Title:
Method of depositing films of controlled specific resistivity and temperature coefficient of resistance using cathode sputtering
United States Patent 3395089
US Patent References:
Coating of articles by means of cathode disintegration
- - 2239642
Method for the fabrication of tantalum film resistors
- - 3258413
Deposition of thin film by sputtering
- - 3278407
Coating of articles by means of cathode disintegration
- - 2239642
Method for the fabrication of tantalum film resistors
- - 3258413
Deposition of thin film by sputtering
- - 3278407
Inventors:
Mayer, Edward H.
Moore, Robert J.
Moore, Robert J.
Publication Date:
07/30/1968
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Export Citation:
Assignee:
BELL TELEPHONE LABOR INC
Primary Class:
Other Classes:
29/620, 204/192.150, 159/6.200
International Classes:
C23C14/34; C23C14/54; H01J37/34; H01J37/32