Title:
Article handling and cleaning apparatus
United States Patent 3375834
Inventors:
Best, Howard S.
Bowser, Robert E.
Publication Date:
04/02/1968
Assignee:
CORNING GLASS WORKS
Other Classes:
134/200, 206/5, 134/902, 134/199, 134/155
International Classes:
H01L21/00; H01L21/673; H01L21/67