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US20090288604 |
CHEMICAL VAPOR DEPOSITION APPARATUS
Provided is a chemical vapor deposition apparatus including a reaction chamber; a susceptor that is provided in the reaction chamber and has a plurality of wafers mounted thereon; a rotation...
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US20090286398 |
CHEMICAL VAPOR DEPOSITION APPARATUS, FILM FORMING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
In forming a TiN film on a base material ( 10 ) by a MOCVD method, a space between a showerhead ( 3 ) and a trapping member ( 5 ) is heated by a heater ( 2 ) up to a temperature at which TDMAT is...
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US20090283041 |
SOLID ORGANOMETALLIC COMPOUND-FILLED CONTAINER AND FILLING METHOD THEREOF
A solid organometallic compound novel filled container stably supplies an apparatus for vapor phase epitaxial growth such as an MOCVD apparatus with a solid organometallic compound over a long...
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US20090277390 |
Source, an Arrangement for Installing a Source, and a Method for Installing and Removing a Source
The invention relates to an arrangement for installing a source into a gas deposition reactor. The arrangement comprises at least one source fitting for the source such that the source fitting is...
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US20090269492 |
Apparatus and Method for Deposition Organic Compounds, and Substrate Treating Facility With the Apparatus
An apparatus for depositing organic compounds is provided to deposit predetermined organic films on a substrate. The apparatus includes a deposition chamber, a support member provided inside the...
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US20090269486 |
EVAPORATION METHOD, EVAPORATION DEVICE AND METHOD OF FABRICATING LIGHT EMITTING DEVICE
The invention provides an evaporation system which is one of deposition devices promoting an efficiency of utilizing an EL material and excellent in uniformity and throughput of forming an EL layer...
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US20090250007 |
Apparatus for Depositing Thin Films Over Large-Area Substrates
An apparatus for increasing uniformity of thin films deposited on a substrate includes multiple deposition sources to accommodate and discharge evaporation material. A member supports the...
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US20090250006 |
RAW MATERIAL FEEDING DEVICE AND FILM FORMATION SYSTEM
A raw material feeding device for feeding a gaseous raw material formed by sublimating a solid raw material to a film formation system includes a raw material container for holding the solid raw...
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US20090229525 |
VAPORIZER AND FILM FORMING APPARATUS
The size of drops of liquid raw material spouted into a vaporization chamber is controlled so as to suppress any dispersion of drop size, thereby attaining assured vaporization of the drops. The...
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US20090229524 |
Multiple Nozzle Evaporator for Vacuum Thermal Evaporation
Disclosed is a multiple nozzle evaporator in which a material to be evaporated in the evaporator can be deposited on a substrate with an improved efficiency of use of the material, thereby forming...
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US20090223441 |
HIGH VOLUME DELIVERY SYSTEM FOR GALLIUM TRICHLORIDE
The present invention is related to the field of semiconductor processing equipment and methods and provides, in particular, methods and equipment for the sustained, high-volume production of Group...
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US20090220691 |
Evaporation apparatus and thin film forming method using the same
Provided are an evaporation apparatus and a thin film forming method using the same. The evaporation apparatus and the thin film forming method are used to form a uniform thin film, even for a...
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US20090217876 |
Coating System For A Ceramic Evaporator Boat
A coating system is applied to a ceramic evaporator boat to extend the life of the boat. The coating system includes a ceramic layer is applied over the surface of an evaporator boat reservoir....
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US20090211525 |
MULTIPLE AMPOULE DELIVERY SYSTEMS
This invention relates to an integrated vapor or liquid phase reagent dispensing apparatus having a plurality of vessels and a plurality of carrier or inert gas feed/vapor or liquid phase reagent...
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US20090208664 |
APPARATUS AND METHOD FOR PRODUCING A REFLECTOR
Provided is a deposition apparatus that has a metal evaporation source for depositing a reflective layer, a pigment evaporation source for depositing a coloring layer, and a plasma polymerization...
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US20090199767 |
DEVICE FOR CLAMPING AND POSITIONING AN EVAPORATOR BOAT
The invention relates to a vacuum treatment plant comprising an evaporator ( 1 ) for vacuum coating facilities. The evaporator ( 1 ) according to the invention comprises a device for guiding a...
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US20090199763 |
Process for the production of gan or aigan crystals
The invention concerns a process and an apparatus for the production of gallium nitride or gallium aluminium nitride single crystals. It is essential for the process implementation according to the...
