Method of producing crystalline semiconductor material on a dendritic substrate
United States Patent 3341376
Inventors:
Eberhard, Spenke
Heinrich, Welker
Publication Date:
09/12/1967
Other Classes:
438/907, 117/98, 117/903, 148/DIG.006, 148/DIG.067, 148/DIG.072, 148/DIG.065, 148/DIG.051, 427/255.500, 438/493, 117/935, 117/22
International Classes:
C01B33/02; C23C16/00; C30B29/60; C30B33/00; H01L21/00; H01L21/205; C01B33/00; C30B29/00; H01L21/02
US Patent References:
| 3031403 | Process for producing crystals and the products thereof | | | |
| 3152022 | Epitaxial deposition on the surface of a freshly grown dendrite | | | |
| 3206406 | Critical cooling rate in vapor deposition process to form bladelike semiconductor compound crystals | | | |