Gorrell, Jonathan (Gainesville, FL, US)
Davidson, Mark (Florahome, FL, US)

11/525151

07/14/2009

09/22/2006

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Virgin Islands Microsystems, Inc. (St. Thomas, VI, US)

315/506

250/493.1, 372/2, 315/505, 331/54, 315/500, 331/79, 250/504R, 372/26

G21G4/00; G01J1/00; H01H7/00; H01H2/00

250/495.1, 372/2, 372/4, 372/5, 372/99, 372/9, 250/504R, 331/79, 250/493.1, 315/506, 315/505, 331/54, 331/55, 315/500, 372/20, 372/26, 315/14, 315/15, 250/396R, 315/364, 372/74, 331/81, 250/492.3, 372/108, 315/3.6, 372/102, 315/3, 331/80

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3546524	LINEAR ACCELERATOR HAVING THE BEAM INJECTED AT A POSITION OF MAXIMUM R.F. ACCELERATING FIELD	December, 1970	Stark
3560694	MICROWAVE APPLICATOR EMPLOYING FLAT MULTIMODE CAVITY FOR TREATING WEBS	February, 1971	White
3586899	APPARATUS USING SMITH-PURCELL EFFECT FOR FREQUENCY MODULATION AND BEAM DEFLECTION	June, 1971	Fleisher
3886399	Electron beam electrical power transmission system	May, 1975	Symons
3923568	Dry plasma process for etching noble metal	December, 1975	Bersin
3989347	Acousto-optical data input transducer with optical data storage and process for operation thereof	November, 1976	Eschler
4053845	Optically pumped laser amplifiers	October, 1977	Gould
4282436	Intense ion beam generation with an inverse reflex tetrode (IRT)	August, 1981	Kapetanakos
4450554	Asynchronous integrated voice and data communication system	May, 1984	Steensma et al.
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4661783	Free electron and cyclotron resonance distributed feedback lasers and masers	April, 1987	Gover et al.
4704583	Light amplifiers employing collisions to produce a population inversion	November, 1987	Gould
4712042	Variable frequency RFQ linear accelerator	December, 1987	Hamm
4713581	Method and apparatus for accelerating a particle beam	December, 1987	Haimson
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4740973	Free electron laser	April, 1988	Madey
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4866704	Fiber optic voice/data network	September, 1989	Bergman
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4873715	Automatic data/voice sending/receiving mode switching device	October, 1989	Shibata
4887265	Packet-switched cellular telephone system	December, 1989	Felix
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5036513	Method of and apparatus for integrated voice (audio) communication simultaneously with "under voice" user-transparent digital data between telephone instruments	July, 1991	Greenblatt
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5065425	Telephone connection arrangement for a personal computer and a device for such an arrangement	November, 1991	Lecomte et al.
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5121385	Highly efficient multiplexing system	June, 1992	Tominaga et al.
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5128729	Complex opto-isolator with improved stand-off voltage stability	July, 1992	Alonas et al.
5130985	Speech packet communication system and method	July, 1992	Kondo et al.
5150410	Secure digital conferencing system	September, 1992	Bertrand
5155726	Station-to-station full duplex communication in a token ring local area network	October, 1992	Spinney et al.
5157000	Method for dry etching openings in integrated circuit layers	October, 1992	Elkind et al.
5185073	Method of fabricating nendritic materials	February, 1993	Bindra
5187591	System for transmitting and receiving aural information and modulated data	February, 1993	Guy et al.
5199918	Method of forming field emitter device with diamond emission tips	April, 1993	Kumar
5214650	Simultaneous voice and data system using the existing two-wire inter-face	May, 1993	Renner et al.
5233623	Integrated semiconductor laser with electronic directivity and focusing control	August, 1993	Chang
5235248	Method and split cavity oscillator/modulator to generate pulsed particle beams and electromagnetic fields	August, 1993	Clark et al.
5262656	Optical semiconductor transceiver with chemically resistant layers	November, 1993	Blondeau et al.
5263043	Free electron laser utilizing grating coupling	November, 1993	Walsh
5268693	Semiconductor film free electron laser	December, 1993	Walsh
5268788	Display filter arrangements	December, 1993	Fox et al.
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5283819	Computing and multimedia entertainment system	February, 1994	Glick et al.
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5305312	Apparatus for interfacing analog telephones and digital data terminals to an ISDN line	April, 1994	Fornek et al.
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5446814	Molded reflective optical waveguide	August, 1995	Kuo et al.
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5578909	Coupled-cavity drift-tube linac	November, 1996	Billen
5604352	Apparatus comprising voltage multiplication components	February, 1997	Schuetz
5608263	Micromachined self packaged circuits for high-frequency applications	March, 1997	Drayton et al.
5663971	Axial interaction free-electron laser	September, 1997	Carlsten
5666020	Field emission electron gun and method for fabricating the same	September, 1997	Takemura
5668368	Apparatus for suppressing electrification of sample in charged beam irradiation apparatus	September, 1997	Sakai et al.
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5737458	Optical light pipe and microwave waveguide interconnects in multichip modules formed using adaptive lithography	April, 1998	Wojnarowski et al.
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5767013	Method for forming interconnection in semiconductor pattern device	June, 1998	Park
5780970	Multi-stage depressed collector for small orbit gyrotrons	July, 1998	Singh et al.
5790585	Grating coupling free electron laser apparatus and method	August, 1998	Walsh
5811943	Hollow-beam microwave linear accelerator	September, 1998	Mishin et al.
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5821902	Folded dipole microstrip antenna	October, 1998	Keen
5825140	Radio-frequency type charged particle accelerator	October, 1998	Fujisawa
5831270	Magnetic deflectors and charged-particle-beam lithography systems incorporating same	November, 1998	Nakasuji
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6281769	Electromagnetic transmission line elements having a boundary between materials of high and low dielectric constants	August, 2001	Fiedziuszko
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6376258	Resonant bio-assay device and test system for detecting molecular binding events	April, 2002	Hefti
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6441298	Surface-plasmon enhanced photovoltaic device	August, 2002	Thio
6448850	Electromagnetic wave amplifier and electromagnetic wave generator	September, 2002	Yamada
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6504303	Optical magnetron for high efficiency production of optical radiation, and 1/2&lgr induced pi-mode operation	January, 2003	Small
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6552320	Image sensor structure	April, 2003	Pan
6577040	Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices	June, 2003	Nguyen
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6924920	Method of modulation and electron modulator for optical communication and data transmission	August, 2005	Zhilkov
6936981	Retarding electron beams in multiple electron beam pattern generation	August, 2005	Gesley
6943650	Electromagnetic band gap microwave filter	September, 2005	Ramprasad et al.
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WO/2007/081391	July, 2007			SELECTABLE FREQUENCY LIGHT EMITTER

