Title:
Power distribution system for microwave process chambers
United States Patent 3263052


Inventors:
Jeppson, Morris R.
Smith, Franklin J.
Application Number:
US30828463A
Publication Date:
07/26/1966
Filing Date:
09/11/1963
Assignee:
CRYODRY CORP
Primary Class:
Other Classes:
34/263, 34/264, 34/265, 219/691, 219/746
International Classes:
A23L3/01; H05B6/78; H05B6/80
View Patent Images:
Foreign References:
CA652223A1962-11-13
CA664730A1963-06-11
FR979577A1951-04-27
GB930311A1963-07-03