Title:
Vacuum deposition chamber for multiple operations
United States Patent 3238918


Inventors:
Radke, Richard P.
Blair, William E.
Application Number:
US16192761A
Publication Date:
03/08/1966
Filing Date:
12/26/1961
Assignee:
LEAR SIEGLER INC
Primary Class:
Other Classes:
118/725, 118/730
International Classes:
C23C14/04; C23C14/56
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