Title:
Device for manufacturing epitaxial crystals
United States Patent 3381114
US Patent References:
/0563032.html
- - 0563032

Electric furnace
- - 1638857

Electrical heating
- - 1988845

Control means for industrial heattreating furnaces
- - 2282226

Electric heater
- - 2596327


Inventors:
Sho, Nakanuma
Publication Date:
04/30/1968
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Assignee:
NIPPON ELECTRIC CO
Primary Class:
219/385
Other Classes:
219/538, 118/725, 338/293, 392/416, 219/552, 392/418, 338/217
International Classes:
C30B25/14; H05B3/62
US Patent References:
3146123Method for producing pure silicon
3151006Use of a highly pure semiconductor carrier material in a vapor deposition process
3208888Process of producing an electronic semiconductor device
3222217Method for producing highly pure rodshaped semiconductor crystals and apparatus
Foreign References:
GB361960A
GB425232A
CH256198A