CATHODE SPUTTERING APPARATUS FOR PRODUCING PLURAL COATINGS IN A CONFINED HIGH FREQUENCY GENERATED DISCHARGE
United States Patent 3420767
US Patent References:
Coating by cathode disintegration
- - 2146025
Apparatus for coating articles by cathode sputtering
- - 3250694
Deposition of insulating films by cathode sputtering in an rf-supported discharge
- - 3287243
Apparatus for cathode sputtering including a plasmaconfining chamber
- - 3291715
Sputtering of metals wherein gas flow is confined to increase the purity of deposition
- - 3296115
Coating by cathode disintegration
- - 2146025
Apparatus for coating articles by cathode sputtering
- - 3250694
Deposition of insulating films by cathode sputtering in an rf-supported discharge
- - 3287243
Apparatus for cathode sputtering including a plasmaconfining chamber
- - 3291715
Sputtering of metals wherein gas flow is confined to increase the purity of deposition
- - 3296115
Inventors:
Carlson, Willis J.
Publication Date:
01/07/1969
View Patent Images:
Export Citation:
Assignee:
CONTROL DATA CORP
Primary Class:
Other Classes:
204/192.120
International Classes:
C23C14/34; H01J37/34; H01J37/32; C23C15/00