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Souw, Bernard E.

Davidson Berquist Jackson & Gowdey LLP

The invention claimed is:

1. An oscillator, comprising: a source of charged particles for generating a beam of charged particles; a first electrode which selectively receives the beam of charged particles; a first deflector electrically coupled to the first electrode; and a charged particle removing circuit electrically connected to at least one of the first electrode and the first deflector and configured to remove charged particles from at least one of the first electrode and the first deflector at least when the first electrode is not receiving the beam of charged particles, wherein an accumulation of charge on the first electrode causes the beam of charged particles to be directed away from the first electrode by the first deflector.

2. The oscillator as claimed in claim 1, wherein the charged particles comprise electrons and the accumulation of charge on the first electrode is an accumulation of a negative charge.

3. The oscillator as claimed in claim 1, wherein the first deflector and the first electrode are on the same side of the beam of charged particles with reference to a direction of travel of the beam of charged particles.

4. The oscillator as claimed in claim 1, further comprising a focusing element for receiving the beam of charged particles when the beam of charged particles is not being received by the first electrode.

5. The oscillator as claimed in claim 1, further comprising: a second electrode; and a second deflector, wherein the first deflector and the first electrode are on the same side of the beam of charged particles with reference to a direction of travel of the beam of charged particles, and the second deflector and the second electrode are on a different side of the beam of charged particles with reference to the direction of travel of the beam of charged particles.

6. An oscillator, comprising: a source of charged particles for generating a beam of charged particles; and first and second electrodes disposed in a direction of travel of the beam of charged particles, wherein an accumulation of charge on the first electrode causes the beam of charged particles to be directed towards the second electrode and vice versa such that the beam of charged particles oscillates between the first and second electrodes; and a charged particle removing circuit electrically connected to at least one of the first and second electrodes and configured to remove charged particles from the at least one of the first and second electrodes when said beam of charged particles is not directed towards said at least one of the first and second electrodes.

7. The oscillator as claimed in claim 6, wherein the charged particles comprise electrons and the accumulation of charge on the first electrode is an accumulation of a negative charge.

8. The oscillator as claimed in claim 6, further comprising first and second deflectors interposed between the source of charged particles and the first and second electrodes, wherein the first deflector is coupled to the second electrode and the second deflector is connected to the first electrode, and wherein the accumulation of charge on the first electrode is an accumulation of a positive charge and causes an accumulation of positive charge on the second deflector.

9. The oscillator as claimed in claim 6, wherein the first and second electrodes are separated by a gap through which a portion of the beam of charged particles can periodically pass as the beam of charged particles oscillates.

10. The oscillator as claimed in claim 6, further comprising first and second deflectors interposed between the source of charged particles and the first and second electrodes, wherein the first deflector is coupled to the first electrode and the second deflector is connected to the second electrode, and wherein the accumulation of charge on the first electrode is an accumulation of a negative charge and causes an accumulation of negative charge on the first deflector.

