Title:
Method and apparatus for preparing single crystal thin films
United States Patent 3348962
Inventors:
Grossman, Jack J.
Morris, Braunstein
Publication Date:
10/24/1967
Export Citation:
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Assignee:
HUGHES AIRCRAFT CO
Primary Class:
117/84
Other Classes:
117/107, 117/958, 118/504, 118/720, 148/DIG.71, 148/DIG.106, 148/DIG.122, 148/DIG.150, 148/DIG.152, 204/298.11
International Classes:
C30B23/04; C30B23/02
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US Patent References:
3286690Vapor deposition mask
3241519Tensioned and cooled mask
3088435Masking device useful for making transistors