Title:
Method and reagent for surface polishing
United States Patent 3385682
Publication Date:
05/28/1968
Assignee:
SPRAGUE ELECTRIC CO
Other Classes:
257/E21.230, 106/3, 252/79.100, 51/307, 51/293
International Classes:
H01L21/306; H01L21/02
US Patent References:
| 3158517 | Process for forming recesses in semiconductor bodies | | | |
| 3228816 | Process and composition for cleaning and polishing aluminum and its alloys | | | |
| 3248235 | Anti-tarnish composition for coppercontaining surfaces | | | |