Title:
Method and apparatus for cathode sputtering including suppressing temperature rise adjacent the anode using a localized magnetic field
United States Patent 3330752
US Patent References:
Process and apparatus for growing single crystals
- - 2754259
Laminated magnetic materials and methods
- - 3077444
Method and apparatus for making magnetic recording tape
- - 3117065
Production of thin film metallic patterns
- - 3133874
Methods of and apparatus for forming substances on preselected areas of substrates
- - 3170810
Process and apparatus for growing single crystals
- - 2754259
Laminated magnetic materials and methods
- - 3077444
Method and apparatus for making magnetic recording tape
- - 3117065
Production of thin film metallic patterns
- - 3133874
Methods of and apparatus for forming substances on preselected areas of substrates
- - 3170810
Inventors:
Hallen, Robert L.
Valletta, Robert M.
Valletta, Robert M.
Publication Date:
07/11/1967
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Export Citation:
Assignee:
IBM
Primary Class:
Other Classes:
204/192.150, 118/723R, 204/298.090, 204/298.160, 204/298.230
International Classes:
C23C14/35; C23C14/54; G01N15/08; H01J37/34; H01J37/32