STORAGE UNIT FOR WAFER-LIKE ARTICLES
United States Patent 3467242
Inventors:
Rousse, Dale E. DE.
Publication Date:
09/16/1969
Assignee:
Dale, Rousse E. DE.
Other Classes:
206/591, 206/509
International Classes:
B65D21/02; B65D25/10; B65D43/02; B65D81/05; H01L21/673; H01L21/67; B65D57/00; B65D85/58