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US20090196584 |
EVAPORATION CRUCIBLE AND EVAPORATION APPARATUS WITH ADAPTED EVAPORATION CHARACTERISTIC
An evaporation crucible is described. The evaporation crucible ( 100; 300; 400; 500 ) includes: an electrically conductive body ( 120 ) and a cover ( 150; 550 ); the body having a first electrical...
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US20090183684 |
Plasma Treatment Device
A plasma abatement device comprises a gas chamber having a gas inlet for receiving a gas to be treated by the device and a gas outlet, at least part of the inner surface of the gas chamber being...
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US20090183683 |
Plasma Processing Apparatus and Method for Venting the Same to Atmosphere
In a plasma processing apparatus provided with control means, gas supply means includes a first gas supply path for supplying a vent gas into a processing chamber by way of a shower plate and a...
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US20090176016 |
VAPORIZATION APPARATUS WITH PRECISE POWDER METERING
Apparatus for vaporizing a particulate material, comprising a metering apparatus including: a reservoir; a housing having an internal volume and first and second openings for respectively receiving...
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US20090173279 |
VACUUM VAPOR DEPOSITION APPARATUS
A crucible is a monolithic structure extending over an entire area of a vaporizing chamber and has at least one slit groove provided in the upper surface thereof. The at least one slit groove has a...
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US20090162535 |
METHOD OF FORMING A PHOSPHOR OR SCINTILLATOR MATERIAL AND VAPOR DEPOSITION APPARATUS USED THEREFOR
In a method of preparing a storage phosphor or a scintillator layer on a support by vapor depositing from a crucible unit in a vapor deposition apparatus, while heating as phosphor or scintillator...
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US20090136668 |
METHOD AND APPARATUS TO HELP PROMOTE CONTACT OF GAS WITH VAPORIZED MATERIAL
Vaporizable material is supported within a vessel to promote contact of an introduced gas with the vaporizable material, and produce a product gas including vaporized material. A heating element...
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US20090130794 |
THERMAL EVAPORATION APPARATUS, USE AND METHOD OF DEPOSITING A MATERIAL
Thermal evaporation apparatus for depositing of a material on a substrate, comprising material storage means; heating means to generate a vapour of the material in the material storage means;...
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US20090120364 |
GAS MIXING SWIRL INSERT ASSEMBLY
A gas mixing system for a semiconductor wafer processing chamber is described. The mixing system may include a gas mixing chamber concentrically aligned with a gas transport tube that extends to a...
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US20090114157 |
AMPOULE SPLASH GUARD APPARATUS
Embodiments of the invention provide an apparatus for generating a precursor gas used in a vapor deposition process system. The apparatus contains a canister or an ampoule for containing a chemical...
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US20090107402 |
DEPOSITION APPARATUS AND CLEANING METHOD THEREOF
A deposition apparatus including a vaporizer; a chemical supplier; a pipe line coupled between the vaporizer and the chemical supplier; and a solvent supplier coupled to the pipe line. A method of...
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US20090107401 |
DEVICE FOR VAPORIZING CONDENSED SUBSTANCES
The invention relates to a device for the vaporisation of condensed (solid or liquid) materials, in particular, of starting materials for OLED production, comprising a container ( 1 ), for housing...
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US20090098280 |
VAPOR DEPOSITION APPARATUS AND METHOD OF VAPOR DEPOSITION MAKING USE THEREOF
A vapor deposition apparatus comprises as a vaporization assembly a container in form of a boat or crucible and a support for vapor depositing phosphor or scintillator material thereupon from raw...
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US20090097831 |
LIQUID MATERIAL VAPORIZER
A liquid material vaporizer comprises a gas-liquid mixing section ( 1 ) for mixing a liquid material (LM) and a carrier gas (CG) to generate a gas-liquid mixture (GL); a heating type vaporizing...
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US20090087545 |
Film Forming Apparatus, Evaporating Jig, and Measurement Method
Provided are an evaporating jig by which a thin film, especially an organic EL film, can be uniformly formed over a long time, and a film forming apparatus including the evaporating jig. The...
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US20090081365 |
DEPOSITION APPARATUS FOR TEMPERATURE SENSITIVE MATERIALS
A system for the deposition of vaporized materials on a substrate is described, comprising at least first and second orientation-independent apparatuses for directing vaporized organic materials...
