PROCESS OF ETCHING BERYLLIUM
United States Patent 3488238
US Patent References:
Process of etching semiconductors and etchant solutions used therefor
- - 3107188
Process of etching semiconductors and etchant solutions used therefor
- - 3107188
Inventors:
Batiuk, Walter
Hallberg, Terry A.
Hallberg, Terry A.
Publication Date:
01/06/1970
View Patent Images:
Export Citation:
Assignee:
BOEING CO
Primary Class:
Other Classes:
252/79.200, 252/79.300
International Classes:
C23F1/30; C23G1/12; C23F1/10; C23G1/02; C23F1/00; C23F17/00