Process for coating with silicon dioxide
United States Patent 3093507
US Patent References:
Silicon rectifiers
- - 2891203
Transparent coating
- - 2904450
Surface treatment of silicon devices
- - 2948642
Junction formation by thermal oxidation of semiconductive material
- - 2953486
Semiconductor devices and methods of preparing the same
- - 2957789
Silicon rectifiers
- - 2891203
Transparent coating
- - 2904450
Surface treatment of silicon devices
- - 2948642
Junction formation by thermal oxidation of semiconductive material
- - 2953486
Semiconductor devices and methods of preparing the same
- - 2957789
Inventors:
Lander, James J.
James, Morrison
James, Morrison
Publication Date:
06/11/1963
View Patent Images:
Export Citation:
Assignee:
BELL TELEPHONE LABOR INC
Primary Class:
Other Classes:
118/725, 118/504, 427/248.100, 148/DIG.118, 257/E21.285
International Classes:
C23C14/00; H01L21/316; H01L21/02
US Patent References:
| 2969296 | Thermal expansion fixture for spacing vaporized contacts on semiconductor devices |
Foreign References:
| GB765480A |