Title:
METHOD OF ETCHING SIC
United States Patent 3421956

Inventors:
Ebert, Ekkehard
Spielmann, Werner
Publication Date:
01/14/1969
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Assignee:
IBM
Primary Class:
438/691
Other Classes:
257/E21.060, 438/745, 252/79.100
International Classes:
C04B41/53; H01L21/04; H01L21/02; C23F1/00; H01L7/62
Other References:
None




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