Title:
VACUUM WHIRLER FOR APPLYING THIN AND UNIFORM COATING OF AN EMULSION ON A WAFER
United States Patent 3426727
US Patent References:
/1198402.html
- - 1198402
/1209693.html
- - 1209693
Vacuum work holder
- - 2366935
Apparatus for preparing photoengraving plates
- - 2387349
Suction holding apparatus
- - 2512274
/1198402.html
- - 1198402
/1209693.html
- - 1209693
Vacuum work holder
- - 2366935
Apparatus for preparing photoengraving plates
- - 2387349
Suction holding apparatus
- - 2512274
Inventors:
Balain, Kanwal Singh
Singh, Inderjeet
Singh, Inderjeet
Publication Date:
02/11/1969
View Patent Images:
Export Citation:
Assignee:
COUNCIL SCIENT IND RES
Primary Class:
Other Classes:
118/500, 279/3
International Classes:
G03F7/16; H01L21/00; B05C9/02; B05C11/14; B05C5/00
US Patent References:
| 2941499 | Production of lithographic printing plates |
Foreign References:
| FR659499A | ||||
| GB536858A |