CROSS-REFERENCE TO CO-PENDING APPLICATIONS

The present invention is related to the following co-pending U.S. patent applications: (1) U.S. patent application Ser. No. 11/238,991, entitled “Ultra-Small Resonating Charged Particle Beam Modulator,” and filed Sep. 30, 2005; (2) U.S. patent application Ser. No. 10/917,511, filed on Aug. 13, 2004, entitled “Patterning Thin Metal Film by Dry Reactive Ion Etching,”; (3) U.S. application Ser. No. 11/203,407, filed on Aug. 15, 2005, entitled “Method Of Patterning Ultra-Small Structures”; (4) U.S. application Ser. No. 11/243,476, entitled “Structures And Methods For Coupling Energy From An Electromagnetic Wave,” filed on Oct. 5, 2005; (5) U.S. application Ser. No. 11/243,477, entitled “Electron Beam Induced Resonance,” filed on Oct. 5, 2005, (6) U.S. application Ser. No. 11/411,130, entitled “Charged Particle Acceleration Apparatus and Method,” filed on Apr. 26, 2006, (6) U.S. application Ser. No. 11/411,129, entitled “Micro Free Electron Laser (FEL),” filed on Apr. 26, 2006, and (7) U.S. application Ser. No. 11/418,091, entitled “Light Emitting Resonant Structure Driving Raman Laser,” filed on May 5, 2006, all of which are commonly owned with the present application at the time of filing, and the entire contents of each of which are incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention is directed to an oscillating electron source, and in one embodiment to a charged particle beam that oscillates between plural electrodes. Such an oscillating beam may be used to drive other devices, such as a pulsed light source acting as an input to a Raman laser.

2. Discussion of the Background

It is possible to emit a beam of charged particles according to a number of known techniques. Electron beams are currently being used in semiconductor lithography operations, such as in U.S. Pat. No. 6,936,981. The abstract of that patent also discloses the use of a “beam retarding system generates a retarding electric potential about the electron beams to decrease the kinetic energy of the electron beams substantially near a substrate.”

An alternate charged particle source includes an ion beam. One such ion beam is a focused ion beam (FIB) as disclosed in U.S. Pat. No. 6,900,447 which discloses a method and system for milling. That patent discloses that “The positively biased final lens focuses both the high energy ion beam and the relatively low energy electron beam by functioning as an acceleration lens for the electrons and as a deceleration lens for the ions.” Col. 7, lines 23-27.

Free electron lasers are known. In at least one prior art free electron laser (FEL), very high velocity electrons and magnets are used to make the magnetic field oscillations appear to be very close together during radiation emission. However, the need for high velocity electrons is disadvantageous. U.S. Pat. No. 6,636,534 discloses a FEL and some of the background thereon.

Raman lasers are also known, such as in U.S. Pat. No. 6,901,084. Furthermore, considerable research efforts have been made to find ways to integrate Raman laser capabilities with traditional semiconductor processes using silicon. One such effort was detailed in Demonstration of a silicon Raman laser, by Boyraz and Jalai, as published in Vol. 12, No. 21, Optics Express, October 2004.

When an electron hits a surface, it knocks out other electrons known as secondary electrons. A material property is the secondary electron yield (SEY) which is (for a given energy) the number of secondary electrons released per primary electron absorbed. Materials with SEY<1 tend to charge negatively; those materials with SEY>1 tend to charge positively.

SUMMARY OF THE INVENTION

According to one aspect of the disclosure, an oscillating source of charged particles is described which may be used to cause a beam of charged particles (e.g., an electron beam) to oscillate. In one such embodiment, a pair of opposing electrodes receive the beam of charged particles at varying times based on an amount of accumulated charge on the electrodes.

BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the present invention, and the advantages thereof, reference is now made to the following descriptions taken in conjunction with the accompanying drawings, in which:

FIG. 1 is a top-view, high-level conceptual representation of a charged particle moving through a series of alternating electric fields according to a first embodiment of the present invention;

FIG. 2 is a top-view, high-level conceptual representation of a charged particle accelerating while being influenced by at least one field of a series of alternating electric fields according to a second embodiment of the present invention;

FIG. 3 is a top-view, high-level conceptual representation of a charged particle decelerating while being influenced by at least one field of a series of alternating electric fields according to a second embodiment of the present invention;

FIG. 4 is a perspective-view, high-level conceptual representation of a charged particle moving through a series of alternating electric fields produced by a resonant structure;

FIGS. 5A-5C are the outputs of a computer simulation showing trajectories and accelerations of model devices using potentials of +/−100V, +/−200V, and +/−300V, respectively;

FIG. 6 is a top-view, high-level conceptual representation of a charged particle moving through a series of alternating electric fields according to a first embodiment of the present invention such that photons are emitted in phase with each other;

FIG. 7 is a top-view, high-level conceptual representation of a charged particle moving through a series of alternating electric fields according to a second embodiment of the present invention that includes a focusing element;

FIG. 8 is a top-view, high-level conceptual representation of a charged particle moving through a series of alternating electric fields according to a third embodiment of the present invention that includes a pre-bunching element;

FIGS. 9A through 9H are exemplary resonant structures acting as pre-bunching elements;

FIG. 10 is a top-level diagram of a Raman laser for producing coherent laser-light from a substantially coherent light source according to the present invention;

FIGS. 11 a and 11 b represent a pair of electrodes between which a charged particle beam oscillates;

FIGS. 12 a - 12 c represent a pair of electrodes and corresponding cross-coupled deflectors for causing a charged particle beam to oscillate between the pair of electrodes and to periodically emit charged particle from between the electrodes;

FIGS. 13 a - 13 c represent alternate pairs of electrodes between which a charged particle beam oscillates;

FIG. 13 d represents a perspective view of an embodiment of electrodes that include segments of varying heights;

FIGS. 14 a and 14 b represent a single electrode forming a pulsed charged particle beam, without and with a focusing element, respectively;

FIG. 14 c represents a single electrode forming a pulsed charged particle beam in combination with a focusing element;

FIG. 15 a represents a pairs of electrodes between which a charged particle beam oscillates where the oscillating beam causes at least one resonant structure to periodically resonate;

FIGS. 15 b - 15 d represent an electrode which causes a charged particle beam to oscillate such that at least one resonant structure periodically resonates;

FIGS. 16 a and 16 b represent additional exemplary designs of electrodes.

