Apparatus for method for etching objects
United States Patent 3097154

Inventors:
Eck, John E.
Cain Jr., Francis M.
Publication Date:
07/09/1963
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Assignee:
NUCLEAR MATERIALS & EQUIPMENT
Primary Class:
204/192.330
Other Classes:
204/298.310, 204/198, 313/54, 204/192.320, 439/41, 92/47
International Classes:
C23F4/00; G01N23/20; H01J37/34; H01J37/32
US Patent References:
2702274Method of making an electrode screen by cathode sputtering
2721839Plating apparatus for electrical rectifiers
2754259Process and apparatus for growing single crystals
2785246Altitude speed switch
2899667
Foreign References:
GB779347A
GB804597A