Apparatus for cathode sputtering including a plasmaconfining chamber
United States Patent 3291715
US Patent References:
Coating of articles by means of cathode disintegration
- - 2239642
Method and apparatus for making mosaic targets for electron beams
- - 2463180
Apparatus for ionising a gas to obtain high intensity pulsed ions or electrons
- - 3015745
Growth of solid layers on substrates which are kept under ion bombardment before and during deposition
- - 3021271
Thermionic energy converter
- - 3120621
Coating of articles by means of cathode disintegration
- - 2239642
Method and apparatus for making mosaic targets for electron beams
- - 2463180
Apparatus for ionising a gas to obtain high intensity pulsed ions or electrons
- - 3015745
Growth of solid layers on substrates which are kept under ion bombardment before and during deposition
- - 3021271
Thermionic energy converter
- - 3120621
Inventors:
Anderson, Gerald S.
Publication Date:
12/13/1966
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Export Citation:
Assignee:
LITTON SYSTEMS INC
Primary Class:
Other Classes:
422/186.290, 422/186.050, 315/176, 422/906, 204/192.120, 250/426, 313/231.310
International Classes:
C23C14/35; H01J37/34; H01J37/32
Foreign References:
| DE809323C |