Vacuum cleaning and vapor deposition of solvent material prior to effecting traveling solvent process

Title:

Vacuum cleaning and vapor deposition of solvent material prior to effecting traveling solvent process

Document Type and Number:

United States Patent 3205101

Inventors:

Mlavsky, Abraham I.
Griffiths, Leonard B.

Sponsored by:
Flash of Genius

Publication Date:

09/07/1965

View Patent Images:

Images are available in PDF form when logged in. To view PDFs, Login or Create Account (Free!)

Referenced by:

Export Citation:

Assignee:

TYCO LABORATORIES INC

Primary Class:

117/42

Other Classes:

438/455, 117/40, 423/345, 257/E33.035, 252/62.30C, 148/DIG.166, 117/951, 252/62.3GA, 148/DIG.107, 438/931

International Classes:

C30B13/02; C30B19/02; H01L33/00; H01S5/30; H01S5/32; C30B13/00; C30B19/00; H01S5/00

US Patent References:

2789068	Evaporation-fused junction semiconductor devices
2996415	Method of purifying silicon carbide
2998334	Method of making transistors
3030704	Method of making non-rectifying contacts to silicon carbide