SPUTTERING OF MATERIAL SIMULTANEOUSLY EVAPORATED ONTO THE TARGET
United States Patent 3492215
US Patent References:
Triode sputtering apparatus for depositing uniform coatings
- - 3305473
Growth of solid layers on substrates which are kept under ion bombardment before and during deposition
- - 3021271
Method of coating articles by vaporized coating materials
- - 2157478
Electron discharge device for electronically bombarding materials
- - 2103623
Triode sputtering apparatus for depositing uniform coatings
- - 3305473
Growth of solid layers on substrates which are kept under ion bombardment before and during deposition
- - 3021271
Method of coating articles by vaporized coating materials
- - 2157478
Electron discharge device for electronically bombarding materials
- - 2103623
Inventors:
Conant, Louis A.
Publication Date:
01/27/1970
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Export Citation:
Assignee:
BENDIX CORP
Primary Class:
Other Classes:
204/298.020, 204/298.060, 148/DIG.169, 148/DIG.065
International Classes:
C23C14/22; C23C14/34; H01J37/34; H05H1/00; H01J37/32; C23C15/00