Title:
Process for coating with silicon dioxide
United States Patent 3093507
Inventors:
Lander, James J.
James, Morrison
Publication Date:
06/11/1963
Export Citation:
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Assignee:
BELL TELEPHONE LABOR INC
Primary Class:
438/787
Other Classes:
118/504, 118/725, 148/DIG.118, 257/E21.285, 427/248.1
International Classes:
C23C14/00; H01L21/316; C23C14/00; H01L21/02
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US Patent References:
2969296Thermal expansion fixture for spacing vaporized contacts on semiconductor devices
2957789Semiconductor devices and methods of preparing the same
2953486Junction formation by thermal oxidation of semiconductive material
2948642Surface treatment of silicon devices
2904450Transparent coating
2891203Silicon rectifiers
Foreign References:
GB765480A