Title:
Dicing of micro-semiconductors
United States Patent 3112850
US Patent References:
Method of producing mosaic electrodes
- - 2337569
Method for welding and soldering by electron bombardment
- - 2778926
Dicing semiconductor wafers
- - 2970730
Multiple channel field effect semiconductor
- - 3061739
Method of producing mosaic electrodes
- - 2337569
Method for welding and soldering by electron bombardment
- - 2778926
Dicing semiconductor wafers
- - 2970730
Multiple channel field effect semiconductor
- - 3061739
Inventors:
Garibotti, Domenick J.
Publication Date:
12/03/1963
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Export Citation:
Assignee:
UNITED AIRCRAFT CORP
Primary Class:
Other Classes:
219/121.830, 219/121.690, 219/121.230, 438/463, 219/384, 257/620, 65/112, 257/E21.332, 219/121.200
International Classes:
H01L21/301