Title:
DEPOSITION OF THIN FILMS
United States Patent 3463663

Inventors:
Chopra, Kasturi L.
Publication Date:
08/26/1969
View Patent Images:
Assignee:
KENNECOTT COPPER CORP
Primary Class:
Other Classes:
428/432, 428/324, 427/250, 428/433, 428/472
International Classes:
C23C14/24; C23C13/08; C23C13/02




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