DISCUSSION OF THE PREFERRED EMBODIMENTS

Turning now to the drawings, FIG. 1 is a high-level conceptual representation of a charged particle moving through a series of alternating electric fields according to a first embodiment of the present invention. As shown therein, a charged particle beam 100 including charged particles 110 (e.g., electrons) is generated from a charged particle source 120 . The charged particle beam 100 can include ions (positive or negative), electrons, protons and the like. The beam may be produced by any source, including, e.g., without limitation an ion gun, a thermionic filament (e.g., a tungsten filament), a cathode, a planar vacuum triode, an electron-impact ionizer, a laser ionizer, a chemical ionizer, a thermal ionizer, an ion-impact ionizer.

As the beam 100 is projected, it passes between plural alternating electric fields 130 p and 130 n. As used herein, the phrase “positive electric field” 130 p should be understood to mean an electric field that exerts an attractive force on a negatively charged particle, and the phrase “negative electric field” 130 n should be understood to mean an electric field that exerts an attractive force on a positively charged particle. In this first embodiment, the electric fields 130 p and 130 n alternate not only on the same side but across from each other as well. That is, each positive electric field 130 p is surrounded by a negative electric field 130 n on three sides. Likewise, each negative electric field 130 n is surrounded by a positive field 130 p on three sides. In the illustrated embodiment, the charged particles 110 are electrons which are attracted to the positive electric fields 130 p and repelled by the negative electric fields 130 n. The attraction of the charged particles 110 to their oppositely charged fields 130 p or 130 n accelerates the charged particles 110 (mostly) transversely to their axial velocity.

The series of alternating fields creates an oscillating path in the directions of top to bottom of FIG. 1 and as indicated by the legend “velocity modulation direction.” In such a case, the velocity modulation direction is generally perpendicular to the direction of motion of the beam 100 .

The charged particle source 120 may also optionally include one or more electrically biased electrodes 140 (e.g., (a) grounding electrodes or (b) positively biased electrodes) which help to keep the charged particles (e.g., (a) electrons or negatively charged ions or (b) positively charged ions) on the desired path.

In the alternate embodiments illustrated in FIGS. 2 and 3, various elements from FIG. 1 have been repeated, and their reference numerals are repeated in FIGS. 2 and 3. However, the order of the electric fields 130 p and 130 n below the path of the charged particle beam 100 has been changed. In FIGS. 2 and 3, while the electric fields 130 n and 130 p are still alternating on the same side, they are now of opposing direction on opposite sides of the beam 100 , allowing for minimal net force on the charged particles 110 perpendicular to the beam 100 . There is, though, a force of oscillatory character acting on the charged particles 100 in the direction of the beam 100 . Thus, in the case of an electron acting as a charged particle 110 , the electron 110 a in FIG. 2 is an accelerating electron that is being accelerated by being repelled from the negative fields 130 n ₂ while being attracted to the next positive fields 130 p ₃ in the direction of motion of the beam 100 . (The direction of acceleration is shown below the accelerating electron 110 a .)

Conversely, as shown in FIG. 3, in the case of an electron acting as a charged particle 110 , the electron 110 d in FIG. 2 is a decelerating electron that is being decelerated (i.e., negatively accelerated) as it approaches the negative fields 130 n ₄ while still being attracted to the previous positive fields 130 p ₃ . The direction of acceleration is shown below the decelerating electron 100 d. Moreover, both FIGS. 2 and 3 include the legend “velocity modulation direction” showing the direction of the velocity changes. In such cases, the velocity modulation direction is generally parallel to the direction of motion of the beam 100 . It should be understood, however, that the direction of the electron does not change, only that its velocity increases and decreases along the axial path.

By varying the order and strength of the electric fields 130 n and 130 p, a variety of magnitudes of acceleration can be achieved allowing for attenuation of the motion of the charged particles 110 . As should be understood from the disclosure, the strengths of adjacent electric fields, fields on the same side of the beam 100 and fields on opposite sides of the beam 100 need not be the same strength. Moreover, the strengths of the fields and the directions of the fields need not be fixed either but may instead vary with time. The fields 130 n and 130 p may even be created by applying a electromagnetic wave to a resonant structure, described in greater detail below.

The electric fields utilized by the present invention can be created by any known method which allows sufficiently fine-tuned control over the paths of the charged particles so that they stay within their intended path boundaries.

