Title:
SPIN-COATING MACHINE
United States Patent 3494326

Inventors:
Upton, Lee O.
Publication Date:
02/10/1970
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Assignee:
AMERICAN OPTICAL CORP
Primary Class:
118/50
Other Classes:
118/52
International Classes:
C03C17/00; C23C13/08; B05C11/12
US Patent References:
3145120Method for controlling flux pressure during a sintering process
3272199Process and assembly for enclosing a volume
3426727VACUUM WHIRLER FOR APPLYING THIN AND UNIFORM COATING OF AN EMULSION ON A WAFER
Foreign References:
FR896708A
DE575716C




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