Title:
ION CLEANING AND VAPOR DEPOSITION
United States Patent 3528387

Inventors:
Hamilton, Harold J.
Publication Date:
09/15/1970
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Assignee:
Singer, General Precision
Primary Class:
118/723VE
Other Classes:
204/298.360, 204/192.340
International Classes:
C23C14/02; C23C14/22; C23C14/24; C23C14/34; C23C14/58; C23G5/00; H01J37/305; H01J37/36; H01J37/32; C23C13/12




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