According to one aspect of the present invention, the electric fields can be generated using at least one resonant structure where the resonant structure resonates at a frequency above a microwave frequency. Resonant structures include resonant structures shown in or constructed by the teachings of the above-identified co-pending applications. In particular, the structures and methods of U.S. application Ser. No. 11/243,477, entitled “Electron Beam Induced Resonance,” filed on Oct. 5, 2005, can be utilized to create electric fields 130 for use in the present invention.

FIG. 4 is a perspective-view, high-level conceptual representation of a charged particle moving through a series of alternating electric fields produced by a resonant structure (RS) 402 (e.g., a microwave resonant structure or an optical resonant structure). An electromagnetic wave 406 (also denoted E) incident to a surface 404 of the RS 402 transfers energy to the RS 402 , which generates a varying field 407 . In the exemplary embodiment shown in FIG. 4, a gap 410 formed by ledge portions 412 can act as an intensifier. The varying field 407 is shown across the gap 410 with the electric and magnetic field components (denoted {right arrow over (E)} and {right arrow over (B)}) generally along the X and Y axes of the coordinate system, respectively. Since a portion of the varying field can be intensified across the gap 410 , the ledge portions 412 can be sized during fabrication to provide a particular magnitude or wavelength of the varying field 407 .

A charged particle source 414 (such as the source 120 described with reference to FIGS. 1-3) targets a beam 416 (such as a beam 100 ) of charged particles (e.g., electrons) along a straight path 420 through an opening 422 on a sidewall 424 of the device 400 . The charged particles travel through a space 426 within the gap 410 . Upon interaction with the varying field 426 , the charged particles are shown angularly modulated from the straight path 420 . Generally, the charged particles travel on an oscillating path 428 within the gap 410 . After passing through the gap 410 , the charged particles are angularly modulated on a new path 430 . An angle β illustrates the deviation between the new path 430 and the straight path 420 .

As would be appreciated by one of ordinary skill in the art, a number of resonant structures 402 can be repeated to provide additional electric -fields for influencing the charged particles of the beam 416 . Alternatively, the direction of the oscillation can be changed by turning the resonant structure 402 on its side onto surface 404 .

FIGS. 5A-5C are outputs of computer simulations showing trajectories and accelerations of model devices according to the present invention. The outputs illustrate three exemplary paths, labeled “B”, “T” and “C” for bottom, top and center, respectively. As shown on FIG. 1, these correspond to charged particles passing through the bottom, top and center, respectively, of the opening between the electrodes 140 . Since the curves for B, T and C cross in various locations, the graphs are labeled in various locations. As can be seen in FIG. 5A, the calculations show accelerations of about 0.5×10 ¹¹ mm/μS ² for electrons with 1 keV of energy passing through a potential of +/−100 volts when passing through the center of the electrodes. FIG. 5B shows accelerations of about 1.0 ×10 ¹¹ mm/μS ² for electrons with 1 keV of energy passing through a potential of +/−200 volts when passing through the center of the electrodes. FIG. 5C shows accelerations of about 1.0-3.0×10 ¹¹ mm/μS ² for electrons with 1 keV of energy passing through a potential of +/−300 volts when passing through the center of the electrodes.

Utilizing the alternating electric fields of the present invention, the oscillating charged particles emit photons to achieve a radiation emitting device. Such photons can be used to provide radiation outside the device or to provide radiation for use internally as well. Moreover, the amount of radiation emitted can be used as part of a measurement device. It is also possible to construct the electrode of such a size and spacing that they resonate at or near the frequency that is being generated. This effect can be used to enhance the applied fields in the frequency range that the device emits.

Turning to FIG. 6, the structure of FIG. 1 has been supplemented with the addition of photons 600 a - 600 c. In the illustrated embodiment, the electric fields 130 p and 130 n are selected such that the charged particles 110 are forced into an oscillating trajectory at (or nearly at) an integral multiple of the emitted wavelength. Using such a controlled oscillation, the electromagnetic radiation emitted at the maxima and minima of the oscillation constructively interferes with the emission at the next minimum or maximum. As can be seen, for example at 610 , the photon emissions are in phase with each other. This produces a coherent radiation source that can be used in laser applications such as communications systems using optical switching.

In light of the variation in paths that a charged particle can undergo based on its initial path between electrodes 140 , in a second embodiment of a coherent radiation source, as in FIG. 7, a focusing element 700 is added in close proximity to the electrodes 140 . The focusing element 700 , while illustrated as being placed before the electrodes 140 may instead be placed after. In such a configuration, additional charged particles may traverse a center path between the fields and undergo constructive interference.

In a third embodiment of a coherent light source, as in FIG. 8, a pre-bunching element 800 is added which helps to control the inter-arrival time between charged particles, and therefore aid in the production of coherent Electromagnetic Radiation (EMR). One possible configuration of a pre-bunching element 800 is a resonant structure such as is described in U.S. application Ser. No. 11/410,924, entitled “Selectable Frequency EMR Emitter,” filed on Apr. 26, 2006 and incorporated herein by reference. However, exemplary resonant structures are shown in FIGS. 9A-9H. As shown in FIG. 9A, a resonant structure 910 may comprise a series of fingers 915 which are separated by a spacing 920 measured as the beginning of one finger 915 to the beginning of an adjacent finger 915 . The finger 915 has a thickness that takes up a portion of the spacing between fingers 915 . The fingers also have a length 925 and a height (not shown). As illustrated, the fingers 915 of FIG. 9A are perpendicular to the beam 100 .

