Method for continuous gas diffusion
United States Patent 3279964
US Patent References:
Continuous type furnace
- - 2588141
Vapor-solid diffusion of semiconductive material
- - 2873222
Method of diffusion
- - 3205102
Continuous type furnace
- - 2588141
Vapor-solid diffusion of semiconductive material
- - 2873222
Method of diffusion
- - 3205102
Inventors:
Howard, Beck Jacob
Publication Date:
10/18/1966
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Assignee:
BTU ENG CORP
Primary Class:
Other Classes:
438/907, 438/554, 438/567, 438/568, 438/566
International Classes:
C30B31/10; C30B31/00