Method and apparatus for preparing single crystal thin films
United States Patent 3348962
US Patent References:
Masking device useful for making transistors
- - 3088435
Tensioned and cooled mask
- - 3241519
Vapor deposition mask
- - 3286690
Masking device useful for making transistors
- - 3088435
Tensioned and cooled mask
- - 3241519
Vapor deposition mask
- - 3286690
Inventors:
Grossman, Jack J.
Morris, Braunstein
Morris, Braunstein
Publication Date:
10/24/1967
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Export Citation:
Assignee:
HUGHES AIRCRAFT CO
Primary Class:
Other Classes:
148/DIG.152, 118/504, 148/DIG.071, 204/298.110, 148/DIG.122, 118/720, 148/DIG.106, 148/DIG.150, 117/958, 117/107
International Classes:
C30B23/04; C30B23/02