Resonant structures 910 are fabricated from resonating material [e.g., from a conductor such as metal (e.g., silver, gold, aluminum and platinum or from an alloy) or from any other material that resonates in the presence of a charged particle beam]. Other exemplary resonating materials include carbon nanotubes and high temperature superconductors.

Any of the various resonant structures can be constructed in multiple layers of resonating materials but are preferably constructed in a single layer of resonating material (as described above). In one single layer embodiment, all of the parts of a resonant structure 910 are etched or otherwise shaped in the same processing step. In one multi-layer embodiment, resonant structures 910 of the same resonant frequency are etched or otherwise shaped in the same processing step. In yet another multi-layer embodiment, all resonant structures having segments of the same height are etched or otherwise shaped in the same processing step. In yet another embodiment, all of the resonant structures on a single substrate are etched or otherwise shaped in the same processing step.

The material need not even be a contiguous layer, but can be sub-parts of the resonant structures individually present on a substrate. The materials making up the sub-parts of the resonant structures can be produced by a variety of methods, such as by pulsed-plating, depositing, sputtering or etching. Preferred methods for doing so are described in co-pending U.S. application Ser. No. 10/917,571, filed on Aug. 13, 2004, entitled “Patterning Thin Metal Film by Dry Reactive Ion Etching,” and in U.S. application Ser. No. 11/203,407, filed on Aug. 15, 2005, entitled “Method Of Patterning Ultra-Small Structures,” both of which are commonly owned at the time of filing, and the entire contents of each of which are incorporated herein by reference.

At least in the case of silver, etching does not need to remove the material between segments or posts all the way down to the substrate level, nor does the plating have to place the posts directly on the bare substrate. Silver posts can be on a silver layer on top of the substrate. In fact, we discovered that due to various coupling effects, better results are obtained when the silver posts are set on a silver layer that is deposited on the substrate.

As shown in FIG. 9B, the fingers of the resonant structure 910 can be supplemented with a backbone. The backbone 912 connects the various fingers 915 of the resonant structure 910 forming a comb-like shape. Typically, the backbone 912 would be made of the same material as the rest of the resonant structure 910 , but alternative materials may be used. In addition, the backbone 912 may be formed in the same layer or a different layer than the fingers 915 . The backbone 912 may also be formed in the same processing step or in a different processing step than the fingers 915 . While the remaining figures do not show the use of a backbone 912 , it should be appreciated that all other resonant structures described herein can be fabricated with a backbone also.

The shape of the fingers 915 (or posts) may also be shapes other than rectangles, such as simple shapes (e.g., circles, ovals, arcs and squares), complex shapes [e.g., semi-circles, angled fingers, serpentine structures and embedded structures (i.e., structures with a smaller geometry within a larger geometry, thereby creating more complex resonances)] and those including waveguides or complex cavities. The finger structures of all the various shapes will be collectively referred to herein as “segments.” Other exemplary shapes are shown in FIGS. 9C-9H, again with respect to a path of a beam 100 . As can be seen at least from FIG. 9C, the axis of symmetry of the segments need not be perpendicular to the path of the beam 100 .

Exemplary dimensions for resonant structures include, but are not limited to:

• • (a) period ( 920 ) of segments: 150-220 nm;
  • (b) segment thickness: 75-110 nm;
  • (c) height of segments: 250-400 nm;
  • (d) length ( 925 ) of segments: 60-180 nm; and
  • (e) number of segments in a row: 200-300.

While the above description has been made in terms of structures for achieving the acceleration of charged particles, the present invention also encompasses methods of accelerating charged particles generally. Such a method includes: generating a beam of charged particles; providing a series of alternating electric fields along an intended path; and transmitting the beam of charged particles along the intended path through the alternating electric fields.

The resonant structures producing coherent light described above can be laid out in rows, columns, arrays or other configurations such that the intensity of the resulting EMR is increased.

The coherent EMR produced may additionally be used as an input to additional devices. For example, the EMR may be used as an input to a light amplifier such as a Raman laser. As shown in FIG. 10, a Raman laser 1000 receives substantially coherent light at an input 1010 and outputs a laser signal at an output 1020 . The Raman laser may be made from any Raman medium and is preferably made of a medium that integrates with the fabrication of the EMR source.

By integrating the coherent EMR sources described above with Raman laser elements that can be similarly integrated into a semiconductor process, the combined switching devices can enjoy a high degree of integration. However, the Raman laser elements may be fabricated in a different integrated circuit than the source of the coherent EMR. The optical switching element may form part of a micro-electro-mechanical system (MEMS), or may be part of a multi-chip module which is combined with a coherent EMR source.

In addition to using coherent EMR from the above structures using a pre-bunching element and alternating electric fields, it is also possible to utilize substantially coherent EMR emitted directly from a resonant structure that is caused to resonate by passing a beam of charged particles in close enough proximity to the resonant structure. The frequency of the EMR can be controlled by properly selecting the dimensions of the resonant structure, such as is described in U.S. application Ser. No. 11/410,924, entitled “Selectable Frequency EMR Emitter,” filed on Apr. 26, 2006.

