Title:
DEPOSITION OF THIN FILMS
United States Patent 3463663
Inventors:
Chopra, Kasturi L.
Publication Date:
08/26/1969
Assignee:
KENNECOTT COPPER CORP
Other Classes:
428/432, 428/324, 427/250, 428/433, 428/472
International Classes:
C23C14/24; C23C13/08; C23C13/02