METHOD OF FORMING SINGLE CRYSTAL FILMS BY NONEPITAXIAL GROWTH
United States Patent 3514320
US Patent References:
Vapor phase crystallization
- - 3121062
Method and apparatus for preparing single crystal thin films
- - 3348962
Manufacturing thin monocrystalline layers
- - 3385737
Vapor phase crystallization
- - 3121062
Method and apparatus for preparing single crystal thin films
- - 3348962
Manufacturing thin monocrystalline layers
- - 3385737
Inventors:
Vaughan, William H.
Publication Date:
05/26/1970
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Assignee:
William, Vaughan H.
Primary Class:
Other Classes:
65/33.500, 117/108, 117/928, 117/940, 117/935, 148/DIG.152, 117/936, 117/944, 148/DIG.122, 117/105, 148/DIG.169, 117/106, 117/943, 117/950, 148/DIG.150
International Classes:
C30B23/02; B01J17/30; B44D1/02; C23C13/04
Foreign References:
| GB948997A |