When using the resonant structures or the series of alternating fields, electromagnetic radiation at frequencies other than a desired frequency may be produced. Accordingly, one or more filters may be placed between the source of the substantially coherent light (e.g., either the resonant structures or the series of alternating fields) and the input to the Raman laser. This removes the unwanted frequencies so that the filtered light can better excite the Raman laser.

The resulting Raman laser can then be used in any existing environment that Raman lasers have been used in previously. Exemplary uses include telecommunications systems using laser-based signals carried over fiber-optic cables.

As shown in FIG. 11 a, a beam of charged particles 1100 (e.g., an electron beam) from a charged particle source 1110 can be selectively applied to a pair of electrodes 1120 a and 1120 b. In the configuration illustrated in FIG. 11 a, the charged particles are electrons (with negative charges) that are directed toward a first electrode 1120 a because the second electrode 1120 b is illustrated as initially negatively charged. For illustrative purposes, the material of the electrodes is assumed to have a secondary electron yield (SEY)<1. Thus, the electrodes accumulate negatively charged particles when being struck by the electron beam. The electrodes 1120 a and 1120 b are connected via circuits 1130 a and 1130 b to ground which enable accumulated charge to be bled off. The circuits 1130 a and 1130 b may include any one or a combination of circuit elements, e.g., resistors, conductors, capacitors, inductors, diodes, triodes, and vacuum-based structures. The circuits 1130 a and 1130 b also need not be the same (e.g., they may have different resistances, capacitances, etc.).

As shown in FIG. 11 b, after the first electrode 1120 a has been struck for a period of time by the incoming beam, the first electrode 1120 a accumulates a sufficient amount of charge to have a stronger repelling force than the second electrode 1120 b. At that point, the beam 1100 is deflected towards the second electrode 1120 b , and the second electrode 1120 b begins to accumulate charge. When the second electrode 1120 b has accumulated a sufficient amount of charge to have a stronger repelling force than the first electrode, then the beam will again be deflected towards the first electrode 1120 a . This oscillation will continue and produce a time-varying charged particle beam.

In the embodiment shown in FIGS. 12 a - 12 c, the electrodes of FIGS. 11 a and 11 b have been separated by a distance sufficient to allow charged particles to pass between them, as shown by the solid line in FIG. 12 b. In addition, the electrodes 1120 a/b therein are constructed from a material with a SEY>1, and a pair of deflectors 1200 a/b are added that are electrically connected to the electrodes. (The corresponding circuits 1130 a and 1130 b have been omitted from FIGS. 12 a - 12 c for clarity.) The deflectors 1200 a/b are cross-coupled to the electrodes 1120 a/b so that a loss of electrons on the electrode of one side of the beam corresponds to a loss of electrons on the deflector of the opposite side.

As shown in the remaining figures, a dashed line representing the beam is used to indicate any of the possible paths which cause the beam to strike one of the electrodes. A solid line represents any of the possible paths which cause the beam not to strike one of the electrodes.

As shown in FIG. 12 a, as an electron beam impacts the first electrode 1120 a , electrons are released from first electrode 1120 a (potentially with some depositing on the surface of second electrode 1120 b ). This increases the positive attraction for the electrons on both the first electrode 1120 a and on the deflector 1200 a. In the illustrated embodiment, the electrode 1120 a is placed in a straight line with the source 1110 such that when there is no deflection the beam begins in a known location. However, it is possible to place the opening between the electrodes 1120 a and 1120 b in line with the source 1110 such that the beam goes through the opening when there is no deflection.

As electrons continue to be freed, based on the relative positions of the deflectors and the electrodes, the attraction of the beam to a deflector (e.g., 1200 a ) eventually overcomes the attraction of beam toward the opposite electrode (e.g., 1120 a ) such that the beam 1100 momentarily passes by a position in between the electrodes 1120 a and 1120 b , such that the beam of charged particles 1100 exits from between the electrodes 1120 a and 1120 b (i.e., the beam of charged particles passing along segment 1220 ), as shown in FIG. 12 b.

Then, because of the accumulation of charge on the deflector 1200 a , the beam continues to be attracted towards the deflector 1200 a and towards the electrode 1120 b . Thus, the beam begins to strike the electrode 1120 b , as shown in FIG. 12 c. The electrons on the electrode 1120 b then begin to become depleted, as occurred with respect to electrode 1120 a. The beam then momentarily again exits between the electrodes until it is later attracted to the first electrode again.

As shown in FIG. 13 a, in an alternate embodiment, electrodes 1120 a and 1120 b are formed with integrated deflectors on the same side as the rest of the corresponding electrode. Initially, in the illustrated embodiment, when there is no deflection caused by (a lack of charge on) the integrated deflectors, the beam contacts a first side (e.g., 1120 a ). As charge accumulates on a first side (e.g., 1120 a ), it causes the accumulated charge on the integrated deflector to repel the beam toward the second side (e.g., toward electrode 1120 b ). As with FIG. 12 b above and as represented by the solid line, there is a short period of time during which the beam no longer hits the first electrode and instead exits between the electrodes 1120 a/b before beginning to strike the second side. Later, as charge has accumulated on the second side (e.g., 1120 b ) for a sufficient period of time, and as previously accumulated charge has dissipated through the circuit (e.g., 1130 a ) on the first side, the beam again exits from between the electrodes 1120 a/b before being deflected toward the first side. Thus, the alternating attraction causes the beam to exit from between the electrodes in a regular or nearly-regular cycle.

