PROCESS OF DOPING SEMICONDUCTOR WITH ANALYZING MAGNET
United States Patent 3496029
Inventors:
King, William J.
Solomon, Stanley J.
Publication Date:
02/17/1970
Assignee:
ION PHYSICS CORP
Other Classes:
438/57, 427/531, 250/492.100, 438/530, 427/523, 257/461, 257/653, 250/492.200, 136/290
International Classes:
H01J29/84; H01J37/317; H01L21/00; H01L31/00; H01J29/00; H01L7/54; H01L15/02
US Patent References:
| 2860251 | Apparatus for manufacturing semi-conductor devices | | | |
| 2949498 | Solar energy converter | | | |
| 2993945 | Solar cell and method of making | | | |
| 3081370 | Solar cells | | | |
| 3131300 | Apparatus for reducing energy variations of a van de graaff ion beam | | | |
| 3135863 | Magnetic deflection system providing plural exit ports for a beam of charged particles | | | |
| 3206336 | Method of transforming n-type semiconductor material into p-type semiconductor material | | | |
| 3294583 | Process of coating a silicon semiconductor with indium using an ion beam | | | |
| 3322575 | Graded energy gap photoelectromagnetic cell | | | |