Title:
Method and reagent for surface polishing
United States Patent 3385682

Inventors:
Jack, Lowen
Publication Date:
05/28/1968
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Assignee:
SPRAGUE ELECTRIC CO
Primary Class:
Other Classes:
257/E21.230, 106/3, 252/79.100, 51/307, 51/293
International Classes:
H01L21/306; H01L21/02
US Patent References:
3158517Process for forming recesses in semiconductor bodies
3228816Process and composition for cleaning and polishing aluminum and its alloys
3248235Anti-tarnish composition for coppercontaining surfaces