Title:
APPARATUS FOR CHEMICAL ADJUSTMENT OF FILM COMPONENTS
United States Patent 3481306
Inventors:
O'connell, James A.
Zaratkiewicz, Edwin A.
Curnan, Hugh J.
Publication Date:
12/02/1969
Export Citation:
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Assignee:
ITT
Primary Class:
118/665
Other Classes:
29/620, 427/101, 427/123, 427/125, 427/331
International Classes:
H01C17/26; H01C17/22; (IPC1-7): H01C17/00
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US Patent References:
3411203Electric field tailoring of thin film resistors
3362323Manufacturing apparatus of flat type film resistors
2978364Automatic control system for precision resistor manufacture
2545576Automatic control of evaporated metal film thickness




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