APPARATUS FOR THE SPUTTERING OF MATERIALS
United States Patent 3516919
US Patent References:
Triode sputtering apparatus for depositing uniform coatings
- - 3305473
Deposition of insulating films by cathode sputtering in an rf-supported discharge
- - 3287243
Growth of solid layers on substrates which are kept under ion bombardment before and during deposition
- - 3021271
Coating by cathode disintegration
- - 2146025
Cathodic sputtering apparatus including thermionic means for increasing sputtering efficiency
- - 3369990
Triode sputtering apparatus for depositing uniform coatings
- - 3305473
Deposition of insulating films by cathode sputtering in an rf-supported discharge
- - 3287243
Growth of solid layers on substrates which are kept under ion bombardment before and during deposition
- - 3021271
Coating by cathode disintegration
- - 2146025
Cathodic sputtering apparatus including thermionic means for increasing sputtering efficiency
- - 3369990
Inventors:
Gaydou, Francois
Jenne, Rudolf
Jenne, Rudolf
Publication Date:
06/23/1970
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Export Citation:
Assignee:
BENDIX CORP
Primary Class:
Other Classes:
204/298.160
International Classes:
B65D50/04; C23C14/34; C23C14/35; H01B1/00; H01J37/32; H01J37/34; B65D50/00; C23C15/00