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US20090081364 |
Evaporation apparatus
An evaporation apparatus is capable of preventing a sag phenomenon in a substrate. The evaporation apparatus includes a substrate supporting unit. The substrate supporting unit includes a substrate...
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US20090078203 |
HOT SOURCE
A hot source for vapour deposition apparatuses for supplying source substance into a reactor, the source comprising a source container having a source space for the source substance. The source...
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US20090065066 |
METHOD FOR VAPORIZING LIQUID MATERIAL CAPABLE OF VAPORIZING LIQUID MATERIAL AT LOW TEMPERATURE AND VAPORIZER USING THE SAME
A vaporizer is provided with a vaporizing chamber heated by heaters; a primary filter positioned in a bottom end portion of the vaporizing chamber and heated by the heater; a liquid material supply...
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US20090050210 |
Methods for Operating Liquid Chemical Delivery Systems Having Recycling Elements
Liquid chemical delivery systems are provided which include a liquid chemical storage canister, a pressurized gas source that feeds a pressurized gas into the storage canister, a vaporizer that may...
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US20090050059 |
CATHODE EVAPORATION MACHINE
The invention relates to a cathode evaporation machine, comprising an evaporation chamber ( 2 ), a cathode element ( 3 ), an anode ( 4 ), and a magnetic guidance system to guide the arc on the...
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US20090038550 |
EVAPORATION SOURCE, MANUFACTURING METHOD OF THE SAME AND MANUFACTURING METHOD OF AN ORGANIC EL DISPLAY DEVICE
An evaporation source includes: an insulating substrate; first electrode patterns formed in a striped manner on the substrate; second electrode patterns formed in a striped manner on the substrate...
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US20090038549 |
SHAPED CRUCIBLE AND EVAPORATION APPARATUS HAVING SAME
A crucible for an evaporation apparatus with the crucible having a length, a width, and a thickness is provided. The crucible comprises an evaporation side for receiving and evaporating material to...
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US20090020072 |
Chemical solution vaporizing tank and chemical solution treating system
An object is to suppress differences in concentration between processing gases supplied to a plurality of works in a chemical solution vaporizing tank. The chemical solution vaporizing tank...
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US20090017217 |
Apparatus and method for applying coatings onto the interior surfaces of components and related structures produced therefrom
Provided is a methodology and system for applying coatings onto the interior surfaces of components. The approach comprises a vapor creation device (for example an electron beam or laser that...
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US20080282983 |
High Temperature Vacuum Evaporation Apparatus
A filament, heat shield, supporting base comprised of SiC with ceramic insulators and top plate that together form an effusion assembly for use in the vacuum evaporation, molecular beam epitaxy,...
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US20080280066 |
Apparatus and Method for Coating a Substrate
An apparatus for coating a substrate using physical vapour deposition, including a vacuum chamber wherein a coil is placed for keeping an amount of conductive material in levitation and for heating...
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US20080276860 |
CROSS FLOW APPARATUS AND METHOD FOR HYDRIDE VAPOR PHASE DEPOSITION
A method and apparatus for hydride vapor phase epitaxial (HVPE) deposition is disclosed. In the HVPE process, a hydride gas flows over a metal source to react with the metal source, which then...
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US20080264342 |
DEPOSITION APPARATUS
A deposition apparatus is provided that includes a plurality of line-type evaporation sources provided to be arranged in a predetermined direction; and a movement and support device which supports...
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US20080251018 |
GAS SUPPLY SYSTEM FOR SEMICONDUCTOR MANUFACTURING APPARATUS
A gas supply system according to the present invention comprises a gas filter disposed in a gas supply flow passage through which a gas is supplied to a semiconductor manufacturing apparatus and a...
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US20080251015 |
Substrate Processing Apparatus and Reaction Container
A substrate processing apparatus comprises a reaction chamber which is to accommodate stacked substrates, a gas introducing portion, and a buffer chamber, wherein the gas introducing portion is...
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US20080245306 |
Vaporizer and semiconductor processing system
A vaporizer for generating a process gas from a liquid material includes a heat-exchange lower block having a hollow internal space and disposed below the spray port of an injector inside the...
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US20080245305 |
Metal Evaporation Heating Element and Method for Evaporating Metal
A metal evaporation boat having improved wettability to a molten metal and having a prolonged life, and a method for evaporating a metal employing it. A metal evaporation heating element...
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