Method and apparatus for cathode sputtering using a cylindrical cathode
United States Patent 3314873

Inventors:
Gus, Lunsford
Publication Date:
04/18/1967
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Assignee:
WESTERN ELECTRIC CO
Primary Class:
204/192.210
Other Classes:
414/217, 204/192.150, 204/298.110, 118/726, 414/287, 204/298.230, 204/298.250, 204/192.120
International Classes:
C23C14/34; C23C14/56; H01J37/34; H01J37/32
US Patent References:
2823789Parts feeder ribbon
2955998Process for carrying out technical operations in a glow discharge
2976174Oriented magnetic cores
3071533Deposition control means
3123499
3170576Rotary seal
3250694Apparatus for coating articles by cathode sputtering
Foreign References:
GB939275A