Vapor deposition process and device
United States Patent 3188230

Inventors:
Robert, Bakish
Irish, Donald B.
Iwan, Marinow
Publication Date:
06/08/1965
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Assignee:
ALLOYD CORP
Primary Class:
Other Classes:
118/50, 118/718, 427/252, 118/719
International Classes:
C23C16/54