Cryosorption vacuum pumping system
United States Patent 3371499

Inventors:
Hagenbach, Gerard F.
Domingo, Cheng
Publication Date:
03/05/1968
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Assignee:
UNION CARBIDE CORP
Primary Class:
62/55.500
Other Classes:
62/269
International Classes:
F04B37/08; F25D31/00; H01J9/38; F04B37/00