Piezoelectric pump
United States Patent 3361067
US Patent References:
/1260574.html
- - 1260574

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Inventors:
Webb, James E.
Publication Date:
01/02/1968
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Primary Class:
417/322
Other Classes:
600/16, 417/240, 417/557, 310/332
International Classes:
F04B17/00; H01L41/09
US Patent References:
3107630Non-magnetic electro-hydraulic pump
3153156Pressure-proof ceramic transducer