METHOD AND APPARATUS FOR FORMING DEPOSITS ON A SUBSTRATE BY CATHODE SPUTTERING USING A FOCUSSED ION BEAM
United States Patent 3472751
US Patent References:
Drilling by electrons
- - 2793281
Forming spherical bodies by electrons
- - 2793282
Drilling by electrons
- - 2793281
Forming spherical bodies by electrons
- - 2793282
Inventors:
King, William J.
Publication Date:
10/14/1969
View Patent Images:
Export Citation:
Assignee:
ION PHYSICS CORP
Primary Class:
Other Classes:
313/363.100, 204/298.040, 148/DIG.084
International Classes:
C23C14/46; H01J37/08; H01J37/34; H01J37/32; C23C15/00