Alternatively, as shown in FIG. 13 b, other shapes of electrodes can be used without departing from the teachings herein. Furthermore, as shown in FIG. 13 c, the electrodes can be supplemented with charge collecting structures 1370 that are configured to reduce the number of charged particles, released from the surface of a first electrode, that reach the second electrode, and vice versa.

As shown in FIG. 13 d, the heights of the various segments that make up the electrode (and integrated deflector) need not be all the same. Instead, a portion of the electrode (such as the charge collecting structure 1370 ) may have a first height but be connected to a second segment (e.g., 1385 ) which has minimal height (e.g., just enough to act as an electrical conduit between the collecting structure 1370 and the sidewall 1390 of the electrode). The electrode may further have another segment of minimal height (or reduced height compared to the charge collecting structure 1370 and/or the sidewall 1390 ) which connects to the deflector 1200 . Alternatively, the sidewall may be a different height than the collecting structure 1370 , such as larger or smaller (e.g., approximately the same size as the segments 1385 ). For segments 1385 , an additional shielding may be used above those segments (or portions of those segments) to reduce the deflection effect of the segments on the beam.

The configuration of structures such as shown in FIGS. 13 a - 13 c can be modified as shown in FIGS. 14 a - 14 c. In the embodiment of FIG. 14 a, one of the two electrodes used in FIGS. 13 a - 13 c is removed, and the oscillator instead relies on the circuit 1130 to remove charge after the beam no longer strikes the electrode 1120 , but without the help of an opposite electrode or deflector. This reduces the complexity of the oscillator. In the embodiment of FIG. 14 b, a charge collecting structure 1370 has been included to help control the spread of charges released from the surface of the electrode 1120 .

In the alternate structure illustrated in FIG. 14 c, a focusing element 1400 has been added to the oscillator to direct the beam when the beam no longer hits the electrode 1120 . This improves the consistency of the path taken by the beam when the beam no longer hits the electrode 1120 .

In an alternate structure, as shown in FIG. 15 a, one or more resonant structures 1500 can be placed such that the charged particle beam causes at least one of the resonant structures 1500 to resonate when the beam is at a given deflection (which is intended to include a range of possible deflections). For example, as shown, two resonant structures 1500 are placed such that when the beam is at or near a maximum deflection the resonant structures 1500 are caused to resonate.

As shown in FIG. 15 b, the resonant structures 1500 need not be used in pairs. Instead, a single electrode 1120 can be used (e.g., with an integrated deflector). As a sufficient amount of charge accumulates on the electrode 1120 , the beam is deflected away from the resonant structure a distance sufficient to cause the beam to no longer contact the electrode 1120 . (The beam may then be caught in a device such as a Faraday cup or may be allowed to continue on to act as a beam for another device, as is described in more detail below.) When the circuit 1130 has drained off the accumulated charge on the electrode 1120 sufficiently, the beam is less deflected such that the beam again induces resonance in the resonant structure 1500 .

In yet another embodiment illustrated in FIG. 15 c, the structure of FIG. 15 b is supplemented with a detector 1540 and a control line 1550 that couples to the circuit 1130 . In this configuration, when the detector 1540 detects that the beam has been deflected away from the electrode 1120 , the detector 1540 generates a control signal on the control line 1550 that causes the circuit 1130 to alter the rate at which the accumulated charge on the electrode 1120 is removed. The control signal may cause a greater or lower rate of charge removal. For example, the circuit 1130 may drain very little charge while the detector 1540 does not detect the beam, but the circuit 1130 may have a high drain rate when the detector 1540 does detect the beam.

As shown in FIG. 15 d, it is also possible to use multiple detectors 1540 or a detector 1540 that detects the presence of the beam in multiple locations. In such a configuration, plural control lines 1550 can provide control signals to the circuit 1130 to enable the circuit 1130 to perform deflection-specific control of the rate of charge drain.

Additional exemplary shapes for electrodes 1120 are shown in FIGS. 16 a and 16 b. Such designs may aid in the reabsorption of charged particles on the surface of the electrode 1120 when the surface of the electrode 1120 is hit by the charged particle beam.

On use of a beam that exists between electrodes 1120 a/b is to create a pulsed charged-particle beam can be used to excite one of the resonant structures described above or can be used as a pre-bunching element 800 . One possible use of such a pulsed charged-particle beam is as an input to a structure that produces coherent light to drive a Raman laser. By using the pulsed charged-particle beam, the Raman laser can be driven in a pulsed, as opposed to continuous, fashion.

As would be understood by one of ordinary skill in the art, the above exemplary embodiments are meant as examples only and not as limiting disclosures. Accordingly, there may be alternate embodiments other than those described above which nonetheless still fall within the scope of the pending claims.