The substrate storage pod includes a pod case for housing a substrate, and an opening, a lid member which closes and seals the opening, a buffer space which is defined in the lid member, an...
US20090308784 WAFER STORAGE CARRIER  
It is an object of the invention to provide a wafer storage carrier that makes it possible to prevent wafers from being damaged or broken, regardless of the state of wafer warpage. A top plate and...
US20050218034 Lid unit for thin plate supporting container  
A lid unit seals a container main body of a thin-plate supporting container which is conveyed while plural 300 mm-diameter semiconductor wafers are stored in the container. In a wafer retainer...
US20090152162 CARRIER APPARATUS AND METHOD FOR SHAPED SHEET MATERIALS  
A carrier apparatus for holding a shaped sheet material includes a first frame structure with a first front surface including a first outer peripheral region and a first inner peripheral region...
US20080295412 APPARATUS FOR STORING SUBSTRATES  
An apparatus includes an enclosure and a door configured to seal the enclosure. The door includes a plate. A rotational apparatus is disposed over the plate. At least one first member with a first...
US20070256957 Sub-rack with housing for receiving plug-in modules  
A sub-rack (1) for plugging and unplugging electronic plug-in modules (3) includes a housing (2) which has a front cover plate (5). Each plug-in module includes a cooling device including a heat...
US20150083638 PACKAGE ASSEMBLY FOR THIN WAFER SHIPPING AND METHOD OF USE  
A package assembly for thin wafer shipping using a wafer container and a method of use are disclosed. The package assembly includes a shipping container and a wafer container having a bottom...
US20090038984 SUBSTRATE STORAGE CONTAINER AND METHOD OF PRODUCING THE SAME  
A substrate storage container that can be highly accurately positioned and produced at increased productivity, and a method of producing the substrate storage container are provided. The substrate...
US20050098473 Container for containing semiconductor wafers  
A container for containing semiconductor wafers. A preferred embodiment of the invention provides a container for containing semiconductor wafers that includes a first container body including a...
US20060163112 Reinforced structural member for high temperature operations and fabrication method  
A structural member for use in high temperature environments is disclosed. The structural member has a core encased within a shell material. The core material is formed of a strong material having...
US20100032339 COVER BODY AND SUBSTRATE RECEIVING CONTAINER  
A door structure that is detachably fitted into an opening portion of a container body for storing substrates includes a casing to be fitted to the opening portion of the container body, a locking...
US20050057011 Carrier for wafer boxes  
A carrier for wafer boxes is provided. The carrier includes a carrier main body, a cover device and a shock absorbing device. The carrier main body carries at least one wafer box, and the shock...
US20090090653 Low cost wafer box improvements  
The wafer box includes a tray (10) and a cover (62). The tray (10) includes an inner (34, 36, 38, 40) and outer (24, 26, 28, 30) wall configuration with horizontal semicircular channels (48, 50,...
US20130092595 WAFER CARRIER  
A wafer carrier comprises a supporting body having a height and comprising an opening, wherein a bottom surface of the opening is a curved surface; and a plurality of supporting rods formed around...
US20080251415 SUBSTRATE CONTAINER AND HANDLE THEREOF  
A substrate container includes: a container main body including an opening and containing a substrate; a lid body closing the opening; and a pair of handles provided on a pair of opposing side...
US20080110795 Packing case for substrates of flat display device  
An exemplary packing case (20) includes a main body (21) and a plurality of protrusions (213). The main body includes four side walls configured for receiving substrates. The protrusions are...
US20050247594 Substrate-storing container  
A substrate storage container which includes: a front-opening box type container body for storing a multiple number of substrates in alignment therein; a door for opening and closing the open...
US20110215029 Pod with Guiding-Locking piece therein  
The present invention discloses a pod which includes a lower cover member, an upper cover member and a guiding locking piece. The a guiding locking piece deployed on one side of the upper cover...

Matches 51 - 100 out of 185 < 1 2 3 4 >