Semi-conductor product and method for making same
United States Patent 3325314

Inventors:
Allegretti, John E.
Publication Date:
06/13/1967
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Assignee:
SIEMENS AG
Primary Class:
148/33.400
Other Classes:
423/350, 148/DIG.115, 257/E21.123, 257/628, 117/101, 257/E29.004, 148/33.300, 148/33, 117/902
International Classes:
C30B23/00; H01L21/20; H01L29/04; H01L21/02; H01L29/02